• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.939-942
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• 1997

In chemical mechanical polishing(CMP) there are many factors affecting the results. Temperature is one of the factors and it affects the removal rate. That is, the higher it arise, the more the material is removed. But the detailed temperature behavior is not discovered. In this study, we discover the distribution of temperature across the pad where the wafer has just been polished. And then we reveal the cause of the result in connection with the mechanical structure. In addition, we also discover the relationship of the friction force and normal force. With the result of two forces, we get the friction coefficient and obtain the contact model of the wafer and pad.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.171-175
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• 2001

Chemical mechanical polishing(CMP) process has been widely used to planarize dielectrics and metal, which can apply to employed in integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of free-defects in inter level dielectrics and metal. Especially, defects like (micro-scratch) lead to severe circuit failure, and affects yield. Current conditioning method - bladder type, orbital pad motion- usually provides unsuitable pad profile during ex-situ conditioning near the end of pad life. Since much of the pad wear occurs by the mechanism of bladder type conditioning and its orbital motion without rotation, we need to implement new ex-situ conditioner which can prevent abnormal regional force on pad caused by bladder-type and also need to rotate the pad during conditioning. Another important study of ADPC is related to the orbital scratch of which source is assumed as diamond grit dropped from the strip during ex-situ conditioning. Scratch from diamond grit damaged wafer severely so usually scraped. Figure 1 shows the typical shape of scratch damaged from diamond. e suspected that intensive forces to the edge area of bladder type stripper accelerated the drop of Diamond grit during conditioning. so new designed Flat stripper was introduced.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.10
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• pp.935-945
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• 2014

This paper presents a new road generative system that employs a pad of preventive overspeed or tollgate. The system consists of pad, shaft, torsional damper, oneway-clutch, gear system, and electricity generator components. When the car driven through the road generation system, it occurred to surplus energy in the DC power. In order to maximize the power of electricity energy harvester, the simulation software is developed. It is used to determine parametric dimension for optimal design with the theoretically calculated results from the simulation software. The transient responses at the conditions of low and high vehicle speed are compared with the calculated results as torque, impact force, power, out energy etc. Consequently, before design a road generation system, the analysis of simulation results shows that the proposed concept and system has efficiency and confidence.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.9-14
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• 2001

A new model utilizing a transfer function is introduced in the present paper for analizing motion errors of hydrostatic tables. Relationship between film reaction force in a single hydrostatic pad and form error of a guide rail is derived at various spacial frequencies by finite element analysis, and it is expressed as a transfer function. This transfer function clarifies so called averaging effect of the oil film quantitively. For example, it is found that the amplitide of the film reaction force is reduced as the spacial frequency increases or relative width of the pocket is reduced. Motion errors of a multiple pad table is estimated from transfer function, geometric relationship between each pads and form errors of a guide rail, which is named as Transfer Function Method. Calculated motion errors by TFM show good agreement with motion errors calculated by Multi Pad Method, which is considered entire table as an analysis object. From the results, it is confirmed that the proposed TFM is very effective to analyze the motion errors of hydrostatic tables.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.10a
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• pp.179-180
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• 2009

본 연구에서는 ENIG, ENEPIG 의 Pad 표면처리가 고속전단시험에 미치는 영향에 대해 연구하고자 하였다. Pad의 표면처리를 ENIG와 ENEPIG로 하여 고속전단시험을 수행하여 그에 따른 Shear force와 Shear energy를 측정하였다. 고속전단시험결과 ENEPIG 표면처리 시편이 ENIG의 표면처리시편보다 shear force와 shear energy의 값이 높게 나타났다.

• Tribology and Lubricants
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• v.20 no.5
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• pp.284-291
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• 2004

We present a three-dimensional average flow model considering elastic deformation of pad asperities for chemical mechanical planarization. To consider the contact deformation of pad asperities in the calculation of the flow factor, three-dimensional contact analysis of a semi-infinite solid based on the use of influence functions is conducted from computer generated three dimensional roughness data. The average Reynolds equation and the boundary condition of both force and momentum balance are used to investigate the effect of pad roughness and external pressure conditions on film thickness and wafer position angle.

• Proceedings of the Materials Research Society of Korea Conference
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• 2006.05a
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• pp.19.2-19.2
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• 2006

• Proceedings of the Korean Operations and Management Science Society Conference
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• 1996.04a
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• pp.141-146
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• 1996

Hand posture and force, which define aspects of the way an object is grasped, are features of robotics manipulation. A means for specifying these grasping "flavors" has been developed that uses an instrumented glove equipped with joint and force sensors. The new grasp specification system is being used at the Pennsylvania State University (Penn State) in a Virtual Reality based Point-and-Direct(VR-PAD) robotics implementation. In the Computer Integrated Manufacturing (CIM) Laboratory at Penn State, hand posture and force data were collected for manipulating bricks and other items that require varying amounts of force at multiple pressure points. The feasibility of measuring desired grasp characteristics was demonstrated for a modified Cyberglove impregnated with FSR (Force Sensitive Resistor) pressure sensors in the fingertips. A joint/force model relating the parameters of finger articulation and pressure to various lifting tasks was validated for the instrumented "wired" glove. Operators using such a modified glove may ultimately be able to configure robot grasping tasks in environments involving hazardous waste remediation, flexible manufacturing, space operations and other flexible robotics applications. In each case, the VR-PAD approach improved the computational and delay problems of real-time multiple-degree-of-freedom force feedback telemanipulation.ck telemanipulation.

• Proceedings of the KSR Conference
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• 2008.06a
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• pp.996-1001
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• 2008

To stop the train safely within the limited traveling distance and reduce its speed to the desired speed, it is necessary to guarantee the correct braking force. Presently, most trains have electric propulsion system and have adopted combined electrical and mechanical(friction) braking system. The friction coefficient between brake disc and pad is an important parameter in determining the mechanical braking force. In general, friction coefficient data of braking material have been taken through the dynamo-test in a laboratory. This study have suggested two methodologies that can measure friction coefficient of braking material on the train's actual operating condition. The first is the direct method; measure the brake force and the clamping force applied on the mechanical brake by using strain gauges installed at the brake disk, and then calculate it. The second method is the indirect method; obtain the friction coefficient by using the train load and the equivalent brake force which is deducted the longitudinal force, such as resistance to motion, gradient resistance and curved resistance, from the inertia force applied to the train.

• 한국방재학회:학술대회논문집
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• 2008.02a
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• pp.279-282
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• 2008

The vertical forces in rail fasteners at areas of bridge transitions near the embankment and on the pier will occur due to different deformations of adjoining bridges caused by the trainloads. The up-lifting forces is not large problem in the blast track because the elasticity of blast and rail pad buffs up-lifting effect. But, it is likely to be difficult to ensure the serviceability of the railway and the safety of the fastener in the end in that concrete slab track consist of rail, fastener, and track in a single body, delivering directly the up-lifting force to the fastener if the deck is bended because of the end rotation of the overhang due to the vertical load. When the up-lifting force exceeds the clamp force of the fastener clip, the rail pad is out of fastener, which makes decrease the serviceability of the railway, such as noise and vibration. Furthermore, it is possible to reduce the safety of the track as the longitudinal resistance. This study is focused on guideline suggestion to decrease up-lifting force in the fastener adjacent to the civil joint of slab track of bridge throughout the parametric analysis between the vertical spring stiffness of the fastener as the material approach, the space of fastener adjacent to bridge transition, the rigidity of the girder as the geometrical approach and up-lifting force under the train load.