• Title/Summary/Keyword: PR 박리

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A Study on Recycling Technology of EC for Semiconductor and LCD PR Stripping Process (반도체/LCD PR 제거용 EC의 재이용 기술에 관한 연구)

  • Moon, Se-Ho;Chai, Sang-Hoon
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.46 no.10
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    • pp.25-30
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    • 2009
  • We have developed recycling technology of ethylen carbonate to use in photoresist stripping and cleaning process, which will be core processing technology for high performance and low price semiconductor and LCD fabrication. Using this technology, it is possible for semiconductor wafer and LCD planer to process more rapid and chip, and productivity will be improved.

A Study on Dissolved Ozone Decomposer in Ozonated Water for Semiconductor Process (반도체 공정용 기능수의 용해오존 분해장치에 관한 연구)

  • Moon, Se-Ho;Chai, Sang-Hoon;Son, Young-Su
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.48 no.5
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    • pp.6-11
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    • 2011
  • We have developed dissolved ozone decompose system in the used ozonated water for the semiconductor and LCD fabrication processes, which will be base of obtaining core process technology in the high performance, low price semiconductor and LCD fabrications. Using this technology, it is possible for the semiconductor wafer and LCD planer to process more rapid and chip, and productivity will be improved.

An Efficient Photoresist Stripping Process on the ITO Surface Using the Dipping Method (딥핑 방식을 이용한 ITO 표면의 효율적인 포토레지스트 박리공정)

  • Kim, Joon Hyun;Sim, Jae Myung;Joo, Gi-Tae;Kim, Young Sung;Jeong, Byung Hyun
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.25 no.4
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    • pp.281-289
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    • 2016
  • Agitation is a secondary process used to increase the PR stripping force on an ITO-glass surface; it is an efficient approach to stripping during production. It activates the stripper to chemically penetrate the PR layer and assists by breaking down the physical bonding forces at the surface. In this study, different stripping tests were conducted by varying the dipping time, the composition, the strip temperature, and the stripper concentration. Optimal PR strip conditions were estimated by using comparative visual inspection of stripped sample surfaces. The stripping process was affected by changes in the moving speeds and the sample positions. It was confirmed that the stripping capability improved at a dilute stripper ratio of 20-40% and a strip temperature of $30-40^{\circ}C$ and within 60 s of strip time.

Performance degradation of SOFC caused by increase of polarization resistance for the cathode during long-term test (공기극 분극 저항 증가에 따른 SOFC 단전지 성능 감소에 관한 연구)

  • Park, Kwang-Jin;Bae, Joong-Myeon
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.06a
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    • pp.349-352
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    • 2009
  • In this study, the relation between the performance degradation of SOFC single cell and the increase of polarization resistance for the cathode is investigated. $Pr_{0.3}Sr_{0.7}Co_{0.3}Fe_{0.7}O_3$(PSCF3737, $19.4{\times}10^{-6}K^{-1}$) and $Gd_{0.1}Ce_{0.9}O_2$ (CGO91, $12{\times}10^{-6}K^{-1}$) are used as a cathode and an electrolyte, respectively. The polarization resistance of cathode is increased due to the delamination caused by thermal expansion coefficient difference. The voltage drop with 10%/1000h decline rate occurs during long-term, when the interface between the cathode and the electrolyte is delaminated due to TEC difference.

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Effects of Bispectral Index Monitoring Based Sedative Administration on Conscious Sedation, Physiological Stability and Recovery Time in Patients Receiving Endoscopic Submucosal Dissection (이중분광계수 모니터기반 진정제 투여가 내시경 점막하 박리술 환자의 의식하 진정상태, 생리적 안정성 및 회복시간에 미치는 효과)

  • Lee, Mi Jeong;Hwang, Moon Sook;Lim, Hyun Sook;Park, Mi Ok;Huh, Ji Won;Kang, Ki Joo;Kim, Jae Jun;Cho, Myung Sook
    • Journal of Korean Clinical Nursing Research
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    • v.18 no.2
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    • pp.284-295
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    • 2012
  • Purpose: This study was done to clarify effects of bispectral index monitoring sedative administration, compared to MOAA/S (Modified Observer's Assessment of Alertness and Sedation), on conscious sedation, physiological stability and recovery time for patients undergoing endoscopic submucosal dissection. Methods: Participants In this study were patients who underwent endoscopic submucosal dissection because of early gastric cancer. Participants were assigned randomly to an experimental group receiving sedatives based on bispectral index monitoring or to a control group with the MOAA/S instrument. Movements, belching, memory, pain, discomfort, physiological stability (MBP, PR, $SpO_2$), and recovery time were measured during the treatment and recovery. Data were analyzed using Spearman partial correlation coefficient analysis, Mixed model and Wilcoxon rank sum test to determine differences in the parameters. Results: There were no statistically significant differences between the two groups for conscious sedation(movement, belching, memory, pain, or discomfort), physiological stability and recovery time. Conclusion: The results of this study indicate that no differences were found between the two types of monitoring. Thus, use of a bispectral index monitor in clinical practice enabling medical staff to readily assess the conscious sedation of for these patients is expected to be increasingly used as an objective assessment tool for conscious sedation for patient safety.