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CMP process monitoring system using AE sensor (AE를 이용한 CMP 공정 감시에 관한 연구)

  • Park, Sun-Joon;Kim, Sung-Ryul;Park, Boum-Young;Lee, Hyun-Seop;Jeong, Hea-Do
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.51-52
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    • 2007
  • This paper compared wired Acoustic Emission (AE) signals with wireless AE signals. According to the material and process condition, each process signal has distinguishable characteristic to show each removal phenomenon. Therefore, wired and wireless AE sensors having different bandwidth are complementary for CMP process monitoring. Especially, the AE sensor was used to investigate abrasive and molecular-scale phenomena during CMP process, which was compatible to acquire high level frequency. In experiment, wireless AE system was used to get signals in rotary system, using bluetooth. But, it is possible to acquire only RMS signals, which can not analyze abrasive and molecular-sale phenomena. Second, wired AE system was installed using mercury slip-ring, which is suitable not only for rotation equipment but also for acquiring original signals. The acquired signals were analyzed by FFT for understanding of abrasive and molecular revel phenomena in CMP process, finally, we verified that two types of AE sensor with different bandwidth were complementary for CMP process monitoring.

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Development of Microstructures and Mechanical Properties in Differential Speed Rolled Ni-30Cr Alloy (이주속압연된 Ni-30Cr 합금의 미세조직과 기계적 특성 발달)

  • Im, Yong-Deok;Park, Hyung-Ki;Song, Kuk-Hyun
    • Korean Journal of Materials Research
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    • v.25 no.3
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    • pp.149-154
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    • 2015
  • We evaluated the developed microstructures and mechanical properties of a severely plastically deformed Ni-30Cr alloy. Normal rolling and differential speed rolling were used as deformation processes, and the thicknesses of the specimens were reduced to 68 % of the original thickness after holding at $700^{\circ}C$ for 10 min and annealing at $700^{\circ}C$ for 40 min to obtain a fully recrystallized microstructure. Electron backscattering diffraction was used to analyze the characteristic distribution of the grain boundaries on the deformed and annealed specimens. Differential speed rolling was more effective for refining grains in comparison with normal rolling. The grain size was refined from 33 mm in the initial material to 8.1 mm with normal rolling and 5.5 mm with differential speed rolling. The more refined grain in the differential-speed-rolled material directly resulted in increases in the yield and tensile strengths by 68 % and 9.0%, respectively, compared to normal rolling. We systematically explain the relationship between the grain refinement and mechanical properties through a plastically deformed Ni-30Cr alloy based on the development of a deformation texture. The results of our study show that the DSR process is very effective when used to enhance the mechanical properties of a material through grain refinement.

An Application of Smart Composite for Health Monitoring (Health Monitoring을 위한 스마트 복합재료의 적용)

  • Lee, Jin-Kyung;Ha, Young-Joon;Park, Young-Chul;Lee, Joon-Hyun;Lee, Sang-Pill
    • Journal of the Korean Society for Nondestructive Testing
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    • v.27 no.4
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    • pp.328-338
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    • 2007
  • One of main advantages of composite using smart material as reinforcement can be controlled cracks behavior inside the composite. If the smart composite is applied as part of the structure, the use of the shape memory effect of the smart material is the best way to protect the propagation of cracks generated in the structure while use. In this study, the optical manufacturing conditions for the smart composite were derived. In order to evaluate the shape memory effect by shape memory alloy, the tensile load was applied to the smart composite and stress distribution was inspected. And then, the smart composite was heated to a certain temperature and the shape memory alloy would shrink to the original shape. Finally, at this point the recovering status of stress using photoelastic instrument was discussed.

A Study for Materials Collaboration between the Methodist Church Organizations (감리교 기관의 자료 협력을 위한 연구)

  • Park, Hyun-Young;Nam, Tae-Woo
    • Journal of Information Management
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    • v.41 no.4
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    • pp.119-140
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    • 2010
  • Methodist church materials are classified with three types, centered on the organizations manufacturing and holding materials such as 1) 'materials of the Methodist headquarter' governing all of the Methodist churches in Korea, 2) 'materials of theological seminary libraries' holding academic study books related to theology, and 3) 'materials manufactured in individual churches'. In this manner, the Methodist church materials imply homogeneity in theme, but the materials have identity from each other, because organizations are different each other, too. By a characteristic of each organizations, to use Methodist church document done a director of each organization is demanded collaboration between the material departments of each organizations, this study intends to analysis material department operation status of three Methodist church organizations. As a result of analysis, it is necessary to perform the prior tasks, such as reconstructing organization to accomplish an original function of the Methodist headquarter, developing operation regulation classified with the Methodist church group, and constructing material management system.

Structural evaluation of all-GFRP cable-stayed footbridge after 20 years of service life

  • Gorski, Piotr;Stankiewicz, Beata;Tatara, Marcin
    • Steel and Composite Structures
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    • v.29 no.4
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    • pp.527-544
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    • 2018
  • The paper presents the study on a change in modal parameters and structural stiffness of cable-stayed Fiberline Bridge made entirely of Glass Fiber Reinforced Polymer (GFRP) composite used for 20 years in the fjord area of Kolding, Denmark. Due to this specific location the bridge structure was subjected to natural aging in harsh environmental conditions. The flexural properties of the pultruded GFRP profiles acquired from the analyzed footbridge in 1997 and 2012 were determined through three-point bending tests. It was found that the Young's modulus increased by approximately 9%. Moreover, the influence of the temperature on the storage and loss modulus of GFRP material acquired from the Fiberline Bridge was studied by the dynamic mechanical analysis. The good thermal stability in potential real temperatures was found. The natural vibration frequencies and mode shapes of the bridge for its original state were evaluated through the application of the Finite Element (FE) method. The initial FE model was created using the real geometrical and material data obtained from both the design data and flexural test results performed in 1997 for the intact composite GFRP material. Full scale experimental investigations of the free-decay response under human jumping for the experimental state were carried out applying accelerometers. Seven natural frequencies, corresponding mode shapes and damping ratios were identified. The numerical and experimental results were compared. Based on the difference in the fundamental natural frequency it was again confirmed that the structural stiffness of the bridge increased by about 9% after 20 years of service life. Data collected from this study were used to validate the assumed FE model. It can be concluded that the updated FE model accurately reproduces the dynamic behavior of the bridge and can be used as a proper baseline model for the long-term monitoring to evaluate the overall structural response under service loads. The obtained results provided a relevant data for the structural health monitoring of all-GFRP bridge.

Ru-NiOx nanohybrids on TiO2 support prepared by impregnation-reduction method for efficient hydrogenation of lactose to lactitol

  • Mishra, Dinesh Kumar;Dabbawala, Aasif A.;Truong, Cong Chien;Alhassan, Saeed M.;Jegal, Jonggeon;Hwang, Jin Soo
    • Journal of Industrial and Engineering Chemistry
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    • v.68
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    • pp.325-334
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    • 2018
  • Lactose is a reducing disaccharide consisting of two different monosaccharides such as galactose and glucose. The hydrogenation of lactose to lactitol is a formidable challenge because it is a complex process and several side products are formed. In this work, we synthesized Ru-Ni bimetallic nanohybrids as efficient catalysts for selective lactose hydrogenation to give selective lactitol. Ru-Ni bimetallic nanohybrids with $Ru-NiO_x$ (x = 1, 5, and 10 wt%) are prepared by impregnating Ru and Ni salts precursors with $TiO_2$ used as support material. Ru-Ni bimetallic nanohybrids (represented as $5Ru-5NiO/TiO_2$) catalyst is found to exhibit the remarkably high selectivity of lactitol (99.4%) and turnover frequency i.e. ($374h^{-1}$). In contrast, monometallic $Ru/TiO_2$ catalyst shows poor performance with ($TOF=251h^{-1}$). The detailed characterizations confirmed a strong interaction between Ru and NiO species, demonstrating a synergistic effect on the improvement on lactitol selectivity. The impregnation-reduction method for the preparation of bimetallic $Ru-NiO/TiO_2$ catalyst promoted Ru nanoparticles dispersed on NiO and intensified the interaction between Ru and NiO species. $Ru-NiO/TiO_2$ efficiently catalyzed the hydrogenation of lactose to lactitol with high yield/selectivity at almost complete conversion of lactose at $120^{\circ}C$ and 55 bar of hydrogen ($H_2$) pressure. Moreover, $Ru-NiO/TiO_2$ catalyst could also be easily recovered and reused up to four runs without notable change in original activity.

A Study of Wedding Dress Materials Using the Characteristics of Hanji: Focusing on Making Minimal Wedding Dresses (한지의 특성을 이용한 웨딩드레스 소재 연구: 미니멀 웨딩드레스 제작을 중심으로)

  • Lee, Jihyun;Kan, Hosup
    • Journal of Fashion Business
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    • v.25 no.1
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    • pp.80-95
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    • 2021
  • In the modern fashion industry, the application of different materials along with an emotional design is emerging as an important factor stimulating consumer sentiment. This has led to the diversity of materials and continued active research on materials. Traditional Korean paper is expressed in various ways in the field of visual arts based on Korean sentiment and unique formative characteristics. Hanji costumes have been produced in various ways over the past 20 years utilizing Hanji's physical characteristics, showing unique surface texture and various techniques that differentiate them from existing fabrics, making it symbolic in expanding the area of fashion materials. In this work, various techniques were developed by utilizing the nonwoven characteristics and excellent variability of Hanji while considering visual images, focusing on the delicate decorations and materialistic representations of wedding dresses. In addition, minimal wedding dresses with unique textures were produced to realize fantasy ideas and show surface aesthetics, confirming as a fashion material different from that of existing wedding dresses. The direction of high value-added creation for the industrialization and globalization of Hanji wedding dresses was presented, and the usefulness and scalability of Hanji materials for practical and industrialization were identified in materials that expressed visual art. To in the fashion industry, which is changing in both the wedding industry and the global market, the development of materials with high sensitivity images and original and solid identity should continue.

Construction and Analysis of Food-Grade Lactobacillus kefiranofaciens β-Galactosidase Overexpression System

  • He, Xi;Luan, MingJian;Han, Ning;Wang, Ting;Zhao, Xiangzhong;Yao, Yanyan
    • Journal of Microbiology and Biotechnology
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    • v.31 no.4
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    • pp.550-558
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    • 2021
  • Lactobacillus kefiranofaciens contains two types of β-galactosidase, LacLM and LacZ, belonging to different glycoside hydrolase families. The difference in function between them has been unclear so far for practical application. In this study, LacLM and LacZ from L. kefiranofaciens ATCC51647 were cloned into constitutive lactobacillal expression vector pMG36e, respectively. Furtherly, pMG36n-lacs was constructed from pMG36e-lacs by replacing erythromycin with nisin as selective marker for food-grade expressing systems in Lactobacillus plantarum WCFS1, designated recombinant LacLM and LacZ respectively. The results from hydrolysis of o-nitrophenyl-β-galactopyranoside (ONPG) showed that the β-galactosidases activity of the recombinant LacLM and LacZ was 1460% and 670% higher than that of the original L. kefiranofaciens. Moreover, the lactose hydrolytic activity of recombinant LacLM was higher than that of LacZ in milk. Nevertheless, compare to LacZ, in 25% lactose solution the galacto-oligosaccharides (GOS) production of recombinant LacLM was lower. Therefore, two β-galactopyranosides could play different roles in carbohydrate metabolism of L. kefiranofaciens. In addition, the maximal growth rate of two recombinant strains were evaluated with different temperature level and nisin concentration in fermentation assay for practical purpose. The results displayed that 37℃ and 20-40 U/ml nisin were the optimal fermentation conditions for the growth of recombinant β-galactosidase strains. Altogether the food-grade Expression system of recombinant β-galactosidase was feasible for applications in the food and dairy industry.

The Conservation Treatment for the Mattress from National Folklore Cultural Heritage, the Red-lacquered Furniture with Inlaid Mother-of-pearl Design Used by Empress Sunjeonghyo and Comparative Study of Manufacturing Techniques (국가민속문화재 전 순정효황후 주칠 나전가구(傳 純貞孝皇后 朱漆 螺鈿家具) 매트리스의 보존처리 및 제작 기법 비교)

  • Park, Hyungho;Kim, Jongsu;Kim, Suchul;Keum, Jongsuk;Jang, Jongmin;Kim, Suha;Park, Changyuel
    • Korean Journal of Heritage: History & Science
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    • v.54 no.1
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    • pp.220-237
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    • 2021
  • This study carried out the conservation treatment for the mattress put on the bed, which is one of 4 items in National Folklore Cultural Heritage, the Red-lacquered Furniture with the inlaid mother-of-pearl design used by Empress Sunjeonghyo (presumed), after identifying the characteristics of the manufacturing techniques and the used materials. And the study intends to compare it with the mattress placed in the Daejojeong in the Changdeokgung Palace in order to identify the characteristics of mattresses domestically used during the 1920s and 1930s. From the analysis of the mattress presumably used by Empress Sunjeonghyo, it was identified that the mattress frame was made of pinaceous hemlock spruce while the webbing and twine in the structural parts were made of jute. The findings are as follows: the burlap had a filling material that was made of jute; the straw mat was made from Oryza; and, the rest of the filling material was cotton. Rayon was used for the top cover while cotton was used for the bottom. As a result of research on the materials and the inner structure, it was found that mattress was manufactured in the form of the upholstery style mainly found in chairs and day-beds in Western furniture. Based on analysis results, materials identical to the original were adopted during the conservation treatment. Next, the process of dismantling, cleaning, repair, reinforcement and assembling was conducted. During the dismantling process, the top cover was newly discovered and some letters (Yokohama, Kobe, and Joseon) were found in the burlap filling, but there was no trace which can clarify its maker or production place. dry cleaning was carried out on the structural parts, filling materials, and the cover, and then the repair and reinforcement were done, preserving the existing materials in the upholstery structure and using the same materials for conservation. The webbing in the structural parts was reinforced using materials identical to the original, and the twine was used for arranging and fixing the springs into wooden frames. For the damaged cotton cloth and burlap, reinforcement materials identical to the original were put over it and sown. For the damaged area of the top cover, reinforcement cloth was cut and then added inside and the damaged area was sown. Assembling was carried out in the reverse order of the dismantling. After the burlap identical to the original material was inserted into the areas in contact with the springs and then fastened, a filling pad, reinforcement cloth, a straw mat, cotton cloth, cotton felt, wide cotton cloth for protecting the cover, and the cover were layered and fastened with tacks. The two mattresses used by Empress Sunjeonghyo differed only by the period of production and followed the same Western upholstery style consisting of the frames, filling materials, and covers. During the conservation treatment process, a velvet cover was newly discovered and the traces of repair in the past were found. Furthermore, identifying straw mats, straw bags, and straws for filling material, this study confirmed changes in the materials used according to the production environment. In the future, it is expected to see changes in the conservation materials during the conservation treatment and manufacturing techniques used for chairs and sofas in the upholstery style belonging to the modern cultural artifacts.

Annealing Behavior of Pretilt Angles on Polyimide Surface with Rubbing and Ion Beam Irradiation

  • Lee, Sang-Keuk;Lim, Ji-Hun;Oh, Byeong-Yun;Kim, Young-Hwan;Han, Jeong-Min;Seo, Dae-Shik
    • Transactions on Electrical and Electronic Materials
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    • v.9 no.6
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    • pp.243-246
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    • 2008
  • We have studied the liquid crystal (LC) alignment, the pretilt angle generation, and the annealing behavior for a nematic liquid crystal (NLC) on the homogeneous polyimide (PI) surfaces by using the rubbing method and the ion beam (IB) method. An excellent LC alignment of the NLC on the PI surface with rubbing and IB irradiation were observed. The pretilt angle of NLC on the homogeneous PI surface for the rubbing method is decreased from $4.5^{\circ}$ to $3.5^{\circ}$ as rubbing time is increased, that of the for the IB irradiation method is decreased from $0.5^{\circ}$ to $0.1^{\circ}$ as the time of IB irradiation is increased. After the annealing, the pretilt angles of the rubbed PI surfaces increased up to $4^{\circ}$, these of the IB irradiated PI surfaces little increased. It is considered the side chain of the rubbed PI show the its abilities of the original capacities, while the side chain of the IB irradiated PI cannot show the its abilities of the original capacities due to the IB has already destroyed the side chain of the PI.