• Journal of Institute of Control, Robotics and Systems
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• v.15 no.9
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• pp.881-886
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• 2009

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

• Journal of the Korean Society for Nondestructive Testing
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• v.26 no.3
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• pp.162-168
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• 2006

Speckle interferometry with phase-shifting method has been applied to measurement of micro-scale displacement through optical signal processing. Four-step phase-shifting method by PZT is used to measure out-of-plane displacement in spot-welded cantilever and results of optical experiments are comparable to those of FEM. Phase-shifting method using Fourier transform by PZT is applied to measurement of in-plane displacement on rectangular steel plate with a circular hole. The results of optical experiment agree well with theoretical calculation. New phase-shifting method in speckle interferometry has been implemented with a quarter wave plate. In-plane displacement of specimen is measured by the new phase-shifting method. Results of optical experiment show that the quarter wave plate can be used for phase-shifting method that is cheap and easy to use in speckle interferometry.

• International Journal of Precision Engineering and Manufacturing
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• v.4 no.5
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• pp.41-46
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• 2003

Electronic Speckle Pattern Interferometry (ESPI) has been recently developed and widely used because it has the advantage of being able to measure surface deformations of engineering components and materials in industrial areas without contact. The speckle patterns formed with interference and scattering phenomena can measure not only the out-of-plane but also the in-plane deformations. Digital image equipment processes the information included in the speckle patterns and displays the consequent interferogram on a computer monitor. In this study, the experimental results of a canti-levered plate using ESPI were compared with those obtained from the simple beam theory. The ESPI results of the canti-levered plate, analyzed by 4-step phase shifting method, are close to the theoretical expectation. Similarly, out-of-plane displacements of a spot welded canti-levered plate were also measured by ESPI with 4-step phase shifting technique. The phase map of the spot welded canti-levered plate is quite different from that of the canti-levered plate without spot welding.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.9
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• pp.1905-1913
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• 2002

Using the finite element method, this study investigates the dynamic time responses of a flexible spinning disk of which axis of rotation is misaligned with the axis of symmetry. The misalignment between the axes of symmetry and rotation is one of the major vibration sources in optical disk drives such as CD-ROM, CD-R, CD-RW and DVD drives. Based upon the Kirchhoff plate theory and the von-Karman strain theory, three coupled equations of motion for the misaligned disk are obtained: two of the equations are for the in-plane motion while the other is for the out-of-plane motion. After transforming these equations into two weak forms for the in-plane and out-of-plane motions, the weak forms are discretized by using newly defined annular sector finite elements. Applying the generalized-$\alpha$ time integration method to the discretized equations, the time responses and the displacement distributions are computed and then the effects of the misalign ment on the responses and the distributions are analyzed. The computation results show that the misalignment has an influence on the magnitudes of the in-plane displacements and it results in the amplitude modulation or the beat phenomenon in the time responses of the out-of-plane displacement.

• Journal of Electrical Engineering and Technology
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• v.1 no.2
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• pp.263-267
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• 2006

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1286-1289
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• 2004

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene(PVDF-TrFE). The large difference of coefficient of thermal expansion(CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a large deflection with relatively small temperature rising. Compared to the most conventional micro actuators based on MEMS(micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. The proposed actuator can find applications where a large vertical displacement is needed while keeping compact overall device size, such as a micro zooming lens.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.6
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• pp.1382-1390
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• 1995

Electronic Speckle Pattern Interferometry (ESPI) with a CW laser, a video system and an image processor was utilized to measure the in-plane displacement. Unlike traditional strain gauges or Moire method. ESPI method measure the in-plane displacement on real time with out any surface preparation on surface attachment. The specimen has a crack of 10*0.1 mm in the middle of plate and strain gauge was also attached on that surface to compare with ESPI method. This study reveled the ESPI method to measure the displacement and distribution of strain in the specimen. It was shown in tensile tests that the measurement by ESPI method was comparable with strain gauge.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.5
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• pp.952-959
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• 2002

The natural frequencies of a flexible spinning disk misaligned with the axis of rotation are studied in an analytic manner. The effects of misalignment on the natural frequency need to be investigated, because the misalignment between the axis of symmetry and the axis of relation cannot be avoided in the removable disks such as CD-R, CD-RW or DVD disks. Assuming that the in -plane displacements are in steady state and the out-of-plane displacement is in dynamic state, the equations of motion are derived for the misaligned spinning disk. After the exact solutions are obtained fur the steady -state in-plane displacements, they are plugged into the equation for the dynamic-state out-of-plane motion. The resultant equation is a linear equation for the out -of-plane displacement, which is discretized by the Galerkin method. Based on the discretized dquations, the effects of the misalignment are analyzed on the vibration characteristics of the spinning disk, i.e., the natural frequencies and the critical speed.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11b
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• pp.817-825
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• 2001

The natural frequencies of a flexible spinning disk misaligned with the axis of rotation are studied in an analytic manner. The effects of misalignment on the natural frequency need to be investigated, because the misalignment between the axis of symmetry and the axis of rotation cannot be avoided in the removable disks such as CD-R, CD-RW or DVD disks. Assuming that the in-plane displacements are in steady state and the out-of-plane displacement is in dynamic state, the equations of motion are derived for the misaligned spinning disk. After the exact solutions are obtained for the steady-state in-plane displacements, they are plugged into the equation for the dynamic-state out-of-plane motion. The resultant equation is a linear equation for the out-of-plane displacement, which is discretized by the Galerkin method. Based on the discretized equations, the effects of the misalignment are analyzed on the vibration characteristics of the spinning disk, i.e., the natural frequencies and the critical speed

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.226-230
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• 2001

Electronic Speckle Pattern Interferometry (ESPI) has been recently developed and widely used because it has advantage to be able to measure surface deformations of engineering components and materials in industrial areas with non-contact. The spekle patterns to be formed with interference phenomena of scattering phenomena measure the out-of-plane deformations, together with the use of digital image equipment to process the informations included in the speckle patterns and the display consequent interferogram on a computer monitor. In this study, the experimental results of a canti-levered plate using ESPI were compared with those obtained from the simple beam theory. The ESPI results of the canti-levered plate analyzed by 4-step phase shifting method are close to the theoretical expectation. Also, out-0of-plane displacements of a spot welded canti-levered plate were measured by ESPI with 4-step phase shifting technique. The phase map of the spot welded canti-levered plate is quite different from that of the canti-levered plate without spot welding.