Gate Dielectrics and Oxynitridation of Silicon using $N_2O$ Plasma Oxidation
($N_2O$ Plasma Oxidation을 이용한 Silicon의 Oxynitridation과 Gate Dielectrics)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2005.11a
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- pp.93-94
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- 2005