• Title/Summary/Keyword: PLASMA

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Water Uptake and Tensile Properties of Plasma Treated Abaca Fiber Reinforced Epoxy Composite

  • Paglicawan, Marissa A.;Basilia, Blessie A.;Kim, Byung Sun
    • Composites Research
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    • v.26 no.3
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    • pp.165-169
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    • 2013
  • This work presents the tensile properties and water uptake behavior of plasma treated abaca fibers reinforced epoxy composites. The composites were prepared by vacuum assisted resin transfer molding. The effects of treatment on tensile properties and sorption characteristics of abaca fiber composites in distilled water and salt solution at room temperature were investigated. The tensile strength of the composites increased with plasma treatment. With plasma treatment, an improvement of 92.9% was obtained in 2.5 min exposure time in plasma. This is attributed to high fiber-matrix compatibility. Less improvement on tensile properties of hybrid treatment of sodium hydroxide and plasma was obtained. However, both treatments reduced overall water uptake in distilled water and salt solution. Hydrophilicity of the fibers decreased upon plasma and sodium hydroxide treatment, which decreases water uptake.

Characteristics of Low NOx Plasma Burner Incorporating with Rotating Arc Plasma (회전 아크 적용 플라즈마 저 NOx 버너 연소특성)

  • Kim, Kwan-Tae;Kang, Hee-Seok;Lee, Dae-Hoon;Song, Young-Hoon;Park, Jae-Eon
    • Journal of Hydrogen and New Energy
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    • v.22 no.6
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    • pp.934-941
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    • 2011
  • Characteristics of low NOx burner is investigated. Low NOx burner introduced in this paper adopts two staged combustion with plasma burner for the 1st stage combustion. Extensive parametric tests were done to figure out the effect of burner stoichiometry, staged thermal load, electric power for plasma generation. Overall NOx production by burner shows effective reduction by adopting plasma staged burner. and the aspects depends on the fuel stoichiometry of 1st stage burner or operating condition of plasma burner. It is promising to use plasma burner as an alternative tools of low NOx burner technology.

Surface Cleaning of Polyethylene Terephthalate Film with Non-equilibrium Atmospheric Discharge Plasma

  • Sung, Youl-Moon
    • Transactions on Electrical and Electronic Materials
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    • v.9 no.2
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    • pp.79-83
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    • 2008
  • The dampness by treating the surface with polyethylene terephthalate (PET) film was measured to grasp the plasma parameters and was observed the surface condition with an atomic force microscope (AFM) to find the causes of the dampness. Also, the vibrational and rotational temperatures in the plasma were calculated after identifying the radicals within the plasma by analyzing the emission spectral with an emission spectrum. The hydrophilic properties were enhanced, by treating the surface of the PET film with non-equilibrium atmospheric discharge plasma. When the rotational temperature was 0.22 to 0.31 eV within the plasma, surface modification control could be easily carried out to surface treatment of PET film on non-equilibrium atmospheric pressure plasma.

Degradation of electrical characteristics in SOI nano-wire Bio-FET devices ($O_2$ plasma 표면 처리 공정에 의한 SOI nano-wire Bio-FET 소자의 전기적 특성 열화)

  • Oh, Se-Man;Cho, Won-Ju
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.356-357
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    • 2008
  • The effects of $O_2$ plasma ashing process for surface treatment of nano-wire Bio-FET were investigated. In order to evaluate the plasma damage introduced by $O_2$ plasma ashing, a back-gate biasing method was developed and the electrical characteristics as a function of $O_2$ plasma power were measured. Serious degradations of electrical characteristics of nano-wire Bio-FET were observed when the plasma power is higher than 50 W. For curing the plasma damages, a forming gas anneal (2 %, $H_2/N_2$) was carried out at $400^{\circ}C$. As a result, the electrical characteristics of nano-wire Bio-FET were considerably recovered.

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Effects of Phase Difference between Voltage loaves Applied to Primary and Secondary Electrodes in Dual Radio Frequency Plasma Chamber

  • Kim, Heon-Chang
    • Journal of the Semiconductor & Display Technology
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    • v.4 no.2 s.11
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    • pp.11-14
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    • 2005
  • In plasma processing reactors, it is common practice to control plasma density and ion bombardment energy by manipulating excitation voltage and frequency. In this paper, a dually excited capacitively coupled rf plasma reactor is self-consistently simulated with a three moment model. Effects of phase differences between primary and secondary voltage waves, simultaneously modulated at various combinations of commensurate frequencies, on plasma properties are investigated. The simulation results show that plasma potential and density as well as primary self-dc bias are nearly unaffected by the phase lag between the primary and the secondary voltage waves. The results also show that, with the secondary frequency substantially lower than the primary frequency, secondary self·do bias remains constant regardless of the phase lag. As the secondary frequency approaches to the primary frequency, however, the secondary self-dc bias becomes greatly altered by the phase lag, and so does the ion bombardment energy at the secondary electrode. These results demonstrate that ion bombardment energy can be more carefully controlled through plasma simulation.

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Measurement of Monodisperse Particle Charging in Unmagnetized and Magnetized Plasmas (자화된 플라즈마 내에서의 단분산 입자의 하전량 특정)

  • 한장식;안강호;김곤호
    • Journal of the Semiconductor & Display Technology
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    • v.1 no.1
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    • pp.35-40
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    • 2002
  • Understanding of charging properties of a small particle is necessary to control the particle contamination and to improve productivity of the electronic device in the plasma aided semiconductor manufacturing processes. In this study, the effects of both magnetic field and particle size on the charging properties are experimentally investigated in collisional dusty plasmas. The experiments carried out in the system consisted of a monodisperse particle generation system, a DC magnetized plasma generation system and a charge measurement system. The plasma chamber is made of cross-shape Pyrex surrounded by magnetic bucket (composed of 12 permanent magnetic bar) to confine the plasma. DC magnetic field up to 250G are applied to the plasma zone by external magnetic coil. Previous work shows the charging effect clearly increase with increasing the size of the particle and plasma density, as it was expected.

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Different formation of carbon nanofilaments as a function of the gap between the substrate and the microwave plasma

  • Kim Sung-Hoon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.16 no.1
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    • pp.20-24
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    • 2006
  • Iridium-catalyzed carbon nanofilaments were formed on MgO substrate as a function of the gap between the substrate and the plasma using microwave plasma-enhanced chemical vapor deposition method. Under the remote plasma condition, carbon nanofibers were formed on the substrate. Under the adjacent plasma condition, on the other hand, carbon nanotubes-like materials instead of carbon nanofibers could be formed. When the substrate immersed into the plasma, any carbon nanofilaments formation couldn't be observed. During the reaction, the substrate temperatures were measured as a function of the gap. Based on these results, the cause for the different carbon nanofilaments formation according to the gap was discussed.

Analysis and Design of Resonant Inverter for Reactive Gas Generator Considering Characteristics of Plasma Load

  • Ahn, Hyo Min;Sung, Won-Yong;Lee, Byoung Kuk
    • Journal of Electrical Engineering and Technology
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    • v.13 no.1
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    • pp.345-351
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    • 2018
  • This paper analyzes a resonant inverter to generate plasma. The resonant inverter consists of a full bridge converter, resonant network and reactor to generate a magnetic field for plasma generation. A plasma load has very distinct characteristics compared to conventional loads. The characteristics of plasma load are analyzed through experimental results. This paper presents the study on the resonant network, which was performed in order to determine how to achieve a constant current gain. Another important contribution of this study is the analysis of drop-out phenomenon observed in plasma loads which is responsible for unpredictable shutdown of the plasma generator that requires stable operation. In addition, the design process for the resonant network of a plasma generator is proposed. The validity of this study is verified through simulations and experimental results.

Lossless Single-Switch Inverter for Plasma Burner Drive Application (Plasma Burner 구동을 위한 무손실 단일 스위치 인버터)

  • Kang, Kyung-Soo;Kim, Sang-Yeon;Kim, Se-Min;Lee, Jeong-sun;Roh, Chung-Wook
    • Proceedings of the KIPE Conference
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    • 2015.07a
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    • pp.201-202
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    • 2015
  • 기존 Plasma Burner용 인버터 구동회로의 경우, Full Bridge Inverter를 사용하기 때문에 소자수가 많고 스위칭 손실이 큰 문제점이 있다. 본 논문은 Plasma Burner 구동을 위한 무손실 단일 스위치 인버터를 제안한다. 기존 Full Bridge Inverter를 사용하는 Plasma Burner 구동회로의 경우에는 4개의 스위치를 사용하기 때문에 스위치 손실이 매우 크고, Heat-sink 크기가 커지는 단점이 있다. 반면 제안된 Plasma Burner 구동을 위한 무손실 단일 스위치 인버터는 1개의 스위치를 사용하고, 스너버의 전력 손실이 최소화되기 때문에 전력 손실이 매우 작고 Heat-sink 최소화 및 고효율화가 가능한 장점을 갖는다. 본 논문에서는 제안된 Plasma Burner 구동을 위한 무손실 단일 스위치 인버터의 이론적인 특성을 분석하고 모의실험을 통해 확인하였으며, 15W급 Plasma Bunrer에 적용하여 실험을 통해 우수성을 검증하였다.

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Investigation on Optimum Plasma Production Condition of a Magnetic Neutral Loop Discharge System (자기중성선방전 시스템의 최적 플라즈마 생성조건에 관한 고찰)

  • Sung, Youl-Moon
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.58 no.11
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    • pp.2236-2241
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    • 2009
  • In this study, the electron behavior was investigated numerically in order to obtain guidelines for design and operation of a new plasma source by a magnetic neutral loop discharge (NLD). The optimum plasma production was investigated by using a 3-dimensional simulation model which enables the electron behavior calculation from source region to downstream region. The results showed that the high-density plasma produced around the magnetic neutral loop (NL) is transferred from the NL region to the downstream region along magnetic force lines. Also the avaraged electron energy is increased with the normalized RF electric field (F), which can be used to characterize the plasma production efficiency of NLD system. Considering the relation between F and plasma production, in-depth plasma control can be achieved at a given specific process condition.