• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.25 no.1
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• pp.7-13
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• 2013

Bio Clean Room(BCR) and pharmaceutical product manufacturing facilities require careful assessment of many factors, including HVAC, controls, room finishes, process equipment, room operations, and utilities. Flow of equipment, personnel, and product must also be considered along with system flexibility, redundancy, and maintenance shutdown strategies. It is important to involve designers, operators, commissioning staff, quality control, maintenance, constructors, validation personnel, and the production representative during the conceptual stage of design. Critical variables for room environment and types of controls vary greatly with the clean space's intended purpose. It is particularly important to determine critical parameters with quality assurance to set limits and safety factors for temperature, humidity, room pressure, and other control requirements. In this paper, oxygen cluster ion equipment was utilized in order to enhance the indoor air quality and to prevent the airborne infection of ward in hospital. Moreover, the performance test of the equipment was also performed in order to develop the optimal sterilization system of BCR using the equipment.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.162-162
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• 2012

Sub 100 nm의 Complementary Metal-Oxide-Semiconductor (CMOS) 소자를 구동하기 위해서는 2.0 nm 이하의 $SiO_2$ oxide에 해당하는 전기적 특성이 요구된다. 그러나 2.0 nm 이하의 $SiO_2$에서는 누설 전류가 너무 크기 때문에 이를 대체하기 위해서 유전 상수 (dielectric permittivity)가 높은 $HfO_2$ (${\varepsilon}=25$), $Al_2O_3$, $HfO_2/Al_2O_3$ laminate 등의 high-k dielectric 물질들이 연구되고 있다[1]. High-k dielectric 물질의 전기적 특성은 박막 조성, 두께 및 전극과의 계면에 생성되는 계면 층이나 불순물(Impurity) 거동에 크게 의존하므로 High-k dielectric/전극(Metal or Si) 구조에서 조성 및 불순물의 거동에 대한 정확한 평가가 주요 쟁점으로 부각되고 있다. 이를 평가하기 위해 일반적으로 $Ar^+$ ion에 의한 depth profiling 분석이 진행되나 Oxygen 원자의 선택적 식각에 기인된 분석 깊이 분해능(Depth Resolution) 왜곡으로 계면 층의 형성이나 불순물의 거동을 정확하게 평가할 수 없다. 이러한 예로는 $Ta_2O_5$ 및 $SrBi_2Ta_2O_9$와 같은 다 성분 계 산화막에 $Ar^+$ ion 주사 시 발생하는 선택적인 식각(Preferential Sputtering) 때문에 박막의 실제 조성 및 거동을 평가하는 것은 어렵다고 보고된 바 있다[2,3]. 본 연구에서는 $90{\AA}$인 적층 $Hf_xO_y/Al_xO_y/Hf_xO_y$ 구조에서의 불순물 거동 분석 능력 확보 상 주요 인자인 깊이 분해능 개선을 Secondary Ion Mass Spectroscopy(SIMS)의 primary ion 종, impact energy 및 주사 각도를 변화시켜 ~1 nm 수준까지 구현하였다. 이러한 분석 깊이 분해능의 개선은 Low Impact Energy, 입사 이온의 glancing angle 및 Cluster ion 적용에 의존하며 이들 요인의 효과에 대해 비교/고찰하고자 한다.

• Journal of the Korean Vacuum Society
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• v.4 no.S2
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• pp.95-99
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• 1995

keV ion beam irradiatin for surface modification and thin film growth have been discussed. keV ion beam irradiation in reactive gas environment has been developed for improving wettability of polymer, and for enhancing adhesion to metal film, and adventages of the method have been reviewed. An epitaxial Cu film on Si(100) substrate has been grown by ionized cluster beam and changes of crystallinity and surface roughness have been discussed. Stoichiometric $SnO_2$ films on Si(100) and glass have been grown by a hybrid ion beam Deposition(2 metal ion sources+1 gas ion source), and nonstoichiometric $SnO_2$ films are controlled by various deposition conditions in the HIB. Surface modification for polymer by kev ion irradiation have been developed. Wetting angle of water to PC has been changed from 68 degree to 49 degree with $Ar^+$ irradiation and to 8 degree with $Ar^+$ irradiation and the oxygen environment. Change of surface phenomena in a keV ion beam and characteristics of the grown films are suggested.

• Bulletin of the Korean Chemical Society
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• v.9 no.5
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• pp.303-308
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• 1988

Four crystal structures of dehydrated Ag(I) and Tl(I) exchanged zeolite A, $Ag_{12-x}Tl_x$-A, x = 2, 3, 4, and 5, have been determined by single-crystal x-ray diffraction techniques. Their structures were solved and refined in the cubic space group Pm3m at $21(1)^{\circ}C$. All crystals were ion exchanged in flowing streams of mixed $AgNO_3\;and\;TlNO_3$ aqueous solution, followed by dehydration at $350^{\circ}C$ and $2{\times}10^{-6}$ Torr for 2 days. In all of these structures, one-sixth of the sodalite units contain octahedral hexasilver clusters at their centers and eight $Ag^+$ ions are found on threefold axes, each nearly at the center of a 6-oxygen ring. The hexasilver cluster is stabilized by coordination to eight $Ag^+$ ions. The Ag-Ag distance in the cluster, ca. 2.92 ${\AA}$, is near the 2.89 ${\AA}$ bond length in silver metal. The remaining five-sixths of the sodalite units are empty of silver species. The first three $Tl^+$ ions per unit cell preferentially associate with 8-oxygen rings, and additional $Tl^+$ ions, if present, are found on threefold axes in the large cavity.

• Journal of the Korean Vacuum Society
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• v.13 no.2
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• pp.79-85
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• 2004

Secondary ion mass spectrometry(SIMS) and glow discharge mass spectrometry(GDMS) were used to determine the impurity concentrations of hydrogen, carbon, and oxygen elements in the Cu and Ta films, and the results of SIMS and GDMS analysis were carefully considered. The Cu and Ta films were deposited on Si (100) substrates at zero substrate bias voltage and a substrate bias voltage of -50 V(Cu films) or -125 V(Ta films) using a non-mass separated ion beam deposition method. As a result of SIMS with Cs+ ion beam, in the case of the Cu and Ta films deposited without the substrate bias voltage, many strong peaks were observed, which is considered to be detected as a the cluster state such as CxHx, OxHx, CxOxHx. All the peaks of SIMS results could be interpreted by the combination of these dominant impurities. Moreover, it was confirmed that the quantitative results of GDMS analysis were accordant to the SIMS results.

• Bulletin of the Korean Chemical Society
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• v.6 no.4
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• pp.202-206
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• 1985

The crystal structure of The crystal structure of $Ag^+$-Exchanged Zeolite A, $Ag_{4.6}Na_{7.4}-A$, dehydrated, treated with $H_2$, and evacuated, all at $350^{\circ}C$, has been determined by single crystal x-ray diffraction methods in the cubic space group Pm3m at $24(1)^{\circ}C;$ a = $12.208(2)\AA.$ The structure was refined to the final error indices R1 = 0.088 and R2 (weighted) = 0.069 using 194 independent reflections for which II_0$ > $3{\sigma}(I_0)$. On threefold axes near the centers of 6-oxygen rings, $7.4 Na^+$ ions and $0.6 Ag^+$ ions are found. Two non-equivalent 8-ring $Ag^+$ ions are found off the 8-ring planes, each containing about $0.6 Ag^+$ ions. Three non-equivalent Ag atom positions are found in the large cavity, each containing about 0.6 Ag atoms. This crystallographic analysis may be interpreted to indicate that $0.6 (Ag_6)^{3+}$ clusters are present in each large cavity. This cluster may be viewed as a nearly linear trisilver molecule $(Ag_3)^0$ (bond lengths, 2.92 and 2.94 $\AA;$ angle, $153^{\circ})$ stabilized by the coordination of each atom to a Ag^+$ ion at 3.30, 3.33, and 3.43 $\AA$, respectively. In addition, one of the silver atoms approaches all of the 0(1) oxygens of a 4-ring at $2.76\AA.$ Altogether $7.4 Na^+$ ions, $1.8 Ag^+$ ions, and 1.8 Ag atoms are located per unit cell. The remaining $1.0 Ag^+$ ion has been reduced and has migrated out of the zeolite framework to form silver crystallites on the surface of the zeolite single crystal.

• Journal of the Korean Chemical Society
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• v.40 no.7
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• pp.474-482
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• 1996

Two crystal structures of the vacuum dehydrated $Ag^+$-exchanged zeolite X have been determined by single-crystal X-ray diffraction techniques in the cubic space group Fd3 at 21(1)$^{\circ}C$ (a=24.922(1)${\AA}$ and a=24.901(1)${\AA}$, respectively). Each crystal was ion exchanged in flowing streams of aqueous $AgNO_3$ for three days. The first crystal was dehydrated at 300$^{\circ}C$ and $2{\times}10^{-6$torr for two days. The second crystal was similarly dehydrated at 350$^{\circ}C$. Their structures were refined to the final error indices, $R_1=0.095\;and\;R_2=0.092$ with 227 reflections, and $R_1=0.096\;and\;R_2=0.087$ with 334 reflections, respectively, for which I > 3${\sigma}$(I). In the first crystal, Ag species are found at five different crystallographic sites: sixteen $Ag^+$ ions fill the site I, the center of the double 6-ring, thirty-two Ag0 atoms fill the I' site in the sodalite cavities opposite double six-rings, seventeen $Ag^+$ ions lie at the 32-fold site II' inside the sodalite cavity at the single six-oxygen ring in the supercage, fifteen Ag+ ions lie at the 32-fold site II, in the supercage, and the remaining twelve $Ag^+$ ions lie at site III' in the supercage at a little off two-fold axes. In the second crystal, all Ag species are located similarly as crystal 1; 16 at site I, 28 at site I', 16 at site II, 16 at site II', 6 at site III and 6 at site III'. Total 88 silver species were found per unit cell. The remaining four Ag atoms were migrated out of the zeolite framework to form small silver crystallites on the surface of the zeolite single crystal. In the first structure, the numbers of Ag atoms per unit cell are approximately 32.0 and these may form tetrahedral $Ag_4$ clusters at the centers of the sodalite cavities. The probable four-atom cluster is stabilized by coordination to two $Ag^+$ ions. The Ag-Ag distance in the cluster, ca. 3.05 ${\AA}$, is a little longer than 2.89 ${\AA}$, Ag-Ag distance in silver metal. At least two six-ring $Ag^+$ ions on sodalite cavity (site II') must necessarily approach this cluster and this cluster may be viewed as a distorted octahedral silver cluster, (Ag6)2+.

• Korean Journal of Crystallography
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• v.15 no.2
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• pp.59-68
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• 2004

Three crystal structures of dehydrated partially $Co^{2+}-exchanged$ zeolite A treated with 0.6 Torr of K at $300^{\circ}C$ (for 12 hrs, 6 hrs, and 2 hrs) vapor have been determined by single-crystal X-ray diffraction techniques in the cubic space group Pm3m at 21(1)$^{\circ}C(a=12.181(1)\;{\AA},\;a=12.184(1)\;{\AA},\;and\;a=12.215(1)\;{\AA})\;respectively)$. Their structures were refined to the final error indices, R(weight) of 0.090 with 10 reflections, 0.091 with 82 reflections, and 0.090 with 80 reflections, respectively, for which $1>\sigma(I)$. In each structure, all four $Co^{2+}$ and four $Na^+$ ions to be reduced by K atoms. The cobalt and sodium atoms produced are no longer found in the zeolite. K species are found at five different crystallographic sites: three $K^+$ ions lie at the planes of 8-rings, filling that position, ca. 11.5 K^+$ ions lie on threefold axes, ca. 4.0 in the large cavity and ca. 4.0 in the sodalite cavity, and ca. 0.5 $K^+$ ion is found near a 4-ring. ca. three $K^0$ atoms are found deep into the large cavity on threefold axes. In these structures, crystallographic results show that cationic tetrahedral $K_4$ (and/or triangular $K_3$) clusters have formed in the sodalites of zeolite A. The $K_4$ and/or $K_3$ clusters coordinate trigonally to three oxygens of a six-oxygen ring. The partially reduced ions of these clusters interact primarily with oxygen atoms of the zeolite structure rather than with each other. ca. 14.5K species are found per unit cell, more than the twelve $K^+$ ions needed to balance the anionic charge of zeolite framework, indicating that sorption of $K^0$ has occurred. The three $K^0$ atoms in the large cavity are closely associated with three out of four $K^+$ ions in the large cavity to form $K_7^{4+}$ clusters. The $K_7^{4+}$ cluster not interacts primarily with framework oxygens.

• Journal of the Korean Society of Marine Environment & Safety
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• v.17 no.3
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• pp.203-218
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• 2011

Long-term trends and distribution patterns of water quality were investigated in the Yeoja Bay of South Sea, Korea from 1976 to 2010. Water samples were collected at 3 stations and physicochemical parameters were analyzed including water temperature, salinity, hydrogen ion concentration (pH), dissolved oxygen (DO), chemical oxygen demand (COD), suspended solids (SS) and nutrients. Spatial distribution patterns of temperature, pH and DO were not clear among stations but the seasonal variations were distinct except ammonium. The trend analysis by principal component analysis (PCA) during 31 years revealed the significant variations in water quality in the study area. Spatial water qualities were discriminated into 2 clusters by PCA; station cluster 1 and 2~3. Annual water qualities were clearly discriminated into 4 clusters by PCA. By this multi-variate analysis, the annual trends were summarized as the followings; water temperature, COD and SS tended to increase from late 1970's, decreased salinity, and increased phosphate from 1991 to 2001 and increased dissolved inorganic nitrogen. Water quality was showed by the input of fresh water same as those of Kyoungin coastal area, Asan coastal area, Choensoo bay, Gunsan coastal and Mokpo coastal area in the Yeoja Bay.

• Journal of the Korean Chemical Society
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• v.33 no.1
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• pp.18-24
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• 1989

Two crystal structures of dehydrated $Ag^+$ and $Rb^+$ exchanged zeolite A, stoichiometries of $Ag_{9}Rb_{3}-A$ (a = 12.278(2)${\AA}$) and $Ag_{10}Rb_{2}-A$ (a = 12.286(2)${\AA}$) per unit cell, have been determined by single crystal x-ray diffraction techniques. Their structures were solved and refined in the cubic space group Pm3m at 21(1)$^{\circ}$C. The crystals of $Ag_{10}Rb_{2}-A$ and $Ag_{10}Rb_{2}-A$ were prepared by flow methods using exchanged solution in which mole ratios of AgNO$_3$ and RbNO$_3$ were 1:5 and 1:50, respectively, with the total concentration of 0.05 M. The structures of the dehydrated $Ag_{9}Rb_{3}-A$ and the $Ag_{10}Rb_{2}-A$ were refined to the final error indices, $R_1$ = 0.064 and $R_2$ = 0.060 with 291 reflections, and $R_1$ = 0.063 and $R_2$ = 0.080 with 416 reflections respectively, for which I >3${\sigma}$(I). In both structures, one reduced silver atom per unit cell was found inside the sodalite cavity. It may be present as a hexasilver cluster in 1/6 of the sodalite units or as an isolated Ag atom coordinated to 4 $Ag^+$ ions in each sodalite unit to give $(Ag_5)^{4+}$, symmetry 4 mm. In the structure of dehydrated $Ag_{9}Rb_{3}-A$, 8 $Ag^+$ ions lie on the threefold axis and each is nearly at the center of the 8-rings at the sites of $D_{4h}$ symmetry. In the structure of dehydrated $Ag_{10}Rb_{2}-A$, two crystallographically different eight 6-ring $Ag^+$ ions were found; $7Ag^+$ ions in the (111) planes of their O(3) framework oxygens and one $Ag^+$ ion inside of sodalite cavity. Two crystallographically different 8-ring cations were also found; two $Rb^+$ ions at the centers of the 8-oxygen rings and one $Ag^+$ ion into the large cavity. Both structures indicate that $Rb^+$ ions prefer to occupy the 8-ring sites, while $Ag^+$ ions prefer to occupy the 6-ring sites.