• 제목/요약/키워드: PR 박리

검색결과 5건 처리시간 0.017초

반도체/LCD PR 제거용 EC의 재이용 기술에 관한 연구 (A Study on Recycling Technology of EC for Semiconductor and LCD PR Stripping Process)

  • 문세호;채상훈
    • 대한전자공학회논문지SD
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    • 제46권10호
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    • pp.25-30
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    • 2009
  • 오존을 이용하여 PR 박리에 사용된 에틸렌 카보네이트계 박리 세정제를 재이용할 수 있는 기술에 대하여 연구함으로써 향후 고성능-저가격의 반도체, LCD 제조에서의 PR 박리 및 세정 공정에 적용할 수 있는 핵심 공정기술을 확보하였다. 이 기술을 적용하면 반도체 웨이퍼 및 LCD 평판의 PR 박리 세정을 보다 빠르고 저렴한 비용으로 수행할 수 있으므로 반도체 및 LCD 제작공정의 생산성을 향상시킬 수 있다.

반도체 공정용 기능수의 용해오존 분해장치에 관한 연구 (A Study on Dissolved Ozone Decomposer in Ozonated Water for Semiconductor Process)

  • 문세호;채상훈;손영수
    • 대한전자공학회논문지SD
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    • 제48권5호
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    • pp.6-11
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    • 2011
  • 반도체 및 LCD 세정공정에 사용된 오존수 속의 용해오존을 분해할 수 있는 시스템을 개발함으로써 향후 고성능-저가격의 반도체, LCD PR 박리 및 세정 공정에 적용할 수 있는 핵심 공정기술을 확보하였다. 이 기술을 적용하면 반도체 웨이퍼 및 LCD 평판의 PR 박리 세정 공정을 보다 빠르고 저렴한 비용으로 수행할 수 있으므로 반도체 및 LCD 공정 생산성의 향상을 꾀할 수 있다.

딥핑 방식을 이용한 ITO 표면의 효율적인 포토레지스트 박리공정 (An Efficient Photoresist Stripping Process on the ITO Surface Using the Dipping Method)

  • 김준현;심재명;주기태;김용성;정병현
    • 한국생산제조학회지
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    • 제25권4호
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    • pp.281-289
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    • 2016
  • Agitation is a secondary process used to increase the PR stripping force on an ITO-glass surface; it is an efficient approach to stripping during production. It activates the stripper to chemically penetrate the PR layer and assists by breaking down the physical bonding forces at the surface. In this study, different stripping tests were conducted by varying the dipping time, the composition, the strip temperature, and the stripper concentration. Optimal PR strip conditions were estimated by using comparative visual inspection of stripped sample surfaces. The stripping process was affected by changes in the moving speeds and the sample positions. It was confirmed that the stripping capability improved at a dilute stripper ratio of 20-40% and a strip temperature of $30-40^{\circ}C$ and within 60 s of strip time.

공기극 분극 저항 증가에 따른 SOFC 단전지 성능 감소에 관한 연구 (Performance degradation of SOFC caused by increase of polarization resistance for the cathode during long-term test)

  • 박광진;배중면
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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    • pp.349-352
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    • 2009
  • In this study, the relation between the performance degradation of SOFC single cell and the increase of polarization resistance for the cathode is investigated. $Pr_{0.3}Sr_{0.7}Co_{0.3}Fe_{0.7}O_3$(PSCF3737, $19.4{\times}10^{-6}K^{-1}$) and $Gd_{0.1}Ce_{0.9}O_2$ (CGO91, $12{\times}10^{-6}K^{-1}$) are used as a cathode and an electrolyte, respectively. The polarization resistance of cathode is increased due to the delamination caused by thermal expansion coefficient difference. The voltage drop with 10%/1000h decline rate occurs during long-term, when the interface between the cathode and the electrolyte is delaminated due to TEC difference.

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이중분광계수 모니터기반 진정제 투여가 내시경 점막하 박리술 환자의 의식하 진정상태, 생리적 안정성 및 회복시간에 미치는 효과 (Effects of Bispectral Index Monitoring Based Sedative Administration on Conscious Sedation, Physiological Stability and Recovery Time in Patients Receiving Endoscopic Submucosal Dissection)

  • 이미정;황문숙;임현숙;박미옥;허지원;강기주;김재준;조명숙
    • 임상간호연구
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    • 제18권2호
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    • pp.284-295
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    • 2012
  • Purpose: This study was done to clarify effects of bispectral index monitoring sedative administration, compared to MOAA/S (Modified Observer's Assessment of Alertness and Sedation), on conscious sedation, physiological stability and recovery time for patients undergoing endoscopic submucosal dissection. Methods: Participants In this study were patients who underwent endoscopic submucosal dissection because of early gastric cancer. Participants were assigned randomly to an experimental group receiving sedatives based on bispectral index monitoring or to a control group with the MOAA/S instrument. Movements, belching, memory, pain, discomfort, physiological stability (MBP, PR, $SpO_2$), and recovery time were measured during the treatment and recovery. Data were analyzed using Spearman partial correlation coefficient analysis, Mixed model and Wilcoxon rank sum test to determine differences in the parameters. Results: There were no statistically significant differences between the two groups for conscious sedation(movement, belching, memory, pain, or discomfort), physiological stability and recovery time. Conclusion: The results of this study indicate that no differences were found between the two types of monitoring. Thus, use of a bispectral index monitor in clinical practice enabling medical staff to readily assess the conscious sedation of for these patients is expected to be increasingly used as an objective assessment tool for conscious sedation for patient safety.