• 한국항공우주학회지
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• 제34권3호
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• pp.60-66
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• 2006

본 논문에서는 기존에 개발한 압전 복합재료 작동기인 LIPCA가 동적 구조물의 작동기로 적용 가능한지를 평가하였다. 압전 세라믹 층, 탄소/에폭시 층 및 유리/에폭시 층으로 이루어진 LIPCA 작동기는 단일 PZT에 비하여 성능 및 내구성이 크다는 장점이 있다. 성능 평가를 위하여 정적 작동력 실험과 진동 제어 실험을 수행하였다. 알루미늄 보의 한 쪽 면에 LIPCA와 단일 PZT를 각각 보에 부착하고 반대쪽 면에는 변형률 게이지를 부착하였다. 먼저 정적 작동력 실험에서는 작동 전압에 따른 변형률 신호를 등가 작동 모멘트로 환산하여 크기를 비교함으로써 성능을 평가하였다. 진동 제어 실험에서는 스트레인 게이지의 변형률 신호를 PID 제어 알고리듬을 사용하여 보의 자유 진동을 억제하도록 제어 신호를 생성하였다. 진동 신호가 감쇠하는 정도를 나타내는 안정화 시간을 비교함으로써 성능을 평가하였다. 실험 결과 LIPCA가 정적 작동 뿐 아니라 자유 진동 제어에서도 단일 PZT보다 성능이 우수함을 확인하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.467-468
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• 2006

In this work, we present the comparison between $d_{31}\;and\;d_{33}$ mode characterization using the PZT micro-actuator for large displacement. The PZT micro-actuator consisted of Si, PZT, and Pt layer on SOI wafer. The electrode shapes were laminated and interdigitated for $d_{31}\;and\;d_{33}$ mode, respectively. In order to characterize the actuation mode, we measured the displacement using laser interferometer. The maximum displacement of d31 mode was $12.2{\mu}m$ at 10V, the actuation characterization of d31 was better than that of d33 mode. We estimated that displacement of d33 mode would be larger than that of d31 above 30V.

• 대한기계학회논문집A
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• 제28권12호
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• pp.1937-1941
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• 2004

We present lateral actuated piezoelectric actuator using U-shaped PZT strip and lever structure for the RF switch application. In the previous study of RF switch, they used horizontal contact switch fabricated by thin film metals. However, thin film metals could not generate large contact force due to low stiffness. In this work, we suggest lateral contact switch which makes large contact force by increasing stiffness. In addition, we use PZT actuator for the high force actuation. Generally actuator using thin film PZT moves to the vertical direction due to the neutral axis shift. Therefore we need lateral motion generation mechanism based on the thin film PZT actuator. In order to increase lateral motion of thin film PZT actuator, we use U-shaped PZT actuator using residual stress control. Also, thin film PZT actuator can generate very small lateral motion of 120${\times}$10$^{-6}$ ${\mu}{\textrm}{m}$/V for d$_{31}$ mode, thus we suggest lever structure to increase stroke amplification. From the experimental study, fabricated PZT actuator shows maximum lateral displacement of 1 ${\mu}{\textrm}{m}$, and break down voltage of the thin film PZT actuator is above 16V.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 1996년도 춘계학술대회논문집; 부산수산대학교, 10 May 1996
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• pp.130-135
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• 1996

This paper presents a proof-concept investigation on the active vibration control of two hybrid smart structures (HSSs). The first one is consisting of a piezoelectric film (PF) actuator and an electro-rheological fluid(ERF) actuator, and the other is featured by a piezoceramic (PZT) actuator and a shape memory alloy (SMA) actuator. For the PF/ERF hybrid smart structure, both the increment of the damping ratios and the suppression of the tip deflections are evaluated in order to demonstrate control effectiveness of the PF actuator and ERF actuator and the hybrid actuation. For the PZT/SMA hybrid smart structure, the PZT actuator takes account of the high frequency excitation, while the SMA actuator exerts large vibration control force. The experimental results exhibit superior abilities of the hybrid actuation systems to tailor elastodynamic responses of the HSS rather than a single class of actuation system alone.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 춘계학술발표대회 논문집
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• pp.9-12
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• 2005

Recently, research on the morphing wing is an interesting issue to develop the capability of the wing such as improving the lift and reduction of drag during the operation of an aircraft by changing the wing shape from one configuration to another. A more efficient weight reduction of the wing using smart or morphing wing concept can be achieved in comparison with the conventional flaps. In this study, it is investigated the behaviors of the morphing wing using Macro Fiber Composite (MFC) actuators. Generally, MFC is the piezocomposite actuator with the rectangular PZT fiber and epoxy matrix, and uses the interdigitated electrode to produce more powerful actuation in the in-plane direction. Furthermore, it can produce the twisting actuation as compared with the traditional PZT actuators. In the formulation, the first-order shear deformation plate theory is used, and finite element method is adopted in the numerical analysis of the model. Results show the characteristics of the static behavior of the morphing wing according to the change of the actuation voltage.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2005년도 추계종합학술대회
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• pp.147-150
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• 2005

Low actuation voltage and no contact stiction are the important factors to apply MEMS RF switches to mobile devices. Conventional electrostatic MEMS RF switches require several tens of voltages for actuation. In this paper we propose PAS MEMS RF switch which adopt PZT actuators and seesaw cantilevers to meet the above requirements. The fundamental structures of PAS MEMS switch were designed, optimized, and fabricated. Through the developed processes PAS SPDT MEMS RF switches were successfully fabricated on 4" wafers and they showed good electrical properties. The driving voltage was less than 5 volts. And the insertion loss was -0.5dB and the isolation was 35dB at 5GHz. The switching speed was about 5kHz. So these MEMS RF switches can be applicable to mobile communication devices or wireless multi-media devices at lower than 6GHz.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 춘계학술대회논문집
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• pp.1521-1527
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• 2000

A micromirror actuated by piezoelectric unimorph cantilevers is proposed as a tine-tracking device for high-density optical data storage. Bending motions of the metal/PZT/metal unimorphs translate an integrated micromirror along the out-of-plane vertical direction. The micromirror alters the optical path of the incident laser beam and linearly steers the reflected laser beam by its out-of-plane parallel actuation. Numerical analysis shows that the actuated micromirror can satisfy the tracking speed imposed by the requirement on the access time for the high-density optical data storage up to few tens Gbitlin2 owing to the light mass of the micromirror. In this paper, preliminary characteristics of the micro-machined PZT actuated micromirror (PAM) are reported. Only a 360 nm-thick PZT film deposited by sol-gel process shows both good electrical and mechanical characteristics for the fine-tracking actuator. The micromirror can be easily actuated up to several micrometers under low voltage operation condition well below 10 volts.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2004년도 추계학술발표대회 논문집
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• pp.286-289
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• 2004

This paper presents the fatigue characteristics of LIPCA (LIghtweight Piezo-Composite Actuator) device system. The LIPCA device system is composed of a piezoelectric ceramic layer and fiber reinforced lightweight composite layers. Typically a PZT ceramic layer is sandwiched by a top fiber layer with low CTE (coefficient of thermal expansion) and base layers with high CTE. The advantages of the LIPCA design are weight reduction by using the lightweight fiber reinforced plastic layers without compromising the generation of high force and large displacement and design flexibility by selecting the fiber direction and the size of prepreg layers. To predict the degradation of actuation performance of LIPCA due to fatigue, the cyclic electric loading tests using PZT specimens were performed and the strain for a given excitation voltage was measured during the test. The results from the PZT fatigue test were implemented into CLPT (Classical Laminated Plate Theory) model to predict the degradation of LIPCA's actuation displacement. The fatigue characteristic of PZT was measured using a test system composed of a supporting jig, a high voltage power supplier, data acquisition board, PC, and evaluated.

• International Journal of Control, Automation, and Systems
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• 제3권3호
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• pp.477-485
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• 2005

This paper is concerned with the development of a micro tensile testing machine for optically functional materials such as single or poly crystalline silicon and nickel film. This micro tensile tester has been developed for testing various types of materials and dimensions. PZT type actuation is utilized for precise displacement control. The specifications of the PZT actuated micro tensile testers developed are as follows: the volumetric size of the tester is desktop type of 710mm' 200mm' 270mm; the maximum load capacity and the load resolution in this system are IKgf and 0.0152mgf respectively and; the full stroke and the stoke resolution of the PZT actuator are $1000{\mu}m$ and 10nm respectively. Special automatic specimen installing and setting equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimens for testing. Nonlinearity of the PZT actuator is compensated to linear control input by an inverse compensation method that is proposed in this paper. The strain data is obtained by ISDG method that uses the laser interference phenomenon. To test the reliance of this micro tensile testing machine, a $200{\mu}m$ thickness nickel thin film and SCS (Single Crystalline Silicon) material that is made with the MEMS fabrication process are used.

• 반도체디스플레이기술학회지
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• 제3권2호
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• pp.27-33
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• 2004

This paper is concerned with development of a micro tensile testing machine for optical functional materials such as single or poly crystal silicon and nickel film. Two micro tensile testers have been developed for various types of materials and dimensions. One of the testers is actuated by a PZT and the other is actuated by a servo motor for a precise displacement control. The specifications of PZT actuated micro tensile tester developed are as follows: the volumetric size of tester is desktop sized of 710$\times$200$\times$270 $mm^3$; the minimum load capacity and the load resolution in the load cell of 1N are 3 mN and 0.1 mN respectively; the full stroke and the stoke resolution of piezoelectric actuator are 1 mm and 10nm respectively. A special automatic specimen installing equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimen for testing.