Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.06a
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- Pages.356-357
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- 2008
Degradation of electrical characteristics in SOI nano-wire Bio-FET devices
$O_2$ plasma 표면 처리 공정에 의한 SOI nano-wire Bio-FET 소자의 전기적 특성 열화
- Oh, Se-Man (Kwangwoon Univ.) ;
- Cho, Won-Ju (Kwangwoon Univ.)
- Published : 2008.06.19
Abstract
The effects of