• Title/Summary/Keyword: Paper Friction Material

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A Study on Stick-slip Friction and Scratch in Cu CMP (Cu CMP에서 스틱-슬립 마찰과 스크래치에 관한 연구)

  • Lee, Hyun-Seop;Park, Boum-Young;Jeong, Suk-Hoon;Jeong, Jae-Woo;Seo, Heon-Deok;Jeong, Hae-Do
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.653-654
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    • 2005
  • Stick-slip friction is one of the material removal mechanisms in tribology. This stick-slip friction occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction force monitoring system for chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. It seems that the stick-slip friction causes scratches on the surface of moving parts. In this paper, A study on the scratches which occur during copper CMP was conducted in a view of stick-slip friction.

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Experimental Study on the Friction and Wear Characteristics of Contact Sealing Unit for a Water Turbine (수차용 봉수장치의 마찰.마모특성에 관한 실험적 연구)

  • Kim, Chung-Kyun;Sihn, Ihn-Cheol;Lim, Kwang-Hyeon
    • 한국신재생에너지학회:학술대회논문집
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    • 2006.11a
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    • pp.515-518
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    • 2006
  • This paper presents the friction and wear characteristics of contact type sealing unit for a water turbine of a small hydro-power generation, which Is to stop a leakage of a circulating water from a outside of an impeller to an inside of a rolling bearing. The surface wear strongly affect to the seal life of a mechanical face seal. In this study, the hardness of a stainless steel in which is a heat-treated is 892.8 in Vickers hardness and the hardness of silicone carbide of SiC is 714.1 in Vickers hardness. The surface hardness of a heat-treated stainless steel is 25% high compared with that of a ceramic material of SiC. The contact modes of rubbing surfaces aye a dry friction a water film friction and a mixed friction that is contaminated by a dust, silt and moistures, etc. These two factors of a contact rubbing modes and a material property are very important parameters on the tribological performance such as a friction and wear between a seal ring and a seal seat. The experimental result shows that the surface hardness of a seal material is very important on the friction coefficient and a wear volume. Thus, the results recommend higher hardness of a seal material, which may reduce a friction loss and increase a wear life of primary seal components

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Tribology Research Trends in Chemical Mechanical Polishing (CMP) Process (화학기계적 연마(CMP) 공정에서의 트라이볼로지 연구 동향)

  • Lee, Hyunseop
    • Tribology and Lubricants
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    • v.34 no.3
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    • pp.115-122
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    • 2018
  • Chemical mechanical polishing (CMP) is a hybrid processing method in which the surface of a wafer is planarized by chemical and mechanical material removal. Since mechanical material removal in CMP is caused by the rolling or sliding of abrasive particles, interfacial friction during processing greatly influences the CMP results. In this paper, the trend of tribology research on CMP process is discussed. First, various friction force monitoring methods are introduced, and three elements in the CMP tribo-system are defined based on the material removal mechanism of the CMP process. Tribological studies on the CMP process include studies of interfacial friction due to changes in consumables such as slurry and polishing pad, modeling of material removal rate using contact mechanics, and stick-slip friction and scratches. The real area of contact (RCA) between the polishing pad and wafer also has a significant influence on the polishing result in the CMP process, and many researchers have studied RCA control and prediction. Despite the fact that the CMP process is a hybrid process using chemical reactions and mechanical material removal, tribological studies to date have yet to clarify the effects of chemical reactions on interfacial friction. In addition, it is necessary to clarify the relationship between the interface friction phenomenon and physical surface defects in CMP, and the cause of their occurrence.

Properties of friction material for impact driven piezoelectric actuator (Impact 구동 방식 압전 엑츄에이터의 마찰재 특성)

  • Lee, Dong-Kyun;Kang, Byung-Woo;Moon, Jae-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.285-285
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    • 2007
  • Friction material in a piezoelectric system is a important part to affect to moving performance. In this paper, alumina ceramics $(AlO_2)$, silicon carbide (SiC), high speed steel and super-hard alloy (WC, Tungsten Carbide) having a hardness knoop of 1000 to 2000 $kg/mm^2$ were tested as a friction material of AF module. Even though $AlO_2$, SiC and high speed steel were a high-hardness material, $AlO_2$ and SiC were worn by a rough surface, and SiC is rusted in humidity condition. AF module using super-hard alloy has showed a stable moving performance in life time test.

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The Effects of Relative Material Properties on the Friction and Wear Behavior of Pure Metals (순수금속의 재료물성치와 마찰.마멸특성에 대한 연구)

  • 황동환;성인하;김대은
    • Tribology and Lubricants
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    • v.14 no.2
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    • pp.10-20
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    • 1998
  • In this paper, the effects of material properties on the friction and wear behavior of pure metals are investigated. The sliding material pairs are selected based on their relative compatibility and relative hardness ratio of the specimen. The initial and steady-state friction coefficients are obtained in the experiments and the wear rates are quantitatively investigated. It is shown that the initial friction coefficient is affected by the hardness ratio of sliding materials. Furthermore, in steady state condition, neither hardness ratio nor compatibility has significant influence on the frictional behavior. As for wear, the ductility of the metal affects the wear particle generation process which in turn affects the frictional behavior. The findings of this research suggest that frictional interaction cannot be simply characterized by either compatibility or hardness ratio of the materials undergoing sliding contact.

Effect of an Intermediate Support on the Stability of Elastic Material Subjected to Dry Friction Force (건성마찰력을 받는 탄성재료의 안정성에 미치는 중간 지지의 효과)

  • 류시웅;장탁순
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.8
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    • pp.129-135
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    • 2004
  • This paper discussed on the effect of an intermediate support on the stability of elastic material subjected to dry friction force. It is assumed in this paper that the dry frictional force between a tool stand and an elastic material can be modeled as a distributed follower force. The elastic material on the friction material is modeled for simplicity into an elastic beam on Winkler-type elastic foundation. The stability of beams on the elastic foundation subjected to distributed follower force is formulated by using finite element method to have a standard eigenvalue problem. The first two eigen-frequencies are obtained to investigate the dynamics of the beam. The eigen-frequencies yield the stability bound and the corresponding unstable mode. The considered beams lose its stability by flutter or divergence, depending on the location of intermediate support.

A study on the friction force caused by abrasives in chemical mechanical polishing (CMP시 연마입자에 작용하는 마찰력에 관한 연구)

  • Kim, Goo-Youn;Kim, Hyoung-Jae;Park, Beom-Young;Jeong, Young-Suk;Jeong, Hae-Do
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.1312-1315
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    • 2004
  • Chemical Mechanical Polishing is referred to as a three body tribological system, because it includes two solids in relative motion and the slurry. On the assumption that the abrasives between the pad and the wafer could be a major reason of not only the friction force but also material removal during polishing. The friction force generated by the abrasives was inspected with the change of abrasive size and concentration in this paper. The variation of coefficient of friction with abrasive concentration and size could result from the condition of contact and load balance between wafer and abrasives carried by pad asperity. The simulation was performed in this paper and compared with the result of experiment. The material removal rate also estimated with abrasive concentration and size increasement.

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A Study of the Characteristic of Friction Coefficient Variation for the External Environment (외부환경에 따른 마찰재의 마찰계수 변화 특성에 대한 연구)

  • Lee, Girhyoung;Lee, Dongkyu
    • Transactions of the Korean Society of Automotive Engineers
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    • v.23 no.6
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    • pp.601-607
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    • 2015
  • The friction material for automobile is manufactured by mixing several composites to stop the running vehicles. Friction characteristics are changed significantly according to the relative amount of the base materials. However, difference of friction coefficient is sometimes measured at the test for the same friction material. Nevertheless, the study for solving these problems is insufficient. In this paper, the friction tests were carried out by changing the external environment and processing condition when the main ingredients are fixed and also evaluated how the friction coefficient changes. The variables are cooling air speed, humidity (Relative humidity and Absolute humidity), scorching time, soaking time and pad area. And it is analytically considered which environmental factor mainly affects the characteristic of friction coefficient variation by experiment. It is expected that the results from this study can be very useful as a database for development of the friction material.

A Study on Weld Characteristics Analysis of Dissimilar Material (A105-A312) and Shape Friction Welding for Marine Plant Piping (해양 플랜트 배관용 이종 소재(A105-A312) 및 이종 형상 마찰용접의 용접 특성 분석에 대한 연구)

  • Kong, Yu-Sik;Kim, Tae Wan;Kwak, Jae Seob;Ahn, Yong Sik;Park, Young Whan
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.19 no.3
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    • pp.29-35
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    • 2020
  • This paper studies the main parameters of tube-to-bar dissimilar material and shape friction welding for piping materials. The weldability of joint parts was investigated with respect to tensile tests, micro-Vickers hardness, the bond of area, and optical microstructure. The specimens are tested as-welded. Optimal welding conditions are n = 2000 rpm, HP = 50 MPa, UP = 100 MPa, HT = 5 sec, and UT = 10 sec when the metal loss (Mo) is 11 mm. Moreover, the same two materials for friction welding are strongly mixed with a well-combined structure of micro-particles without any molten material, particle growth, or defects. Therefore, the expected result of dissimilar material friction welding includes a reduction of cost and material in the welding process.

Experimental investigation on hysteretic behavior of rotational friction dampers with new friction materials

  • Anoushehei, Majid;Daneshjoo, Farhad;Mahboubi, Shima;Khazaeli, Sajjad
    • Steel and Composite Structures
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    • v.24 no.2
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    • pp.239-248
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    • 2017
  • Friction dampers are displacement dependent energy dissipation devices which dissipate earthquake energy through friction mechanism and widely used in improving the seismic behavior of new structures and rehabilitation of existing structures. In this paper, the cyclic behavior of a friction damper with different friction materials is investigated through experimental tests under cyclic loading. The damper is made of steel plates, friction pads, preloaded bolts and hard washers. The paper aims at investigating the hysteretic behavior of three friction materials under cyclic loading to be utilized in friction damper. The tested friction materials are: powder lining, super lining and metal lining. The experimental results are studied according to FEMA-356 acceptance criteria and the most appropriate friction material is selected by comparing all friction materials results.