• 한국재료학회지
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• 제30권8호
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• pp.399-405
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• 2020

In the present investigation we show the effect of Al doping on the length, size, shape, morphology, and sensing property of ZnO nanorods. Effect of Al doping ultimately leads to tuning of electrical and optical properties of ZnO nanorods. Undoped and Al-doped well aligned ZnO nanorods are grown on sputtered ZnO/SiO₂/Si (100) pre-grown seed layer substrates by hydrothermal method. The molar ratio of dopant (aluminium nitrate) in the solution, [Al/Zn], is varied from 0.1 % to 3 %. To extract structural and microstructural information we employ field emission scanning electron microscopy and X-ray diffraction techniques. The prepared ZnO nanorods show preferred orientation of ZnO <0001> and are well aligned vertically. The effects of Al doping on the electrical and optical properties are observed by Hall measurement and photoluminescence spectroscopy, respectively, at room temperature. We observe that the diameter and resistivity of the nanorods reach their lowest levels, the carrier concentration becomes high, and emission peak tends to approach the band edge emission of ZnO around 0.5% of Al doping. Sensing behavior of the grown ZnO nanorod samples is tested for H₂ gas. The 0.5 mol% Al-doped sample shows highest sensitivity values of ~ 60 % at 250 ℃ and ~ 50 % at 220 ℃.

• Transactions on Electrical and Electronic Materials
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• 제15권1호
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• pp.49-54
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• 2014

In this study, we carried out an investigation of the etch characteristics of silicon (Si) film, and the selectivity of Si to $SiO_2$ in $SF_6/O_2$ plasma. The etch rate of the Si film was decreased on adding $O_2$ gas, and the selectivity of Si to $SiO_2$ was increased, on adding $O_2$ gas to the $SF_6$ plasma. The optical condition of the Si film with this work was 1,350 nm/min, at a gas mixing ratio of $SF_6/O_2$ (=130:30 sccm). At the same time, the etch rate was measured as functions of the various etching parameters. The X-ray photoelectron spectroscopy analysis showed the efficient destruction of oxide bonds by ion bombardment, as well as the accumulation of high volatile reaction products on the etched surface. Field emission auger electron spectroscopy analysis was used to examine the efficiency of the ion-stimulated desorption of the reaction products.

• 한국산학기술학회논문지
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• 제20권4호
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• pp.458-463
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• 2019

팔라듐 (Pd)은 촉매 또는 유해 가스 감지물질로서 널리 활용되고 있다. 특히 자체 부피의 900배까지 수소를 흡착할 수 있는 특성 때문에 수소가스 센서로서의 다양한 연구가 이루어졌다. 본 연구에서는 팔라듐 옥사이드 (PdO) 나노구조물을 실리콘 기판 ($SiO_2(300nm)/Si$) 위에 열화학기상증착 장비를 이용하여 $230^{\circ}C{\sim}440^{\circ}C$ 영역에서 3시간 ~ 5시간 동안 성장시켰다. 원료물질인 Pd 파우더는 $950^{\circ}C$에서 기상화시켰고, 이송가스인 고순도 아르곤 가스를 200 sccm으로 흘려주었다. 성장된 팔라듐 옥사이드 나노구조물의 형상을 전계방출 주사전자현미경으로 조사하였고, 결정학적 특성을 Raman 분광학으로 분석하였다. 그 결과 성장된 나노구조물은 PdO 상을 가지고 있었으며, 특정한 기판 온도와 성장 시간에서 나노큐브 형태의 PdO 나노구조물이 성장되었다. 특히 5시간 동안 성장된 $370^{\circ}C$ 영역에서 균일한 형태의 나노큐브 PdO 나노구조물이 성장되었다. 이러한 PdO 나노큐브는 기상-액상-고상 공정으로 성장된 것으로 판단되며, 그래핀 위에 성장되는 PdO 나노큐브 구조는 고감도 수소가스 감지 센서로 활용될 수 있을 것으로 기대된다.

• 한국재료학회지
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• 제24권12호
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• pp.663-670
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• 2014

Diameter-controlled tin oxide nanofibers have been successfully prepared using electrospinning and a subsequent calcination process; their diameters, morphologies, and crystal structures have been characterized. The diameters of the as-spun nanofibers can be decreased by lowering the concentration of a polymer and a tin precursor in the electrospinning solution because of the decrease in the solution viscosity. The crystal structure of the nanofibers calcined at various temperatures from $200^{\circ}C$ to $800^{\circ}C$ has been proved to be the tetragonal rutile of tin oxide; crystallinity is improved by increasing the temperature. However, nanofibers with lower concentrations of tin precursor do not maintain their fibrous structures after calcination at high temperatures. In this study, the effect of the relationship between the precursor concentration and the calcination temperature on the diameter and the morphology of the tin oxide nanofiber has been systematically investigated and discussed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제34회 동계학술대회 초록집
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• pp.87-87
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• 2008

• 한국세라믹학회지
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• 제46권4호
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• pp.429-435
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• 2009

In this study, we investigated microstructure and the CO gas sensing properties of Ag-CuO-$SnO_2$ thin films prepared by co-evaporation and subsequently thermal oxidation at air atmosphere. The sensitivity of a Cu-Sn films, thermally oxidized at $600^{\circ}C$, is strongly affected by the amount of Cu. At Cu:7 wt%-Sn:93 wt%, the film exhibited a maximum sensitivity of ${\sim}2.3$ to CO gas of 1000 ppm at $300^{\circ}C$. In contrast, the sensitivity of a Sn-Ag film did not change significantly with the amount of Ag. An enhanced sensitivity of ${\sim}3.7$ was observed in the film with a composition of Ag:3 wt%-Cu:4 wt%-Sn:93 wt%, when thermally oxidized at $600^{\circ}C$. In addition, this thin film shows a response time of ${\sim}80$ sec and a recovery time of ${\sim}450$ sec to 1000 ppm CO gas. The results demonstrate that the CO sensitivity of the Ag-CuO-$SnO_2$ thin films may be closely associated with coexistence of $SnO_2$ and SnO phase, decrease in average particle size, and a porous microstructure. We also suggest that co-evaporation and followed by thermal oxidation is a very simple and effective method to prepare oxide gas sensor thin films.

• 센서학회지
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• 제29권2호
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• pp.93-99
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• 2020

A colorimetric paper sensor was used to detect volatile nitrogen-containing compounds emitted from spoiled salmon filets to determine their freshness. The sensing mechanism was based on acid-base reactions between acidic pH-indicating dyes and basic volatile ammonia and amines. A sensing layer was simply fabricated by drop-casting a dye solution of bromocresol green (BCG) on a polyvinylidene fluoride substrate, and its color-change response was enhanced by optimizing the amounts of additive chemicals, such as polyethylene glycol, p-toluene sulfonic acid, and graphene oxide in the dye solution. To avoid the adverse effects of water vapor, both faces of the sensing layer were enclosed by using a polyethylene terephthalate film and a gas-permeable microporous polytetrafluoroethylene sheet, respectively. When exposed to basic gas analytes, the paper-like sensor distinctly exhibited a color change from initially yellow, then to green, and finally to blue due to the deprotonation of BCG via the Brønsted acid-base reaction. The use of ammonia analyte as a test gas confirmed that the sensing performance of the optimized sensor was reversible and excellent (detection time of < 15 min, sensitive naked-eye detection at 0.25 ppm, good selectivity to common volatile organic gases, and good stability against thermal stress). Finally, the coloration intensity of the sensor was quantified as a function of the storage time of the salmon filet at 28℃ to evaluate its usefulness in monitoring of the food freshness with the measurement of the total viable count (TVC) of microorganisms in the food. The TVC value increased from 3.2 × 10⁵ to 3.1 × 10⁹ cfu/g in 28 h and then became stable, whereas the sensor response abruptly changed in the first 8 h and slightly increased thereafter. This result suggests that the colorimetric response could be used as an indicator for evaluating the degree of decay of salmon induced by microorganisms.

• 한국분말재료학회지
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• 제8권2호
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• pp.98-103
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• 2001

Metallic tin powder with diameter less than 50 nm was synthesized by inert gas condensation method and subsequently oxidized to tin oxide ($SnO_2$) along the two heat-treatment routes. The $SnO_2$ powder of single phase with a tetragonal structure was obtained by the heat-treatment route with intermediate annealing step-wise oxidation, whereas the $SnO_2$ powder with mixture of orthorhombic and tetragonal phases was obtained by the heat-treatment route without intermediate annealing (direct oxidation). $SnO_2$ gas sensors fabricated from the nano-phase $SnO_2$ powders were investigated by structural observations as well as measurement of electrical resistance. The $SnO_2$ gas sensors fabricated from the mixed-phase powder exhibited much lower sensitivity against $H_2$ gas than those fabricated from the powder of tetragonal phase. Reduced sensitivity of gas sensors with the new orthorhombic phase was attributed to detrimental effects of phase boundaries between orthorhombic and tetragonal phases and many twin boundaries on the charge mobility.

• 센서학회지
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• 제7권1호
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• pp.73-82
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• 1998

실리콘 표면 미세가공에 있어서, 새로 개발된 HF 기상식각 공정은 미소구조체들을 띄우는데 매우 효과적임을 입증하였다. 무수 불화수소와 메탄올을 이용한 기상식각 시스템에 대한 기능 및 특성을 기술하였고, 실리콘 미세구조체룰 띄우기 위한 회생층 산화막들의 선택적 식각특성이 고찰되었다. 구조체층으로는 인이 주입된 다결정실리콘이나 SOI 기판의 단결정실리콘을 사용하였다. 회생층으로는 TEOS 산화막, 열산화막, 저온산화막을 사용하였다. 기존 습식식각과 비교해 볼 때, 공정에 기인된 고착현강이나 잔류물질이 없는 미세구조체를 성공적으로 제작하였다.

• 센서학회지
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• 제1권2호
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• pp.165-172
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• 1992

3가와 5가 이온의 첨가가 전기전도도 및 감응도에 어떤 영향을 미치는가를 확인하기 위하여, In와 Sb를 Tin Oxide에 공침법으로 첨가하였다. Sb는 5가 이온으로 cassiterite 구조에 들어가서 열에너지에 의하여 이들 이온을 여기시켜 전도대로 밀어올리리라고 여겨진다. In 이온은 결정격자 속에 $In^{3+}$로 들어가서 원자가대로 부터 전자를 받게 되고 그러므로써 1가나 2가가 되리라 생각한다. 그러나, 이러한 현상들이 $SnO_{2}$에 존재하는 전위장벽을 2종의 이온첨가에 의하여 일어나는 resistivity에 끼치는 영향과 비교해 볼 때 감응도에는 어떤 영향을 보이는지 고찰하였다.