• 제목/요약/키워드: PZT sensor/actuator

검색결과 74건 처리시간 0.03초

튜닝포크를 이용한 액체밀도의 계측 (Measurement of Liquid Density using Tuning Fork)

  • 김충현;이용복;이성철
    • 한국공작기계학회논문집
    • /
    • 제16권1호
    • /
    • pp.86-91
    • /
    • 2007
  • A sensor using quartz toning fork is presented for measuring liquid density. It consists of a PZT plate as an actuator for piezoelectric excitation and a quartz tuning fork as a sensor for resonant frequency detection. The resonant frequency is determined from the sensing voltage measured in tuning fork when the excitation frequencies of PZT actuator are swept around the resonant frequencies of tuning fork. The resonant frequency determined the liquid density. The density values of three kinds of organic solvents are measured and compared with the standard values. The experimental results are in agreement with the standard values and the maximum standard deviation is less than 9%.

압전세라믹 기판과 고자왜박막을 결합한 스마트액츄에이타 (Smart Actuators Composed of Piezoelectric Ceramics and Highly Magnetostrictive films)

  • 신광호
    • 대한전기학회논문지:전기물성ㆍ응용부문C
    • /
    • 제49권5호
    • /
    • pp.289-293
    • /
    • 2000
  • This paper presents a study on the linear compensation of nonlinear hysteric actuators using the highly magnetostrictive film pattern as a strain sensor. Elements had a hybrid structure, in which thin soft glass substrate with the highly magnetostrictive amorphous FeCoSiB film was bonded on the PZT piezoelectric substrate. The magnetostrictive film as a strain sensor detects the deflection of an actuator, and a voltage signal from the strain sensor related to the deflection of an actuator is used for the linear control of an actuator.

  • PDF

초고압 압력센서용 다이어프램 설계 및 PZT 구동 변형시험기를 이용한 성능평가 (Design of Diaphragm for Ultra High Pressure Sensors and Its performance Evaluation Using a PZT Actuated Deformation Tester)

  • 윤대중;안중환
    • 센서학회지
    • /
    • 제28권1호
    • /
    • pp.58-63
    • /
    • 2019
  • This research aims at designing a diaphragm made of SUS316L stainless steel for ultra high pressure sensors and evaluating its performance with a PZT driven deformation tester instead of high pressure chamber testing up to 100 MPa. Finite element method analysis indicates that the optimum thickness of a flat diaphragm is 1.5 mm not only to secure safety of sensors up to 100 MPa but also to enhance displacement measuring sensitivity. For this thickness, the maximum displacement at the center of the diaphragm is $5.3{\mu}m$. The PZT actuator must offer a force of 1,669 N to create a pressure of 100 MPa at the diaphragm surface in order to obtain a displacement of $5.3{\mu}m$. The performance evaluation by the PZT driven tester demonstrates nearly the same results as the same results as the sensors tested in the ultra high pressure chamber.

박막 절단용 PZT 구동 미세깊이 조절 장치의 특성 (Characteristics of a PZT-Driven Micro Depth Adjustment Device for Cutting Coated Film)

  • 류상오;김화영;안중환
    • 한국생산제조학회지
    • /
    • 제23권6호
    • /
    • pp.630-635
    • /
    • 2014
  • This study aims to develop a PZT-driven depth adjustment device with a flexure hinge and to investigate its static/dynamic characteristics. This device will be applied to rapidly and accurately trace a flat surface with slight waviness of up to several hundreds of micrometers in magnitude. One typical example is to cut a film coated on a steel plate. A depth control system composed of PMAC, PZT/PZT amplifier, flexure hinge/knife, and laser displacement sensor is implemented on a desktop three-axis machine and an actual cutting test is conducted on a steel workpiece with a sinusoidal-wavy surface. It is verified that the dynamic characteristics of the device limit the maximum cutting speed and depth precision.

복합재료와 압전재료로 구성된 곡면형 작동기의 열변형 및 잔류응력 해석 (Thermal Deformation and Residual Stress Analysis of Lightweight Piezo-composite Curved Actuator)

  • 정재한;박기훈;박훈철;윤광준
    • 한국복합재료학회:학술대회논문집
    • /
    • 한국복합재료학회 2001년도 춘계학술발표대회 논문집
    • /
    • pp.126-129
    • /
    • 2001
  • LIPCA (LIghtweight Piezo-composite Curved Actuator) is an actuator device which is lighter than other conventional piezoelectric ceramic type actuator. LIPCA is composed of a piezoelectric ceramic layer and fiber reinforced light composite layers, typically a PZT ceramic layer is sandwiched by a top fiber layer with low CTE (coefficient of thermal expansion) and base layers with high CTE. LIPCA has curved shape like a typical THUNDER (thin-layer composite unimorph feroelectric driver and sensor), but it is lighter an than THUNDER. Since the curved shape of LIPCA is from the thermal deformation during the manufacturing process of unsymmetrically laminated lay-up structure, an analysis for the thermal deformation and residual stresses induced during the manufacturing process is very important for an optimal design to increase the performance of LIPCA. To investigate the thermal deformation behavior and the induced residual stresses of LIPCA at room temperature, the curvatures of LIPCA were measured and compared with those predicted from the analysis using the classical lamination theory. A methodology is being studied to find an optimal stacking sequence and geometry of LIPCA to have larger specific actuating displacement and higher force. The residual stresses induced during the cooling process of the piezo-composite actuators have been calculated. A lay-up geometry for the PZT ceramic layer to have compression stress in the geometrical principal direction has been designed.

  • PDF

압전 감지기와 작동기를 이용한 양단 고정보의 능동 진동 제어 (Active Vibration Control of Fixed-Fixed Beam Using Piezoelectric Sensor and Actuator)

  • 한상보;곽문규;최이호;윤신일
    • 한국소음진동공학회:학술대회논문집
    • /
    • 한국소음진동공학회 1996년도 추계학술대회논문집; 한국과학기술회관, 8 Nov. 1996
    • /
    • pp.260-265
    • /
    • 1996
  • Active control of forced vibration response of a fixed-fixed beam implementing PZT sensor/actuator was conducted. Among various control scheme, PPF control was chosen due to its amenability and natural robustness. For a single frequency excitation, the PPF control provided reasonable controllability with the appropriate damping ratio of the compensator. Without increasing actuator voltage, best controllability can be obtained by the exact tuning between the natural frequency of the structure and the cut-off frequency of the compensator. Even the multi-frequency excitation, the PPF provided good vibration suppression for corresponding mode of interest, even though residual modes should be controlled with independent compensators for each mode.

  • PDF

Admittance 기반 압전체 센서 자가진단절차의 영향인자 파악 및 실험적 고찰 (Experimental Investigation on Admittance-Based Piezoelectric Sensor Diagnostic Process)

  • 조혜진;박통일;박규해
    • 대한기계학회논문집A
    • /
    • 제39권1호
    • /
    • pp.37-43
    • /
    • 2015
  • 압전소자(Piezoelectric transducer, PZT)는 구조물의 안정성 평가를 목적으로 하는 구조 건전성 모니터링 기법(Structural Health Monitoring, SHM)의 센서(sensor) 및 구동기(actuator)로 많이 활용되고 있다. 사용되는 센서 및 구동기의 성능을 사전에 파악하고, 잔존수명 및 결함을 탐지하는 센서 자가 진단법은 안정적인 SHM의 결과를 얻기 위해 매우 중요한 절차이다. 본 연구에서는 Admittance 값을 기반으로 한 센서 자가 진단절차를 통하여 압전체 센서의 결함을 탐지하였으며, 센서 진단과정에 영향을 줄 수 있는 접합층 및 온도 등의 영향인자에 대해 실험적 분석을 실시하였다. 분석 결과 Admittance와 온도 및 접착제의 상관관계를 파악할 수 있었으며, admittance를 기반으로 한 센서 자가 진단 절차를 통해 센서의 접착상태와 접착제의 성능평가가 가능함을 검증하였다.

수중에서 펄스초음파 신호에 대한 Sagnac 간섭형 광섬유센서의 특성 연구 (A Study on Characteristics of Sagnac Interferometric Optical Fiber Sensor to Pulsed Ultrasonic Signal in Underwater)

  • 이준호;신대용
    • 대한전기학회논문지:전기물성ㆍ응용부문C
    • /
    • 제53권1호
    • /
    • pp.15-19
    • /
    • 2004
  • In this paper, we present the fabrication and characteristic analysis of Sagnac interferometric optical fiber senior(OFS) system for detecting pulsed ultrasonic signal in underwater. The hollow cylindrical mandrel wound round by single mode optical fiber is used as sensing component. The ultrasonic signal source is simulated by the PZT actuator operated by an function generator. The distance dependency of the OFS's sensitivity was measured. The sensitivity has been shown to be inversely propotional to the square-root of distance between ultrasonic source and sensing component. It has also been shown that the OFS could detect the signals less affected by ultrasonic path comparing to conventional acousto-electric sensor. and accurate location of ultrasonic signal could be carried out using two OFSs.

Design and Control of 3DOF High Precision Positioning System With Double L Type Flexure Hinge Module

  • Kim, Ki-Beom;Jeon, Seung-Jin;Hwang, Dal-Yeon;Choi, Young-Jun;Park, Suk-Ho
    • 제어로봇시스템학회:학술대회논문집
    • /
    • 제어로봇시스템학회 2003년도 ICCAS
    • /
    • pp.2524-2528
    • /
    • 2003
  • High-precision position system is widely used in lots of fields such as semiconductor industry, biotechnology, display and other up-to-date industry field. One of the main issues is to have a long traveling range with precision. There are a few solutions. For instance, there are inchworm methods, lever principle. In this study, we use lever principle to amplify output displacement with a new mechanical amplification structure. We designed new type 3DOF stage with PZT actuator and capacitive sensor. Non-monolithic structure is suggested to obtain the convenience of assembly and modification. Driving parts are designed as modules that generate displacement amplification of each axis. Designed motion module consists of 3 flexure hinges and a PZT actuator with double L lever structure.

  • PDF

Hardware Implementation of High-Speed Active Vibration Control System Based on DSP320C6713 Processor

  • Kim, Dong-Chan;Choi, Hyeung-Sik;Her, Jae-Gwan;You, Sam-Sang
    • Journal of Advanced Marine Engineering and Technology
    • /
    • 제32권3호
    • /
    • pp.437-445
    • /
    • 2008
  • This paper deals with the experimental assessment of the vibration suppression of the smart structures. First. we have presented a new high-speed active control system using the DSP320C6713 microprocessor. A peripheral system developed is composed of a data acquisition system, N/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers for fast data processing. Next, we have tested the processing time of the peripheral devices, and provided the corresponding test results. Since fast data processing is very important in the active vibration control of the structures, we have focused on achieving the fast loop times of the control system. Finally, numerous experiments were carried out on the aluminum plate to validate the superior performance of the vibration control system at different control loop times.