저압화학기상증착법에 의한 $Si_3N_4$ 내산화.내마모 코팅
($Si_3N_4$ Coating for Improvement of Anti-oxidation and Anti-wear Properties by Low Pressure Chemical Vapor Deposition)
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- 한국재료학회지
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- 제5권7호
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- pp.835-841
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- 1995