• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.23 no.4
• /
• pp.327-332
• /
• 2010

We report on the effect of PET substrate preheating on the characteristics of the flexible and transparent indium tin oxide (ITO) electrode grown by a specially designed roll-to-roll sputtering system for touch panel applications. It was found that electrical and optical properties of the roll-to-roll sputter grown ITO film were critically dependent on the preheating of the PET substrate. In addition, the roll-to-roll sputter-grown ITO film after post annealing test at $140^{\circ}C$ for 90 min showed stable electrical and optical properties. The low sheet resistance and high optical transmittance of the ITO film grown on the preheated PET substrate demonstrate that the preheating process before ITO sputtering is one of the effective way to improve the characteristics of ITO/PET film. Furthermore, the superior flexibility of the ITO electrode grown on the preheated PET substrate indicates that the preheating treatment is a promising technique to obtain robust ITO/PET sample for touch panel applications.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2008.10a
• /
• pp.605-608
• /
• 2008

The preparation and characteristics of flexible indium tin oxide electrodes grown on polyethylene terephthalate (PET) substrates using a specially designed roll-to-roll sputtering system for use in flexible optoelectronics In spite of low a PET substrate temperature, we can obtain the flexible electrode with a sheet resistance of 47.4 ohm/square and an average optical transmittance of 83.46 % in the green region of 500~550 nm wavelength. Both x-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) analysis results showed that all flexible ITO electrodes grown on the PET substrate were an amorphous structure with a very smooth and featureless surface, regardless of the Ar/$O_2$ flow ratio due to the low substrate temperature, which is maintained by a cooling drum. In addition, the flexible ITO electrode grown on the Ar ion beam treated PET substrates showed more stable mechanical properties than the flexible ITO electrode grown on the wet cleaned PET substrate, due to an increased adhesion between the flexible ITO and the PET substrates.

• Polymer(Korea)
• /
• v.35 no.3
• /
• pp.249-253
• /
• 2011

The effect of morphological development in PET/PEN blending on the physical properties of PET/PEN blend film as a flexible substrate was investigated. The two phase morphology was obtained in PET/PEN blends and it caused the improvement of dimensional stability of PET/PEN blend as a flexible substrate. The two phase morphology and crystallinity of PET/PEN blends could be controlled by the transesterification between PET and PEN during the film processing and this macroscopic structural development affected the dimensional stability of PET/PEN blend films. Better dimensional stability was obtained with increasing crystallinity and decreasing the level of transesterification.

• Proceedings of the KIEE Conference
• /
• 1999.07d
• /
• pp.1795-1796
• /
• 1999

ITO thin films have been deposited on PET substrate by reactive dc magnetron sputtering without substrate heater and post heat treatment. The electrical and optical properties of as-deposited films are dominated by oxygen gas ratio. As the experimental results, the excellent ITO films are prepared on PET substrate at the operating conditions as follows: operating pressure of 5 mTorr, target-substrate distance of 4.5 cm, dc power of $20{\sim}30W$, and oxygen gas ratio of 10 %. The optical transmittance is above 80 % at 550 nm, and the sheet resistance and resistivity of films are $24{\Omega}$/square and $1.5{\times}10^{-3}{\Omega}cm$, respectively.

• Journal of the Korean institute of surface engineering
• /
• v.32 no.6
• /
• pp.671-676
• /
• 1999

ITO (indium tin oxide) thin films on PET (polyethylene terephthalate) substrate have been deposited by a dc reactive magnetron sputtering without heat treatments such as substrate heater and post heat treatment. Each sputtering parameter during the sputtering deposition is an important factor for the high quality of ITO thin films deposited on polymeric substrate. Particularly, the material, electrical and optical properties of as-deposited ITO oxide films are dominated by the ratio of oxygen partial pressure. As the experimental results, the excellent ITO films are prepared on PET substrate at the operating conditions as follows : operating pressure of 5 mTorr, target-substrate distance of 45mm, do power of 20~30W, and oxygen gas ratio of 10%. The optical transmittance is above 80% at 550 nm, and the sheet resistance and resistivity of films are 24 Ω/square and $1.5\times$10$^{-3}$ Ωcm, respectively.

• Journal of the Microelectronics and Packaging Society
• /
• v.17 no.1
• /
• pp.19-24
• /
• 2010

The effects of $O_2$ plasma pretreatment on the properties of Ga-doped ZnO films on PET substrate were studied. GZO films were fabricated by RF magnetron sputtering process. To improve surface energy and adhesion between the PET substrate and the GZO film, $O_2$ plasma pretreatment process was used prior to GZO sputtering. As the RF power and the treatment time increased, the crystallinity increased and the contact angle decreased significantly. When the RF power was 100 W and the treatment time was 600 sec in $O_2$ plasma pretreatment process, the resistivity of GZO films on the PET substrate was $1.90{\times}10^{-3}{\Omega}-cm$.

• Polymer(Korea)
• /
• v.35 no.6
• /
• pp.599-604
• /
• 2011

The PET-PEN copolymers have been synthesized and the effect of their morphology on the physical properties of polyester flexible substrate was investigated. It was found that the block sequence of synthesized copolymer was varied depending upon DMT/NDC ratio in polymerization. Higher PET-PEN and PEN block sequence in polyester copolymer resulted in the increase of glass transition temperature and it caused the enhancement of dimensional stability as a polyester flexible substrate. The highest coefficient of thermal expansion(CTE) was obtained when DMT/NDC ratio is 50/50. Synthesized PET-PEN copolymer seems to be acceptable as a flexible substrate since it shows that their optical transmittance at 550 nm is over 80% and thermal weight loss at $280^{\circ}C$ for 1 hr is less than 0.4 wt%.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.05b
• /
• pp.58-61
• /
• 2003

ITO (indium tin oxide) thin films on PET (polyethylene terephthalate) substrate have been deposited by a dc reactive magnetron sputtering without heat treatments such as substrate heater and post heat treatment. Each sputtering parameter during the sputtering deposition is an important factor for the high quality of ITO thin films deposited on polymeric substrate. Particularly, the material, electrical and optical properties of as-deposited ITO oxide films are dominated by the ratio of oxygen partial pressure. As the experimental results, the excellent ITO films are prepared on PET substrate at the operating conditions as follows: operating pressure of 5 mTorr,target-substrate distance of 45 mm, dc power of 20-30 W, and oxygen gas ratio of 10 %. The optical transmittance is above 80 % at 550 nm, and the sheet resistance and resistivity of films are $24\;{\Omega}$/square and $1.5{\times}10^{-3}\;cm$, respectively.

• Korean Chemical Engineering Research
• /
• v.61 no.3
• /
• pp.439-445
• /
• 2023

In this study, silver nanoparticles were synthesized by reducing silver nitrate with PVA, and the solution prepared by adding carboxymethyl cellulose (CMC) to the silver nanoparticles was coated on a PET substrate to prepare a coating film with antibacterial and antifogging function. When the coating films were in contact with water vapor at 80 ℃, the uncoated PET substrate was blurred due to the scattering of light due to the occurrence of fog, while the coating film coated with silver nanosol with CMC remained transparent despite contact with water vapor, showing excellent antifogging function. In addition, the antibacterial properties of the coating films were measured by film adhesion method for Staphylococcus aureus, gram-positive bacteria, and Escherichia coli, gram-negative bacteria. The uncoated PET substrate showed a large number of colonies of Staphylococcus aureus and Escherichia coli, while the coating film coated with the silver nanosol greatly inhibited the growth of Staphylococcus aureus and Escherichia coli, resulting in excellent antibacterial effect.

• Korean Journal of Materials Research
• /
• v.18 no.1
• /
• pp.32-37
• /
• 2008

The electrical, optical, structural and surface properties of an indium tin oxide (ITO) film grown on a flexible PET substrate using a specially designed roll-to-roll (R2R) sputtering system as a function of the DC power, $Ar/O_2$ flow ratio, and rolling speed is reported. It was observed that both the electrical and optical properties of the ITO film on the PET substrate were critically dependent on the $Ar/O_2$ flow ratio. In addition, x-ray diffraction examination results showed that the structure of the ITO film on the PET substrate was an amorphous structure regardless of the DC power and the $Ar/O_2$ flow ratio due to a low substrate temperature, which was maintained constant by a main cooling drum. Under optimized conditions, ITO film with resistivity of $6.44{\times}10^{-4}{\Omega}-cm$ and transparency of 86% were obtained, even when prepared at room temperature. Furthermore, bending test results exhibited that R2R-grown ITO film had good flexibility which would be applicable to flexible displays and solar cells.