• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 춘계학술대회 논문집
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• pp.51-55
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• 1999

Recently, manufacturing work has been transformed to advanced technology intensive form from mass production with a little items required in the past. It was demanded that superior workpiece surface integrity. However, the study of ductile mode machining was proceeded actively.In this paper, it is developed Ultra-Micro Indentation Device using the PZT actuator. Experimentally, by using theUltra-Micro Indentation device, the micro fracture behavior of the silicon wafer was invesgated. It was possible that ductile-brittle transition point in ultimate surface of brittle material can be detected by adding an acoustic emission sensor system to the Ultra-Micro Indentation apparatus.

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권4호
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• pp.246-252
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• 2002

Two kinds of PZT cantilevers integrated with a piezoresistor have been newly designed, fabricated, and characterized for high speed AFM. In first cantilever, a piezoresistor is used to sense atomic force acting on tip, while in second cantilever, a piezoresistor is integrated to calibrate hysteresis and creep phenomena of the PZT cantilever. The fabricated PZT cantilevers provide high tip displacement of $0.55\mu\textrm{m}/V$ and high resonant frequency of 73 KHz. A new cantilever structure has been designed to prevent electrical coupling between sensor and PZT actuator and the proposed cantilever shows 5 times lower coupling voltage than that of the previous cantilever. The fabricated PZT cantilever shows a crisp scanned image at 1mm/sec, while the conventional piezo-tube scanner shows blurred image even at $180\mu\textrm{m}/sec$. The non-linear properties of the PZT actuator are also well calibrated using the piezoresistive sensor for calibration.

• 제어로봇시스템학회논문지
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• 제22권4호
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• pp.271-275
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• 2016

For machining systems like the motor driven linear stage which have high precision positioning with a long stroke, it is necessary to examine the repeatability of the reference position decision. Though piezo (PZT) actuator driven linear stages have high precision feed drivers and a short stroke, they have some limitations for reference position decisions if they have not been equipped with an accurate home sensor. This study was performed to examine the repeatability for home position decision of a EE-SX671 photo sensor as a home switch by using piezo actuator driven linear stages and capacitance probe.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.416-420
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• 2002

This Paper describes a matched-filter type strain sensor system using optical fiber Bragg grating (FBG) sensor. Matched-filter type uses another wavelength-matched FBG filter to track wavelength shift in the FBG sensor. Filter FBG is attached on a fiber stretcher and stretched by PZT actuator. To overcome the nonlinearity and hysteresis of the PZT actuator that degrades system accuracy, a string resonator which can measure an absolute strain is employed. And the effect of vibration modes on string resonator is investigated particularly regarding its sensitivity and stability.

• 한국소음진동공학회논문집
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• 제13권3호
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• pp.225-231
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• 2003

A new three-dimensional thin shell element for a structure containing an integrated distributed piezoelectric sensor and actuator is Proposed. The assumed strain formulation and the bubble function are introduced to improve the performance of the shell element. A finite element formulation gives a general tool that can predict the static or dynamic responses of the shell with piezoelectric sensor/actuator. The verification through the calculation of the static response for the piezoelectric bimorph beam shows that the results agree with those from the theoretical analysis very well. Dynamic response of a shell shows that the reduction of vibration is possible with the introduction of the piezoelectric shell sensor and actuator. However. the curvature of sensor/actuator is an obstacle for application, since the flexible PVDF is not strong enough and the PZT with curvature should be made specially.

• 한국소음진동공학회논문집
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• 제11권6호
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• pp.193-199
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• 2001

Active control of forced vibration of the cantilevered laminated composite plates using collocated piezoceramic sensor/actuator is analyzed numerically and verified experimentally for various fiber orientations. Impact on the stiffness and the damping properties is studied by varying stacking sequence of [$\theta$$_{4}$O$_{2}$90$_{2}$]s for the laminated composite plate. For the forced vibration control, the plate is excited by one pair of collocated PZT exciters in resonance and its vibrational response is suppressed by the other collocated PZT sensor/actuator using direct negative velocity feedback. It is shown that the active control of forced vibration is more effective for the smart laminated plate with higher modal damped stiffness(2ζ$\omega$/aup 2/) .

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2002년도 마이크로/바이오 가시화기술부문 학술강연회
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• pp.1-7
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• 2002

This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2002년도 추계총회 및 연구발표회 초록집
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• pp.87.1-87
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• 2002

• 한국공작기계학회논문집
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• 제17권1호
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• pp.132-136
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• 2008

Axis of rotation error on rotary system are significant; such as the spindle radial error motion of a aligner, wire bonder and inspector machine which results in the poor state of manufactured goods. In this paper, the simple stage which consists of one PZT actuator and rotary encoder, is analyzed and measured by high resolution capacitance type displacement sensor. As the result of experiment, the paper discusses several issues that must be considered when designing rotary stage driven by PZT.

• Smart Structures and Systems
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• 제19권2호
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• pp.181-194
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• 2017

In order to investigate the interface debonding defects detection mechanism between steel tube and concrete core of concrete-filled steel tubes (CFSTs), multi-physical fields coupling finite element models constituted of a surface mounted Piezoceramic Lead Zirconate Titanate (PZT) actuator, an embedded PZT sensor and a circular cross section of CFST column are established. The stress wave initiation and propagation induced by the PZT actuator under sinusoidal and sweep frequency excitations are simulated with a two dimensional (2D) plain strain analysis and the difference of stress wave fields close to the interface debonding defect and within the cross section of the CFST members without and with debonding defects are compared in time domain. The linearity and stability of the embedded PZT response under sinusoidal signals with different frequencies and amplitudes are validated. The relationship between the amplitudes of stress wave and the measurement distances in a healthy CFST cross section is also studied. Meanwhile, the responses of PZT sensor under both sinusoidal and sweep frequency excitations are compared and the influence of debonding defect depth and length on the output voltage is also illustrated. The results show the output voltage signal amplitude and head wave arriving time are affected significantly by debonding defects. Moreover, the measurement of PZT sensor is sensitive to the initiation of interface debonding defects. Furthermore, wavelet packet analysis on the voltage signal under sweep frequency excitations is carried out and a normalized wavelet packet energy index (NWPEI) is defined to identify the interfacial debonding. The value of NWPEI attenuates with the increase in the dimension of debonding defects. The results help understand the debonding defects detection mechanism for circular CFST members with PZT technique.