• Title/Summary/Keyword: PT STRESS

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Dependence of Annealing Temperature on Properties of PZT Thin Film Deposited onto SGGG Substrate

  • Im, In-Ho;Chung, Kwang-Hyun;Kim, Duk-Hyun
    • Transactions on Electrical and Electronic Materials
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    • v.15 no.5
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    • pp.253-256
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    • 2014
  • $Pb(Zr_{0.52}Ti_{0.48})O_3$ thin films of $1.5{\mu}m$ thickness were grown on $Pt/Ti/Gd_3Ga_5O_{12}$ substrate by RF magnetron sputtering at annealing temperatures ranging from $550^{\circ}C$ to $700^{\circ}C$. We evaluated the residual stress, by using a William-Hall plot, as a function of the annealing temperatures of PZT thin film with a constant thickness. As a result, the residual stresses of PZT thin film of $1.5{\mu}m$ thickness were changed by varying the annealing temperature. Also, we measured the hysteresis characteristic of PZT thin films of $1.5{\mu}m$ thickness to evaluate for application of an optoelectronic device.

Calculations of Surface Stresses in Metals Under Mechanical Strains (기계적 변형하에서 금속재료의 표면응력 계산)

  • Kim, Sung-Youb;Earmme, Youn-Young
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.32 no.3
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    • pp.250-257
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    • 2008
  • We calculate the variation of the surface stresses according to uniaxial and biaxial strains in face-centered cubic (FCC) metals. In our study, three mainly observed free surfaces of seven representative FCC metals are considered. Employed method is molecular mechanics, in which the interaction of atoms is described by empirical interatomic potentials. As uniaxial strain increases to tensile direction, the surface stresses on {100} and {110} free surfaces decrease monotonously, while those on {111} surface increase. These tendencies are the same regardless of the species of metals and interatomic potentials employed. However, when the system is under biaxial strain, surface stresses change different according to the surface directions, the species of metals, and even interatomic potentials. On {100} and {111} surfaces, heavy metals (Pt, Au) show the opposite variation to light metals (Ni, Cu). In the cases of Pd and Ag, the surface stresses reveal the opposite tendency, depending on interatomic potentials used.

Analyses Thermal Stresses for Microaccelerometer Sensors using SOI Wafer(I) (SOI웨이퍼를 이용한 마이크로가속도계 센서의 열응력해석(I))

  • Kim, O.S.
    • Journal of Power System Engineering
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    • v.5 no.2
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    • pp.36-42
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    • 2001
  • This paper deals with finite element analyses of residual stresses causing popping up which are induced in micromachining processes of a microaccelerometer sensors. The paddle of the micro accelerometer sensor is designed symmetric with respect to the direction of the beam. After heating the tunnel gap up to 100 degree and get it through the cooling process and the additional beam up to 80 degree and get it through the cooling process. We learn the thermal internal stresses of each shape and compare the results with each other, after heating the tunnel gap up to 400 degree during the Pt deposition process. Finally we find the optimal shape which is able to minimize the internal stresses of microaccelerometer sensor. We want to seek after the real cause of this pop up phenomenon and diminish this by change manufacturing processes of microaccelerometer sensor by electrostatic force.

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Stress Development in Sol-gel Derived Multideposited Coatings of Lead Zirconate Titanate (다층 도포된 $\textrm{PbZr}_{0.53}\textrm{Ti}_{0.47}\textrm{O}_{3}$ sol-gel 박막내의 응력 거동)

  • Park, Sang-Myeon
    • Korean Journal of Materials Research
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    • v.9 no.11
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    • pp.1069-1074
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    • 1999
  • 본 연구에서는 PbZr(sub)0.53Ti(sub)0.47O$_3$(PZT) 박막을 복수 도포함에 따른 박막내의 응력을 온도의 함수로 실시간(in situ) 측정하였으며, 응력발생의 원인에 박막의 건조, 열분해(pyrolysis), 치밀화 및 결정화 현상과 연관시켜 설명하였다. 도포직후 단층박막에 생성된 55MPa의 인장응력은 가열됨에 따라$ 300^{\circ}C$-$350^{\circ}C$에서 최대 145MPa로 증가하였으며, 박막내의 응력은 모든 온도구간에서 항상 인장응력을 나타내었더. 다층도포시 $650^{\circ}C$까지 열처리 주기를 완료한 층이 두꺼워질수록 새로 도포한 층의 영향은 점차 감소하였으며, 9층박막에 이르러서는 가열과 냉각에 따라 응력이 동일하게 변화하였다. 응력측정 결과 다층박막의 치밀화는 $350^{\circ}C$에서 시작되어 $520^{\circ}C$-$550^{\circ}C$ 부근에서 완료되는 것으로 나타났으며 치밀화가 시작하는 온도는 미세경도 측정결과와 일치하였다. $PbTiO_3$(PT)와 달리 PZT 다층박막은 Si 기판 위에서 perovskite로의 결정화가 일어나지 않았다.

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PERFORMANCE OF MULTILAYER CERAMIC ACTUATOR BY CONSIDERING THE SHAPE EFFECT

  • Wee, S.B.;Jeong, S.J.;Song, J.S.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.594-597
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    • 2003
  • In the present study, the piezoelectricity and polarization of multilayer ceramic actuator, being designed to stack PMN-PZ-PT ceramic layers and Ag-Pd electrode layers alternatively, were investigated under a consideration of geometric factor, the volume ratio of the ceramic to the electrode layers. The actuators were fabricated by tape casting of 0.2Pb(Mg1/3Nb2/3)O3-0.38PbZrO3-0.42PbTiO3 followed by lamination and burnout & co-firing processes. The actuators of 10 10 0.62 nm3 in size were formed in a way that 60 200 m thick ceramics were stacked alternatively with 5 m thick electrode layer. Increases in polarization and electric field-induced displacement with thickness of the ceramic layer were attributed to change of 90o/180o domain ratio, which was affected by interlayer internal stress. The piezoelectricity and actuation behaviors were found to depend upon the volume ratio (or thickness ratio) of ceramic to electrode layers.

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Evaluation of Health Impact of Heat Waves using Bio-Climatic impact Assessment System (BioCAS) at Building scale over the Seoul City Area (생명기후분석시스템(BioCAS)을 이용한 폭염 건강위험의 검증 - 서울시 건물규모를 중심으로 -)

  • Kim, Kyu Rang;Lee, Ji-Sun;Yi, Chaeyeon;Kim, Baek-Jo;Janicke, Britta;Holtmann, Achim;Scherer, Dieter
    • Journal of Environmental Impact Assessment
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    • v.25 no.6
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    • pp.514-524
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    • 2016
  • The Bio-Climatic impact Assessment System, BioCAS was utilized to produce analysis maps of daily maximum perceived temperature ($PT_{max}$) and excess mortality ($r_{EM}$) over the entire Seoul area on a heat wave event. The spatial resolution was 25 m and the Aug. 5, 2012 was the selected heat event date. The analyzed results were evaluated by comparing with observed health impact data - mortality and morbidity - during heat waves in 2004-2013 and 2006-2011,respectively. They were aggregated for 25 districts in Seoul. Spatial resolution of the comparison was equalized to district to match the lower data resolution of mortality and morbidity. Spatial maximum, minimum, average, and total of $PT_{max}$ and $r_{EM}$ were generated and correlated to the health impact data of mortality and morbidity. Correlation results show that the spatial averages of $PT_{max}$ and $r_{EM}$ were not able to explain the observed health impact. Instead, spatial minimum and maximum of $PT_{max}$ were correlated with mortality (r=0.53) and morbidity (r=0.42),respectively. Spatial maximum of $PT_{max}$, determined by building density, affected increasing morbidity at daytime by heat-related diseases such as sunstroke, whereas spatial minimum, determined by vegetation, affected decreasing mortality at nighttime by reducing heat stress. On the other hand, spatial maximum of $r_{EM}$ was correlated with morbidity (r=0.52) but not with mortality. It may have been affected by the limit of district-level irregularity such as difference in base-line heat vulnerability due to the age structure of the population. Areal distribution of the heat impact by local building and vegetation, such as spatial maximum and minimum, was more important than spatial mean. Such high resolution analyses are able to produce quantitative results in health impact and can also be used for economic analyses of localized urban development.

Implementing PBL in Physical Therapy Education (물리치료학 교육의 변화에 부응하는 문제중심학습방법(Problem Based Learning))

  • Hwang, Hyun-Sook;Lee, Woo-Sook;Lim, Jong-Soo
    • Journal of Korean Physical Therapy Science
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    • v.9 no.3
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    • pp.179-186
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    • 2002
  • This study addresses the need to adopt teaching-learning approaches in physical therapy education that develop links between theory and clinical practice in a meaningful way. Problem-based learning (PBL) is presented as a useful way to educate physical therapy for the future. The essential characteristics of problem-based learning include: curricular organization around problems rather than disciplines; an integrated curriculum rather than one separated into clinical and theoretical components; and an inherent emphasis on cognitive skills as well as on knowledge. PBL as implemented in the health sciences, is an educational method in which the focus of learning is a small-group tutorial in which students work through health care scenarios. The goals of the health care scenarios are to provide a context for learning, to activate prior knowledge, to motivate students, and to stimulate discussion. Learning is student-centered rather than faculty-centered, and self-directed learning is emphasized. Whereas the former focuses on critical thinking and clinical judgement, the latter's emphasis is on clinical competency. The physical therapist (PT) program at Cheju Halla college is a partial integrated problem-based curriculum. The history and process of PBL in general and in the PT program are reviewed. Long-term advocates of PBL stress that it is the only known method for preparing future professionals to be able to adapt to change, learning how to reason critically, enabling a holistic approach to health.

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A Study on the Structural Performance of Post Tensioned Concrete Beam and Slab Subjected to High Temperature (고온을 받은 포스트텐션 콘크리트 보와 슬래브의 구조성능 연구)

  • Choi, Kwang-Ho;Lee, Joong-Won
    • Journal of the Korea Concrete Institute
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    • v.29 no.2
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    • pp.217-223
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    • 2017
  • This research was planned to evaluate the structural performance of post tensioned(PT) concrete member subjected to fire. Prime objective was to suggest some techniques to evaluate the performance of post tensioned concrete beam and slab exposed to high temperature through experiment. To accomplish this objective, the following two scopes have been proceeded to verify the strength reducing ratio of strands and find out the difference of resisting force at the PT concrete members exposed to high temperature through the fire test. The properties of prestressing steel(tendon) in PT concrete beam and slab under variable temperatures were reviewed. The test of this study was shown that stress relaxation occurred at high temperature, and some restoration of tensional force appeared as it got cooling down. The residual tension of the post tensioned beams at 4 hours after reaching the target temperature were 70% at $400^{\circ}C$, 10% at $600^{\circ}C$ and 2% at $800^{\circ}C$. The post tensioned slabs were 94% at $400^{\circ}C$, 84.5% at $600^{\circ}C$ and 62% at $800^{\circ}C$. The reason why the residual tension loss of the post tensioned slab was relatively small was considered to be that the slab was exposed just one side to high temperature and the strength of the strand was restored larger than that of beam. Also, it was confirmed that the post tensioned member inevitably experienced the loss of strength by fire damage, and restoration design of the member should be required to compensate for the value as much as lost strength.

A Study on the Electric and Ferroelectric Properties of PZT(30/70) Thick Film Prepared by Using 1,3-Propanediol (1, 3-Propanediol 을 이용해 제작된 PZT(30/70) 후막의 전기적 및 강유전 특성에 관한 연구)

  • 송금석;장동훈;강성준;윤영섭
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.40 no.9
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    • pp.631-637
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    • 2003
  • We have evaluated structural and electric, ferroelectric properties of PZT(30/70) thick film prepared by using 1,3-propanediol based sol-gel method on Pt/Ti/SiO$_2$/Si substrates. Rapid thermal annealing (RTA) is used to reduce the thermal stress and final furnace annealing is processed at $650^{\circ}C$. As the results of SEM analysis, we find that we get 350 nm in thickness for one coating and 1 $\mu$m for three times of coating. In the results of C-D analysis at 1 kHz, dielectric constant ($\varepsilon$$_{r}$) and dissipation factor were 886 and 0.03, respectively. C-V curve is shaped as a symmetrical butterfly. Leakage current density at 200 kV/cm is 1.23${\times}$10$^{-5}$ A/cm$^2$ and in the results of hysteresis loops measured at 150 kV/cm, the remnant polarization (P$_{r}$) and the coercive field (E$_{c}$) are 33.8 $\mu$C/cm$^2$ and 56.9 kV/cm, respectively. PZT(30/70) thick film exhibits relatively good ferroelectric, electric properties.s..

Flow sensor using stress-balanced membrane and thin film thermocouple (스트레스균형이 이루어진 멤버레인 및 박막 열전대를 응용한 유체센서)

  • Ahn, Yeong-Bae;Kim, Jin-Sup;Kim, Myung-Gyoo;Lee, Jong-Hyun;Lee, Jung-Hee
    • Journal of Sensor Science and Technology
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    • v.5 no.6
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    • pp.51-59
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    • 1996
  • A flow sensor has been fabricated by preparing thin film Pt-heater and Bi-Sb thermocouples array on 150 nm-$Si_{3}N_{4}$/300 nm-$SiO_{2}$/150 nm-$Si_{3}N_{4}$ dielectric diaphragm which has low thermal conductivity and balanced stress with silicon substrate for the purpose of improving the thermal isolation between heater and silicon substrate. Pt-heater showed nonlinear I-V characteristics due to the thermal isolation effect of the diaphragm. Its temperature coefficient of resistance was about $0.00378\;/^{\circ}C$ and Seebeck coefficient of Bi-Sb thermocouple was about $97\;{\mu}V/K$. The sensor showed that thermoelectric voltage decreased as thermal conductivity of gas increased, and flow sensitivity increased as heater voltage increased or as the distance between heater and thermocouple decreased. When heater voltage was about 2.5 V, $N_{2}$-flow sensitivity and thermal response time of the sensor were about $1.27\;mV{\cdot}(sccm)^{-1/2}$ and 0.13 sec., respectively.

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