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[ $SiO_2$ ] CMP Characteristic by Additive (첨가제에 따른 $SiO_2$ CMP 특성)

  • Lee, Woo-Sun;Ko, Pi-Ju;Choi, Kwon-Woo;Shin, Jae-Wook;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.378-381
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    • 2003
  • The chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing However, cost of ownership (COO) and cost of consumables (COC) were relatively increased because of expensive slurry. In this paper, the effects of different slurry composition on the oxide CMP characteristics were investigated to obtain the higher removal rate and lower non-uniformity. We prepared the various kinds of slurry. In order to save the costs of slurry, the original slurry was diluted by de-ionized water (DIW). And then, alunima abrasives were added in the diluted slurry in order to promote the mechanical force of diluted slurry.

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Fault Diagnosis System for Traction Motor in Electric Multiple Unit (전동차 견인전동기 고장진단시스템)

  • Park, Hyun-June;Jang, Dong-Uk;Lee, Gil-Hun;Choi, Jong-Sun;Kim, Jung-Soo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.518-521
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    • 2003
  • A new measurement system was developed by fault diagnosis system for traction motor using current signal analysis. The motor current signature analysis method is used for traction motor fault diagnosis. The diagnosis system program is constructed by artificial neural networks algorithm, those results from the program are used to train neural networks. The trained neural networks have the ability to compute adaptive results for non-trained inputs, and to calculate very fast due to original parallel structure of neural networks with high accuracy within destined tolerance. This system suggested that available test for checking, the probable extent of aging, and the rate of which aging is taking place.

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Change of Properties by Environment Conditions in Aged ACSR Overhead Conductor (환경적 요인에 의한 노후 가공송전선의 특성변화)

  • Kim Shang-Shu;Kim Byung-Geol;Jang Tae-In;Kang Ji-Won;Lee Dong-Il;Min Byung-Uk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.3
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    • pp.287-291
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    • 2006
  • This paper describes mechanical and electric properties of ACSR $410\;mm^2$ conductor from many of older overhead conductor. Samples of conductors itemized two division according to operation sector, green area, salt and pollution area. Samples of conductors operated various environment conditions have undergone laboratory metallurigical investigation and tensile strength torsional ductility and electrical performance. The steel core were found to have retained their original properties to a large degree in both tensile strength and the number of turns to failure. On the other hand the aluminum conductor showed reductions in tensile strength. To determine the remaining useful life of aged conductor, an unacceptable deterioration level has to established for each diagnostic procedure.

Chemical Mechanical Polishing Characteristics of Mixed Abrasive Slurry by Adding of Alumina Abrasive in Diluted Silica Slurry (탈이온수로 희석된 실리카 슬러리에 알루미나 연마제가 첨가된 혼합 연마제 슬러리의 CMP 특성)

  • 서용진;박창준;최운식;김상용;박진성;이우선
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.6
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    • pp.465-470
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    • 2003
  • The chemical mechanical polishing (CMP) process has been widely used for the global planarization of multi-layer structures in semiconductor manufacturing. The CMP process can be optimized by several parameters such as equipment, consumables (pad, backing film and slurry), process variables and post-CMP cleaning. However, the COO(cost of ownership) is very high, because of high consumable cost. Especially, among the consumables, the slurry dominates more than 40 %. In this paper, we have studied the CMP characteristics of diluted silica slurry by adding of raw alumina abrasives and annealed alumina abrasives. As an experimental result, we obtained the comparable slurry characteristics compared with original silica slurry in the view-point of high removal rate and low non-uniformity. Therefore, we can reduce the cost of consumables(COC) of CMP process for ULSI applications.

Switching Characteristics Enhancement of PT type Power Diodes by means of Particle Irradiation (입자 조사에 의한 PT형 전력 다이오드의 스위칭 특성 향상)

  • Kim, Byoung-Gil;Choi, Sung-Hwan;Lee, Jong-Hun;Bae, Young-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.16-17
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    • 2005
  • Local lifetime control by ion implantation has become an useful tool for production of modern power devices. In this work, punch-through diodes were irradiated with protons for the high speed power diode fabrication. Proton irradiation was executed at the various energy and dose conditions. Characterization of the device was performed by I-V, C-V and Trr measurement. We obtained enhanced reverse recovery time characteristics which was about 45% of original device and about 73% of electron irradiated device. The measurement results showed that proton irradiation was able to effectively reduce minority carrier lifetime.

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Switching Characteristics Enhancement of PT Type Power Diode using Proton Irradiation Technique (양성자 주입기술을 이용한 PT형 전력다이오드의 스위칭 특성 향상)

  • Kim Byoung-Gil;Choi Sung-Hwan;Lee Jong-Hun;Bae Young-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.3
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    • pp.216-221
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    • 2006
  • Lifetime control technique by proton implantation has become an useful tool for production of modern power devices. In this work, punch-through type diodes were irradiated with protons for the high speed power diode fabrication. Proton irradiation which was capable of controlling carrier's lifetime locally was carried out at the various energy and dose conditions. Characterization of the device was performed by current-voltage, capacitance-voltage and reverse recovery time measurement. We obtained enhanced reverse recovery time characteristics which was about $45\;\%$ of original device reverse recovery time and about $73\;\%$ of electron irradiated device reverse recovery time. The measurement results showed that proton irradiation technique was able to effectively reduce minority carrier lifetime without degrading the other characteristics.

A Study on the Mechanical Properties of Nuclear Fuel Cladding Materials (원자로용 핵연료 피복재의 인장특성에 관한 연구)

  • Bae, Bong-Kook;Song, Chun-Ho;Seok, Chang-Sung
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.2
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    • pp.231-238
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    • 2003
  • The fuel of light water reactor is used for several years under high temperature and pressure, so it needs to be clad with high corrosion resistance material. The cladding materials must have the characteristics of low absorption of a neutron and high corrosion resistance. Zircaloy-2 in Boiling Water Reactor, Zircaloy-4 in Pressurized Water Reactor have been used as cladding materials and Zirlo has been developed as the material for preventing the corrosion. If the fracture of the cladding tube occurs during operation, it will cause the economic loss to shut down and replace the system. So it is needed to evaluate the integrity of the cladding materials. In this paper, the tensile characteristics of the cladding materials were investigated for the basic research of fracture characteristics. Also the residual stress was analyzed to compare the tube type(original type) specimen and the flattened type specimen.

Incombustibility and Freezing-Thawing Resistance of Lightweight Polymer Concrete (경량 폴리머 콘크리트의 난연성 및 동결융해 저항성)

  • 채경희;최예환;연규석;이윤수;주명기
    • Magazine of the Korean Society of Agricultural Engineers
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    • v.45 no.1
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    • pp.45-54
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    • 2003
  • The effects of binder content and silica sand content on the durability characteristics of lightweight polymer concretes are examined. As a result, the flame lingering times using unsaturated polyester resin and non-combustible polyester resin were 60∼120 and 0∼4 seconds respectively, and the combustion lengths were 9∼11 mm and 0∼3 mm, respectively. Thus it is believed that the lightweight polymer concrete was incombustible and the light weight polymer concrete in which non-combustible material was added was perfectly non-combustible. The percent of original mass of lightweight polymer concrete, according to the freezing-thawing experiment, was below 0.3 %, which was much less than that of cement concrete. The pluse velocity, for the case of the binder content 28 %, showed the minimum decreasing rate for the lightweight polymer concrete with silica sand content of 50 %. The higher the binder content, the greater the durability. That is much higher than other material and believed that the freezing-thawing was suppressed by a low absorption.

Design of automotive inner panel by sectional forming analysis (단면성형 해석에 의한 자동차 내부 판넬의 설계)

  • 금영탁;왕노만
    • Journal of the korean Society of Automotive Engineers
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    • v.12 no.6
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    • pp.48-59
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    • 1990
  • A finite element program was developed using line elements for simulating the stretch/draw forming operation of an arbitrarily-shaped plane-strain section. An implicit, incremental, updated Lagrangian formulation is employed, introducing a minimum plastic work path assumption for each time step. Geometric and material nonlinearities are also considered within each time step. The finite element equation is based on the mesh-normal, which compatibly describes arbitrary tool surfaces and FEM meshes without depending on the explicit spatial derivatives of tool surfaces. The membrane approximation is adopted under the plane stress assumption. The sheet material is assumed to obey a rigid-viscoplastic constitutive law. The developed program was tested in the die-tryout of typical automotive inner panels. In order to determine a single friction coefficient and boundary length, FEM results and measurements of thinning for a stretched section of final die were compared. After finding analysis parameters, the sheet forming operations of original and final die designs were simulated. Excellent agreement between measured and computed thickness strains was obtained and the developed program was able to identify die designs which were rejected during die tryout.

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The Effect on the Streaming Electrification of Insulating Oils with Impurity (변압기유의 불순물에 따른 유동대전 영향)

  • 이용우;이광석;송병기;김왕곤;홍진웅
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1996.11a
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    • pp.329-333
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    • 1996
  • In this Paper, the streaming electrification of transformer oils generated at the interface of transformer oils and the AC breakdown with impurity is studied. The electrification current is measured by the electrometer connected the faraday cage. And a oil velocity is maintained equally. In case of the AC breakdown test, the temperature are 30[$^{\circ}C$], 50[$^{\circ}C$], 80[$^{\circ}C$] and 90[$^{\circ}C$], repetitively. As a result of breakdown experiment, the dielectric breakdown strength is decreased in low temperature region and is increased in high temperature region according to increase of contained sodium. In case of streaming electrification experiment, the streaming current is more increased with the specimen contained sodium than the original specimen.

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