• 전기학회논문지
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• 제57권11호
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• pp.2006-2010
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• 2008

In this paper, we fabricated a biosensor for detecting hydrogen peroxide and investigated the sensing property. We prepared a viologen and hemoglobin modified gold electrode using self-assembly and layer by layer method. The electrochemical property of the viologen derivative was characterized in 0.1 M $NaClO_4$ electrolyte solution by cyclic voltammetry. The modified electrode showed reversible electrochemical properties and high stability. From the results, the viologen can act as a charge transfer mediator for access to the electrode surface. The catalytic characteristics of the designed sensor proved that hemoglobin has been kept in its natural structure and can retain its biological activity. The designed biosensor showed a fast amperometric response, excellent linearity and low detection limit. In addition, it had high sensitivity, good reproducibility and stability.

• 전기화학회지
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• 제17권3호
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• pp.164-171
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• 2014

무효소 혈당센서는 높은 선택성과 민감성을 가지고 저비용으로 체내 혈당(glucose)을 검출할 수차세대 기술이다. 현재 시판되고 있는 혈당센서는 당을 산화시켜주는 당산화효소와 전극과 효소사이에 전자 전달을 원활하게 해주는 산화/환원 매개체를 이용하여 효소센서로 제작된다. 그러나 이러한 효소센서는 pH, 온도, 습도, 화학적 독성물질 등에 영향을 많이 받아 안정성이 떨어지고, 제작에 비용이 많이 드는 단점을 가지고 있다. 본 논문은 위와 같은 단점을 해결하고자 환원제인 당에 의하여 환원되는 니켈 나노입자를 전기화학적 흡착방법을 이용하여 산화 인듐 주석 전극 (ITO)에 고정시켰다. 고정된 니켈 나노입자는 전극의 표면적을 넓혀 신호를 증폭시키는 효과를 가지고 있으며, 당에 의하여 계속적으로 니켈이 환원됨에 따라 전극 반응에서는 촉매산화전류 반응으로 나타낸다. 당의 농도에 따라서 선형적으로 감응 할 수 있는 최적 조건의 니켈 나노입자를 이용하여 혈당센서를 제작하였다. 또한 체내에 존재하는 방해 인자인 아스코브산의 간섭을 억제하기 위해 음이온 고분자의 표면처리를 통하여 상대적으로 당에 선택적으로 감응하도록 하였다. 제작된 전극을 통하여 당 농도 별 산화 촉매 전류를 순환 전압 전류 법으로 측정한 결과 650 mV (vs. Ag/AgCl)에서 최대 전기적 신호가 발생되었으며, 포도당 0~6.15 mM 의 농도범위에서 전기적 신호가 선형 증가함을 확인할 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계합동학술대회 논문집
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• pp.192-196
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• 2002

This paper describes on the fabrication and characteristics of a metal thin-film pressure sensor based on Cr strain-gauges for harsh environment applications. The Cr thin-film strain-gauges are sputter-deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single-crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Cr thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097~1.21 $mV/V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• 전기학회논문지
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• 제65권4호
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• pp.622-627
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• 2016

This paper describes the development of a portable potentiostat which can perform square wave voltammetry on electrochemical sensors and wireless transmission of the measured data to a smartphone using Bluetooth. The potentiostat consists of a square wave potential pulse generation circuit for applying the potential pulse to the electrochemical sensor, a reduction/oxidation (or redox) current measurement circuit, and Bluetooth for wireless data transmission to an Android-based smartphone. The measured data are then processed to show the output graph on the smart phone screen in real time. This data transformation into a graph is carried out by developing and installing a simple transformation application software in the Android-based smartphone. This application software also enables the user to set and change the measurement parameters such as the applied voltage range and measured current range at user's convenience. The square voltammetry output data measured with the developed portable potentiostat were almost same as the data of the commercial potentiostat. The measured oxidation peak current with the commercial potentiostat was $11.35{\mu}A$ at 0.26 V and the measured oxidation peak current with the developed system was $12.38{\mu}A$ at 0.25 V. This proves that performance of the developed portable measurement system is comparable to the commercial one.

• 전기학회논문지
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• 제67권3호
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• pp.406-412
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• 2018

This paper describes the fabrication process of laser induced graphene (LIG) and its transfer method on to a flexible and stretchable PDMS substrate. By irradiating CO2 laser on a polyimide(PI) film surface, a localized high temperature is created, resulting in a three-dimensional porous graphene network structure with good conductivity. This LIG electrode is relatively easy to fabricate and since it is very weak the LIG electrode was transferred to a flexible PDMS substrate to increase the sturdiness as well as possible use in flexible applications. Sheet resistance, thickness, and electrochemical activity of the fabricated in-situ LIG electrodes have been examined and compared with the LIG electrodes after transferring to PDMS elastomer. The properties of the LIG electrodes were also examined depending on the $CO_2$ laser power. As the irradiated laser power increased, the LIG electrode resistance decreases and the LIG electrode thickness increased. At 4.8 W of laser power, the average sheet resistance and thickness of the fabricated LIG electrodes were approximately $31.7{\Omega}/{\Box}$ and $62.67{\mu}m$, respectively. Moreover, the electrochemical activity of the fabricated LIG electrode at 4.8 W of laser power showed a high oxidation current of $28.2{\mu}A$ after transferring to PDMS.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.59-63
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• 2002

This paper reports on the fabrication process and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited on a thermally oxidized micromachined Si diaphragms with buried cavities for overpressure tolerance. The proposed device takes advantage of the good mechanical properties of single-crystalline Si as a diaphragm fabricated by SDB and electrochemical etch-stop technology, and in order to extend the temperature range, it has relatively higher resistance, stability and gauge factor of Ta-N thin-films more than other gauges. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.21 ~ 1.097 mV/V.kgf/$\textrm{cm}^2$ in temperature ranges of 25~ $200^{\circ}C$ and a maximum non-linearity is 0.43 %FS.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.731-734
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• 2002

This paper describes on the fabrication and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain gauges for harsh environment applications. The Ta-N thin-film strain gauges are sputter deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Ta-N thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high sensitivity, low non-linearity and excellent temperature stability. The sensitivity is $1.097{\sim}1.21mV/V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• 전기학회논문지
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• 제67권12호
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• pp.1626-1632
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• 2018

In this paper, we describe the fabrication and characterization of a hydrogen peroxide ($H_2O_2$) sensor based on palladium and copper (PdCu) electroplated laser induced graphene (LIG) electrodes. $CO_2$ laser was used to form LIG electrodes on a PI film. This fabrication method allows simple control of the LIG electrode size and shape. The PdCu was electrochemically deposited on the LIG electrodes to improve the electrocatalytic reaction with $H_2O_2$. The electrochemical performance of this sensor was evaluated in terms of selectivity, sensitivity, and linearity. The physical characterization of this sensor was conducted using scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS), which confirmed that PdCu was formed on the laser induced graphene electrode. In order to increase the sensor sensitivity, the Pd:Cu ratio of the electroplated PdCu was varied to five different values and the condition of highest amperometric current at an identical of $H_2O_2$ concentration was chosen among them. The resulting amperometric current was highest when the ratio of Pd:Cu was 7:3 and this Pd;Cu ratio was employed in the sensor fabrication. The fabricated PdCu/LIG electrode based $H_2O_2$ sensor exhibited a sensitivity of $139.4{\mu}A/mM{\cdot}cm^2$, a broad linear range between 0 mM and 16 mM of $H_2O_2$ concentrations at applied potential of -0.15 V, and high reproducibility (RSD = 2.6%). The selectivity of the fabricated sensors was also evaluated by applying ascorbic acid, glucose, and lactose separately onto the sensor in order to see if the sensor ourput is affected by one of them and the sensor output was not affected. In conclusion, the proposed PdCu/LIG electrode based $H_2O_2$ sensor seems to be suitable $H_2O_2$ sensor in various applications.

• 공업화학
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• 제28권3호
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• pp.369-374
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• 2017

바이오센서를 상업적으로 양산하고자 할 때 제작비의 경제성이 고려되어야 한다. 과산화수소를 정량하기 위한 효소전극 제작 시 필수적으로 사용되는, 서양고추냉이로부터 추출된 과산화효소는 대단히 고가이므로 탄소반죽법에 의한 전극제작의 제한 요인이 된다. 이 문제를 우회하고자 본 실험실에서는 생활주변에서 쉽게 얻을 수 있는 재료로 대체하기 위하여 아카시아 잎을 효소원으로 사용하여 과산화수소 센서를 제작하고 그것의 전기화학적 특성을 살펴보았다. 일정전압전류법으로 얻어진 10개 이상의 전기화학적 파라미터와 실험적 결과들은 효소전극이 정량적으로 그 기능을 발휘하고 있음을 보여주었다. 이런 사실들은 시판 과산화효소가 아카시아 잎으로 대체될 수 있음을 보여주는 것이다.

• 센서학회지
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• 제12권5호
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• pp.199-204
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• 2003

본 논문에서는 Ta-N 스트레인게이지를 이용한 극한 환경용 세라믹 박막형 압력센서의 제작 및 특성에 관하여 연구하였다. 압력감지부로 Ta-N 스트레인게이지를 사용하였으며, SDB(Si-wafer Direct Bonding)와 전기화학적 식각정지법을 이용하여 매몰 cavity를 가지는 저가격 고수율의 Si 박막 다이어프램을 제작하였다. 또한, 실리콘 박막 다이어프램상에 박막형 스트레인게이지를 형성하여 세라믹 박막형 압력센서를 제작하였다. 제작된 세라믹 박막형 압력 센서는 기존의 스트레인 게이지를 이용한 로드셀에 비해서 온도특성이 우수하고 재현성, 소형화, 집적화 및 저가격화가 가능하기 때문에 고온, 고압 등의 각한 환경에서도 사용이 가능할 것으로 기대된다.