• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.261-261
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• 2011

펄스 직류 전원 $BCl_3/SF_6$ 플라즈마를 이용하여 GaAs/$Al_{0.2}Ga_{0.8}As$의 선택적 식각을 연구하였다. 식각 주요 공정 변수는 $BCl_3/SF_6$ 플라즈마에서 $SF_6$ 가스 유량(0~50%)이었다. $BCl_3/SF_6$의 총 가스 유량은 20 sccm이었다. 다른 공정 조건인 공정 압력(100 mTorr), 펄스 파워(500 V), 펄스 주파수(200 kHz), 리버스 시간 (0.7 ${\mu}s$)은 일정하게 고정시켰으며 기계적 펌프만을 이용하여 공정을 진행하였다. 오실로스코프(Oscilloscope) 데이터에 의하면 가스의 조성 변화에도 척에 걸리는 입력 전압과 전류가 거의 변화가 없었다. $BCl_3/SF_6$ 가스가 10%의 조성에서 GaAs와 $Al_{0.2}Ga_{0.8}As$의 식각 선택비가 약 48 : 1로 우수한 결과를 나타내었다. 그러나 $BCl_3/SF_6$ 가스의 증가는 GaAs의 식각율과 선택도를 감소시켰다. 그리고 $SF_6$ 가스의 조성비가 30% 이상일 경우에는 GaAs와 $Al_{0.2}Ga_{0.8}As$가 식각되지 않았다. 식각 후에 GaAs의 표면 거칠기(RMS surface roughness)는 0.7~1.3 nm로 나타났다. 위의 결과들을 종합적으로 보면 펄스 직류 전원 $BCl_3/SF_6$의 조성비가 10%일 때 가장 좋은 식각 선택비를 얻을 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.30-30
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• 2011

The wave-cutoff tool is a new diagnostic method to measure electron density and electron temperature. Most of the plasma diagnostic tools have the disadvantage that their application to processing plasma where toxic and reactive gases are used gives rise to many problems such as contamination, perturbation, precision of measurement, and so on. We can minimize these problems by using the wave-cutoff method. Here, we will present the results obtained through the development of the wave-cutoff diagnostic method. The frequency spectrum characteristics of the wave-cutoff probe will be obtained experimentally and analyzed through the microwave field simulation by using the CST-MW studio simulator. The plasma parameters are measured with the wave-cutoff method in various discharge conditions and its results will be compared with the results of Langmuir probe. Another disadvantage is that other diagnostic methods spend a long time (~ a few seconds) to measure plasma parameters. In this presentation, a fast measurement method will be also introduced. The wave-cutoff probe system consists of two antennas and a network analyzer. The network analyzer provides the transmission spectrum and the reflection spectrum by frequency sweeping. The plasma parameters such as electron density and electron temperature are obtained through these spectra. The frequency sweeping time, the time resolution of the wave-cutoff method, is about 1 second. A short pulse with a broad band spectrum of a few GHz is used with an oscilloscope to acquire the spectra data in a short time. The data acquisition time can be reduced with this method. Here, the plasma parameter measurement methods, Langmuir probe, pulsed wave-cutoff method and frequency sweeping wave-cutoff method, are compared. The measurement results are well matched. The real time resolution is less than 1 ?sec. The pulsed wave-cutoff technique is found to be very useful in the transient plasmas such as pulsed plasma and tokamak edge plasma.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.55 no.10
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• pp.435-442
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• 2006

One of the most important topics about the safety of electrical and electronic system is the reliability of the wiring system. The Time-Frequency Domain Reflectometry(TFDR) is a state-of-the-art system for detecting and estimating of the fault on a wiring. In this paper, We've considered the load resistance measurement on a coaxial cable using TFDR in a way of expanded application. The TFDR system was built using commercial Pci extensions for Instrumentation(PXI) and LabVIEW. The proposed real time TFDR system consisted of the reference signal design, signal generation, signal acquisition, algorithm execution and results display part. To implement real time system, all of the parts were programmed by the LabVIEW which is one of the graphical programming languages. Using the application software implemented by the LabVIEW, we were able to design a proper reference signal which is suitable for target cable and control not only the arbitrary waveform generator in the signal generation part but alto the digital storage oscilloscope in the signal acquisition part. By using the TFDR real time system with the terminal resistor on the target cable, we carried out load impedance measurement experiments. The experimental results showed that the proposed system are able not only to detect the location of impedance discontinuity on the cable but also to estimate the load resistance with high accuracy.

• Applied Microscopy
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• v.34 no.1
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• pp.51-59
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• 2004

The high acceleration voltage system used in scanning electron microscope were designed and manufactured to test its stability. The Cockcroft-Walton circuits are used both in the cathode voltage up to -30 kV and in the Wehnelt cylinder of -2 kV. The operating voltage of 6 V was applied to the heating of the filament. The wave forms which are formed in the second leg of the high voltage transformer were observed in the oscilloscope with 2 V of DC input. When the high voltages were in the range between 5 kV and 12 kV, the highest value of the stabilities of the generated voltages was obtained as 0.002%.

• Journal of the korean academy of Pediatric Dentistry
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• v.23 no.2
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• pp.525-536
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• 1996

The purpose of this study was to investigate the effect of electrical anesthesia induced by non-acupuncture point stimulation on inhibition of amplitude of digastric EMG evoked by noxious electrical stimuli in teeth and gingiva. Experiments were performed with dogs anesthetized with intraperitoneal pentobarbital sodium in an initial dose of 30mg/kg. Maintenance doses of 4.0ml/hour were given through a cannula in the femoral vein using a constant infusion pump. Anterior belly of digastric muscle was exposed and a pair of 0.1mm wire electrodes were inserted for E.M.G. recording. Bipolar electrodes were inserted into the labial and lingual surface of upper canine and the labial area of upper gingiva. Noxious stimuli were delivered to the tooth and gingiva through those electrodes by electric stimulator. Non-acupuncture point stimulation of 2Hz was delivered bilaterally to the femoral area. Amplitudes of digastric E.M.G. were measured from the oscilloscope and the monitor connected to amplifier at different intensities of electronic anesthesia of 1 volt, 4 volt and 10 volt. The inhibited rate of the amplitudes of digastric E.M.G. were analysed statistically with paired t-test. The following results were obtained : 1. Non-acupuncture point stimulation with intensities of 1 volt, 4 volt and 10 volt showed the inhibitory effect on pain of 15%, 25% and 16% in teeth and 15%, 18% and 12% in gingiva respectively 2. In tooth, statistical significance was observed between control and each group. In gingiva, there was statistical significance between control and group 1, 2 except group 3 From these results, low frequency electrical stimulation of non-acupuncture point resulted in reducing of dental and gingival pain, it could be used as adjunct to other pain control methods.

• The Journal of Korean Association of Computer Education
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• v.10 no.6
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• pp.69-77
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• 2007

In this paper we implement main functions of electronic measuring devices, which are essential to design electric/electronic virtual laboratories on the Web. The implemented virtual electronic measuring devices such as virtual analog multimeter(VAM), virtual function generator(VFG), virtual oscilloscope(VOSC) enable the learners to perform the virtual experiments on the Web by simple mouse clicks. In order to show their validity virtual experiments for understanding how to use them are designed. The virtual experiments for measuring resistance(OHM), AC/DC Voltage(ACV/DCV) and DC Current(DCA) by the VAM are illustrated. In addition, the learners can change the frequency of the signal generated from the VFG and measure by the VOSC several types of the signals generated from the VFG such as triangular, pulse, sinusoidal waveforms. The VOSC can measure voltage and current through two channels of it and provide the learners with additional functions such as zooming, trigger, cursor, summing of waveforms. Since the virtual electronic measuring devices have been implemented as forms of Java classes, various types of applications are available according to the structures of virtual laboratories.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.23 no.11
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• pp.1315-1322
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• 2012

Frequency domain reflectometry diagnoses faults on electric cables by measuring the cable impedance. Time domain impedance measurement technique using an oscilloscope instead of a network analyzer is widely used for electric power cables under harsh environment or powered condition. However, impedance measurement in the time domain shows inaccuracy as the frequency increases due to several parasitic impedances, which results in the poor resolution of fault points. This paper presents the accuracy enhancement technique using a module with an operational amplifier and an error calibration method in the time domain impedance measurements, which is confirmed by comparing the cable impedance measurement results.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2004.04a
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• pp.135-138
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• 2004

Conventional piezoelectric lead-zirconate-titanate (PZT) senor has high sensitivity, but it is very brittle. Recently polymer films such as polyvinylidene fluoride (PVDF) and poly(vinylidene fluoride­trifluoroethylene) (P(VDF-TrFE)) copolymer have been used as a sensor. The advantages of polymer sensor are the flexibility and mechanical toughness. Simple process and possible several shapes are also additional advantages. Polymer sensor can be directly embedded in a structure. In this study, nondestructive damage sensitivity of single basalt fiber/epoxy composites was investigated with sensor type and thermal damage using AE and oscilloscope. And AE waveform for epoxy matrix with various damage types was compared to each other. The damage sensitivity of two polymer sensors was rather lower than that of PZT sensor. The damage sensitivity of PVDF sensor did not decrease until thermal damage temperature at $80^{\circ}C$ and they decreased significantly at $110^{\circ}C$ However, the damage sensitivity of P(VDF-TrFE) sensor at $110^{\circ}C$ was almost same in no damage sensor. For both top and side impacts, the difference in arrival time increased with increasing internal and surface damage density of epoxy matrix.

• Progress in Medical Physics
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• v.9 no.2
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• pp.95-104
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• 1998

The dynamic properties of the 3rd-order neuron of the retina was investigated by using conventional intracellular recording techniques. Experiments were performed in the superfused retina-eyecup preparation of the channel catfish, Ictalurus punctatus. The cornea, iris, lens, and vitreous were removed by absorption with Kimwipe tissue under the dissection microscope thereby exposing the retina in a hemi -eyecup. The electrical signal was amplified by electrometer, viewed on oscilloscope. Regular signals from the cells were recorded on a penwriter and stored by data recorder and computer. Full-field, spot or annular light stimuli were generated on a computer monitor and focused onto the retina. Baclofen hyperpolarized the dark membrane potential, suppressed sustained component and enhanced transient component of the ON-sustained cell with a large transient component, but did not affect the surround antagonism of the cell. Baclofen selectively suppressed responses evoked by moving bar light stimuli on the ON-OFF transient cell. The results suggest that transient cells have directional selectivity in the inner retina. These dynamic properties of amacrine and ganglion cells were modulated by baclofen. Therefore, it is presumed that there is baclofen-induced directional selectivity in ON-OFF transient cells in the catfish retina.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.23 no.8
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• pp.967-975
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• 2012

This paper presents a method to measure reflection coefficients of microwave devices or antennas based on time domain analysis with sampling oscilloscopes. The reflection coefficients were extracted by the Fourier transformation of echo pulses from devices with respect to the 20 GHz incident pulse signals. The three-error terms, which are commonly used for the correction of a microwave network, were determined using a 3.5 mm calibration kit. In addition, a modified error-correction model associated with a directional coupler for reflection coefficient measurements is introduced. The results were compared with those of measured with a commercial vector network analyzer.