• 제목/요약/키워드: PSG

검색결과 219건 처리시간 0.027초

실리콘 웨이퍼위에 증착된 실리케이트 산화막의 CMP 슬러리 오염 특성 (CMP Slurry Induction Properties of Silicate Oxides Deposited on Silicon Wafer)

  • 김상용;서용진;이우선;장의구
    • 한국전기전자재료학회논문지
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    • 제13권2호
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    • pp.131-136
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    • 2000
  • We have investigated the slurry induced metallic contaminations of undoped and doped silicate oxides surface on CMP cleaning process. The metallic contaminations by CMP slurry were evaluated in four different oxide films, such as plasma enhanced tetra-ethyl-orthyo-silicate glass(PE-TEOS), O3 boro-phos-pho-silicate glass(O3-BPSG), PE-BPSG, and phospho-silicate glass(PSG). All films were polished with KOH-based slurry prior to entering the post-CMP cleaner. The Total X-Ray fluorescence(TXRF) measurements showed that all oxide surfaces are heavily contaminated by potassium and calcium during polishing which is due to a CMP slurry. The polished O3-BPSG films presented higher potassium and calcium contaminations compared to PE-TEOS because of a mobile ions gettering ability of phosphorus. For PSG oxides, the slurry induced mobile ion contamination increased with an increase of phosphorus contents. In addition, the polishing removal rate of PSG oxides had a linear relationship as a function of phosphorus contents.

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코골이 방지 베개의 효율성 검증을 위한 방법 (A Evaluation Method for the Effectiveness of Anti-snore Pillow)

  • 지덕근;위연;임재중;김희선;김현정
    • 감성과학
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    • 제14권4호
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    • pp.545-554
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    • 2011
  • 본 연구에서는 코골이 방지 베개의 효율성을 검증하기 위해 수면다원검사 측정 결과를 이용한 분석 방법 및 총 수면 시간과 코골이 시간 등의 효율성 평가에 유용한 변수를 제안하는 것으로 연구가 진행되었다. 사용된 코골이 방지 베개는 두 개의 polyvinylidene fluoride (PVDF) 진동 센서와 펌프, 밸브, 공기주머니로 구성되어있다. 두 진동센서를 통해 코골이 신호를 정확하게 검출하고, 코골이 판정 시 제시된 알고리즘에 따라 베개 내부에 부착된 공기 주머니를 팽창시켜 목을 들어줌으로써 좁아진 기도를 확보하게 해 코골이를 경감시키도록 베개가 설계되었다. 베개의 유효성을 검증하기 위해 수면다원검사를 실시하였고, 실험에는 두 명의 피실험자가 참여하였으며 코골이 베개의 사용 유무에 따라 실험이 진행되었다. 수면다원검사로부터 다양한 변수값을 측정하여 분석하였고, 이 결과 값들로부터 베개의 유효성을 판단하였다. 두 피실험자 모두 총 수면시간은 큰 차이를 보이지 않았으며 총 코골이 시간과 가장 긴 코골이 시간은 감소하는 것을 확인하였고 코골이방지 베개가 코골이를 효율적으로 경감하도록 하는 것을 알 수 있었다. 본 연구의 결과로부터 수면다원검사를 통해 코골이 방지 베개의 유효성을 확인하였으며 측정된 각 변수들과 수면의 질과의 관계를 살펴봄으로써 향후 많은 연구에 활용될 것이다.

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Error Rate and Capacity Analysis for Incremental Hybrid DAF Relaying using Polar Codes

  • Madhusudhanan, Natarajan;Venkateswari, Rajamanickam
    • ETRI Journal
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    • 제40권3호
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    • pp.291-302
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    • 2018
  • The deployment of an incremental hybrid decode-amplify and forward relaying scheme is a promising and superior solution for cellular networks to meet ever-growing network traffic demands. However, the selection of a suitable relaying protocol based on the signal-to-noise ratio threshold is important in realizing an improved quality of service. In this paper, an incremental hybrid relaying protocol is proposed using polar codes. The proposed protocol achieves a better performance than existing turbo codes in terms of capacity. Simulation results show that the polar codes through an incremental hybrid decode-amplify-and-forward relay can provide a 38% gain when ${\gamma}_{th(1)}$ and ${\gamma}_{th(2)}$ are optimal. Further, the channel capacity is improved to 17.5 b/s/Hz and 23 b/s/Hz for $2{\times}2$ MIMO and $4{\times}4$ MIMO systems, respectively. Monte Carlo simulations are carried out to achieve the optimal solution.

Intuitionistic Fuzzy Expert System based Fault Diagnosis using Dissolved Gas Analysis for Power Transformer

  • Mani, Geetha;Jerome, Jovitha
    • Journal of Electrical Engineering and Technology
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    • 제9권6호
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    • pp.2058-2064
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    • 2014
  • In transformer fault diagnosis, dissolved gas analysis (DGA) is been widely employed for a long period and numerous methods have been innovated to interpret its results. Still in some cases it fails to identify the corresponding faults. Due to the limitation of training data and non-linearity, the estimation of key-gas ratio in the transformer oil becomes more complicated. This paper presents Intuitionistic Fuzzy expert System (IFS) to diagnose several faults in a transformer. This revised approach is well suitable to diagnosis the transformer faults and the corresponding action to be taken. The proposed method is applied to an independent data of different power transformers and various case studies of historic trends of transformer units. It has been proved to be a very advantageous tool for transformer diagnosis and upkeep planning. This method has been successfully used to identify the type of fault developing within a transformer even if there is conflict in the results of AI technique applied to DGA data.

극미세 전자소자 박막배선 재료 개선을 위한 엘렉트로마이그레이션 현상에 미치는 절연보호막 효과 (Dielectric Passivation Effects on the Electromigration Phenomena for the Improvement of Microelectronic Thin Film interconnection Materials)

  • 박영식;김진영
    • 한국진공학회지
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    • 제5권2호
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    • pp.161-168
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    • 1996
  • For the improvement of microelectronic thin film interconnection materials, dielectric passivation effects on the electromigration phenomena were studied. Using Al-1%Si, various shaped patterns were fabricated and dielectric passivation layers of several structures were deposited on the $SiO_2$ layer. Lifetime of straight pattern showed 2~5 times longer than the other patterns that had various line width and area. It is believed that the flux divergence due to the structural inhomogeneity and so the current crowding effects shorten the lifetime of thin film interconnections. The lifetime of thin film interconnections seems to depend on both the passivation materials and the passivation thickness. PSG/$SiO_2$ dielectric passivation layers showed longer lifetime than $Si_3N_4$ dielectric passivation layers. This results from the PSG on $SiO_2$ layer reduces stress and from the improvement of resistance to the moisture and to the mobile ion such as sodium. This is also believed that the lifetime of thin film interconnections seems to depend on the passivation thickness in case of the same deposition materials.

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An Enhanced Architecture of CMOS Phase Frequency Detector to Increase the Detection Range

  • Thomas, Aby;Vanathi, P.T.
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제14권2호
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    • pp.198-201
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    • 2014
  • The phase frequency detector (PFD) is one of the most important building blocks of a phase locked Loop (PLL). Due to blind-zone problem, the detection range of the PFD is low. The blind zone of a PFD directly depends upon the reset time of the PFD and the pre-charge time of the internal nodes of the PFD. Taking these two parameters into consideration, a PFD is designed to achieve a small blind zone closer to the limit imposed by process-voltage-temperature variations. In this paper an enhanced architecture is proposed for dynamic logic PFD to minimize the blind-zone problem. The techniques used are inverter sizing, transistor reordering and use of pre-charge transistors. The PFD is implemented in 180 nm technology with supply voltage of 1.8 V.

A Novel Image Encryption Using Calligraphy Based Scan Method and Random Number

  • Sivakumar, T;Venkatesan, R
    • KSII Transactions on Internet and Information Systems (TIIS)
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    • 제9권6호
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    • pp.2317-2337
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    • 2015
  • Cryptography provides an effective solution to secure the communication over public networks. The communication over public networks that includes electronic commerce, business and military services, necessitates the requirement of simple and robust encryption techniques. In this paper, a novel image encryption method which employs calligraphy based hybrid scan and random number is presented. The original image is scrambled by pixel position permutation with calligraphy based diagonal and novel calligraphy based scan patterns. The cipher image is obtained by XORing the scrambled image with random numbers. The suggested method resists statistical, differential, entropy, and noise attacks which have been demonstrated with a set of standard images.

HCI Gettering Oxidation을 이용한 BJT의 저잡음화에 관한 실험적 연구 (An Experimental Study on the Low Noise Property of the Bipolar Junction Transistor Fabricated by HCI Gettering)

  • 최세곤;서희돈
    • 대한전자공학회논문지
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    • 제21권1호
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    • pp.7-12
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    • 1984
  • 본 논문에서는 저잡음 BJT를 만들기 위하여 HCI gettering oxidation 방법을 적용하였다. HCI 양의 변화에 따른 플리키 잡음 spectral intensity의 변화를 측정한 결과 BJT의 플리키 잡음이 표면 상태에 의존하고 있음과 저잡음 BJT를 만들기 위한 oxidation 공정의 gettering 조건은 HCI 양이 2%일 때 최적임을 알 수 있었다. 또 에미터 광산 공정에서 형성된 PSG층의 gettering 효과는 HCI gettering 결과에 비해 미약함도 알게 되었다.

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Transport of Sulfanilic Acid via Microbial Dipeptide Transport System

  • Hwang, Se-Young;Ki, Mi-Ran;Cho, Suk-Young;Yoo, Ick-Dong
    • Journal of Microbiology and Biotechnology
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    • 제5권6호
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    • pp.315-318
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    • 1995
  • Sulfanilic acid (4-aminobenzenesulfonic acid) alone is normally not permeant in bacteria but can be readily delivered via the microbial dipeptide transport system. A dipeptidyl derivative of this compound, L-phenylalanyl-L-2-sulfanilylglycine (PSG), prepared by attachment of its primary amino group to the phenylalanyl $\alpha$-glycine moiety, appeared to have a Km of 0.125 mM and a Vmax of 1.9 nmoles/ml/min ($A_{660}$, 1.0) in Escherichia coli. From competitive spectrophotometric analysis, it was found that the type of amino acids in both of the N- and C-terminals affected the kinetic power of dipeptides. The growth inhibitory effect of PSG was over 7 times more potent than that of the sulfanilic acid against E. coli, suggesting that this potential inhibition was presumably due to the increased hydrophobic nature of the sulfanilyl dipeptide.

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PSC Girder길이의 증가를 위한 단면형상 변화에 따른 비선형 구조해석

  • 김세일
    • EDISON SW 활용 경진대회 논문집
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    • 제4회(2015년)
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    • pp.279-284
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    • 2015
  • 본 논문은 하중에 따른 변화정도에 초점을 맞추어 PSC girder길이의 증가를 위해 Co-rotational Plane Beam with Arbitrary Section Solver를 통하여 비선형 구조해석을 진행하여 Jeon, S., Choi, M., and Kim, Y. 등에 의해 제시된 Decked girder의 구조적 우수성을 검증하고, 이를 보완한 새로운 단면형상의 PSG girder를 제시하였다. 도출된 결과 값은 탄성방정식을 통하여 얻은 값과 비교하여 신뢰성을 검증하였다. 해석을 통하여 단순히 girder 상단부 플랜지의 길이를 증가시키는 것은 girder의 변형정도를 줄이는데 큰 영향을 주지 않는 다는 사실을 알 수 있었고 girder 상단부 플랜지와 중심부를 연결하는 부분의 단면형상을 좀 더 두껍게 함으로 하중에 따른 girder의 변형량을 크게 감소시킬 수 있었다.

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