• 센서학회지
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• 제24권3호
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• pp.181-187
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• 2015

The magnetoelectric characteristics on layered $Fe_{78}B_{13}Si_9/PZT$ and $Fe_{78}B_{13}Si_9/PZT/Fe_{78}B_{13}Si_9$($t_m=0.017$, 0.034mm) composites by epoxy bonding for magnetic field sensor were investigated in the low-frequency range and resonance frequency range. The optimal bias magnetic field $H_{dc}$ of these samples was about 23~63 Oe range. The Me coefficient of $Fe_{78}B_{13}Si_9/PZT/Fe_{78}B_{13}Si_9(t_m=0.034mm)$ composites reaches a maximum of $186mV/cm{\cdot}Oe$ at $H_{dc}=63Oe$, f=50 Hz and a maximum of $1280mV/cm{\cdot}Oe$ at $H_{dc}=63Oe$, resonance frequency $f_r=95.5KHz$. The output voltage shows linearity proportional to ac fields $H_{ac}$ and is about U=0~130.6 mV at $H_{ac}=0{\sim}7Oe$, f=50 Hz, U=0~12.4 V at $H_{ac}=0{\sim}10Oe$, $f_r=95.5KHz$(resonance frequency). The optimal frequency(f=50 Hz) of this sample is around the utility ac frequency(f=60 Hz). Therefore, this sample will allow for ac magnetic field sensor at utility frequency and low bias magnetic fields $H_{dc}$.

• 센서학회지
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• 제8권1호
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• pp.89-94
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• 1999

In this study, a new technology to bond the PZT with connection board, which is a core technology for the fabrication of medical micro high frequency sensors, was developed. Two technologies were adopted. One is bonding of In using thermal heating, he other is bonding of Pb using a high frequency heating machine. In case of thermal eating, bonding was failed because of the contaminations of In surface. But, when using high frequency healing machine, we developed good bonding characteristics at various experimental conditions and thickness of the electrode material.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2014년도 춘계학술대회 논문집
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• pp.722-725
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• 2014

The spatial focusing of time reversal Lamb waves on a plate has attracted considerable attention for identifying the location of an input source. This study investigates the spatial focusing performance on a plate with respect to the number of piezoelectric (PZT) sensors for varying locations of input sources. In particular, a small number of PZT sensors produce spatial focusing through the virtual sensor effect due to reflection of Lamb waves at plate edges. The spatial focusing performance with respect to the number of PZT sensors is quantified in terms of signal to noise ratio through numerical simulation and its implication is discussed.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2001년도 추계학술대회논문집 I
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• pp.459-464
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• 2001

Vibration control of a plate using an optical fiber sensor and a PZT actuator is considered in this study. An aluminum plate with attached Extrinsic Fabry-Perot Interferometer (EFPI) and PZT actuator is prepared for experimental investigation. Vibration level of EFPI that can represent the mechanical strain without severe distortion is validated by forced vibration experiment. A numerical model of the plate is constructed based on the experimentally obtained frequency responses, and an optimal controller is designed for the multi-modal vibration suppression. It is found that the vibration level of the first three modes can be greatly reduced. The effect of low-pass filtering used to eliminate high frequency noise on the stability and control performance is also considered.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 추계학술대회 논문집
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• pp.214-218
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• 2002

In recent years, precision positioning stage is demanded for some industrial fields such as semi-conductor lithography, ultra precision machining, and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of 3-axis positioning, characteristics of motion and resolution are verified.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2003년도 추계총회 및 연구발표회 초록집
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• pp.96.2-96
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• 2003

• 한국세라믹학회지
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• 제38권7호
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• pp.634-638
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• 2001

본 연구에서는 마이크로 내시경용 바이오 센서로 응용하기 위한 Al/PZT/RuO$_2$로 이루어진 마이크로 캔틸레버를 제작하였으며, 공진 특성 및 병원체의 흡착에 따른 공진 특성 그리고 검출 감도(sensitivity)에 미치는 구조적인 영향을 전산모사를 통하여 알아보았다. 길이 100$mu extrm{m}$, 폭 50$\mu\textrm{m}$, 두께 0.3$\mu\textrm{m}$/0.25$\mu\textrm{m}$/0.7$\mu\textrm{m}$ (Al/PZT/RuO$_2$)의 크기의 제작된 마이크로 캔틸레버는 89kHz의 공진주파수를 가지고 있음을 전산모사를 통해 알 수 있었다. 바이오 센서로 응용될 때의 검출 감도는 흡착 질량의 증가에 비례하여 향상되었으며, 5% 이상의 검출 감도를 갖기 위해서는 흡착 질량이 약 5 나노그램 이상이 되어야 함을 확인할 수 있었다. 캔틸레버의 크기를 결정하는 길이, 폭, 두께중 사용 주파수 대역은 길이의 조절을 통하여 결정할 수 있고, 검출 감도의 향상을 위해서는 가능한 한 두께를 얇게 해야 함을 알 수 있었다. 반면에 폭의 변화는 공진주파수나 검출 감도에 거의 영향을 미치지 않았다.

• 센서학회지
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• 제29권1호
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• pp.45-50
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• 2020

Magnetoelectric (ME) composites were designed using the PMN-PZT single crystal and Ni foils; the properties and magnetic-field sensitivities of ME composites with different piezoelectric vibration modes (i.e., 31, 32, and 36 modes that depend on the crystal orientation of the single crystal) were compared. In the off-resonance condition, the ME coupling properties of the ME composites with the 32 and 36 piezoelectric vibration modes were better than those of the ME composites with the 31 piezoelectric vibration mode. However, in the resonance condition, the ME coupling properties of the ME composites were almost similar, irrespective of the piezoelectric vibration mode. Additionally, in the off-resonance condition (at 1 kHz), the magnetic-field sensitivity of the ME composites with the 36 piezoelectric vibration mode was up to 2 nT and those of the ME composites with the 31 and 32 piezoelectric vibration modes were up to 5 nT. These magnetic-field sensitivities are similar to those offered by conventional high-sensitivity magnetic-field sensors; the potential of the proposed sensor to replace costly and bulky high-sensitivity magnetic field sensors is significant.

• 한국정밀공학회지
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• 제21권5호
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• pp.73-82
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• 2004

This paper presents the study on damage diagnosis of an intelligent cantilevered beams using PZT actuator and PVDF sensor This study provides the theoretical and experimental verification to examine structural damage. Time domain analysis for the non-destructive detection of damage is presented by parameterized partial differential equations and Galerkin approximation techniques. The time histories of the vibration response of structure were used to identify the presence of damage. Furthermore, this systematic approach permits one to use the piezomaterials to both excite and sense the vibration of structures. We also carried out the experimental verification about reliability of theoretical methods fur detecting the damage of a composite beam with PZT actuator and PVDF sensor. Experimental results are presented from tests on cantilevered composite beams which is damaged at different location and different dimensions. The results were compared with the simulation results. Good agreement between the results was found for the time shifts and amplitude difference in transients response of the cantilevered beam.

• 한국세라믹학회지
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• 제37권9호
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• pp.871-878
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• 2000

본 연구는 3mol% Pb(Sb$_{1}$2/Nb$_{1}$2/)O$_3$가 첨가된 상경계 영역의 Pb(Zr,Ti)O$_3$(PSN-PZT) 세라믹스에 대하여 RT66A와 광섬유센서를 이용하여, 교류강전계 하에서 압전 및 유전특성을 조사하였다. PSN-PZT 세라믹스의 압전 및 유전 특성에 미치는 non-180$^{\circ}$분역 재배열의 영향을 평가하기 위하여 RT66A와 MTI-2000 Fotonic$^{TM}$ sensor를 이용하여 인가전계와 주파수의 함수로 전계유기변위를 측정하였다. 그 결과, 교류강전계 하에서 전계유기변위는 강전계, 저주파수에서 큰 이력현상을 나타내고, 전계유기변위로부터 결정된 유효압전상수는 주파수가 감소할수록 증가하는 거동을 나타내고 있으며, 이러한 거동은 non-180$^{\circ}$분역 재배열의 영향으로 해석되었다.