• 한국산업보건학회지
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• 제16권3호
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• pp.233-244
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• 2006

Of many volatile organic detergents for metals, benzine(CAS No. 8030-30-6), of which the toxicity has not yet been proven, has been used as an alternative of the halide compounds in the consideration of toxic effects, global warming and the destruction of ozone layer. In order to evaluate the effects of the benzine on human body by investigating the subchronic inhalation toxicity, to obtain the basic data for establishing the criteria of exposure in working environments and to classify the hazardousness in compliance with the Industrial Safety and Health Act by evaluating the hazardousness, repeated inhalation exposure test was carried with SD rats. The rats were grouped by 10 females and males each. The repetitive inhalation exposures were carried out at 4 levels of concentration of 0 ppm, 60 ppm, 300 ppm, and 1,500 ppm, for 6 hours a day, 5 days a week, for 13 weeks. The results are described hereunder. 1. No death of the animals of the exposed and controlled groups in the test period. Not any specific clinical symptoms, change in feed intake quantity, abnormality in eye test, or change in activity were observed. 2. In the 300 ppm and 1,500 ppm groups, weight reduction in the female groups and weight increase of liver and kidney in the male groups compared with control group were observed with statistical significance(p<0.05). 3. In the blood test, the HCT increased in the male 300 ppm group and the number of hematocyte increased, MCV and MCH decreased in the male 1,500 ppm group. In the female 1,500 ppm group, the HB decreased and the distribution width of the hematocyte particle size increased. In the blood biochemistry test, the TP in the male 1,500 ppm group and the LDH in the female 1,500 ppm group were increased with statistical significance(p<0.05). 4. Under the test conditions of the present study with SD rats, the NOEL was evaluated to be from 60 ppm to 300 ppm for both male and female groups. By extrapolation, the NOEL for human who work 8 hours a day was evaluated to be from 128 ppm to 640 ppm 5. Since the NOEL evaluated in this study do not exceed 60ppm(0.184 mg/L) the test material does not belong to the classification of the hazardous substance "NOEL${\leq}$0.5mg/L/6hr/90day(rat), for continuous inhalation of 6hours a day for 90 days" nor to the basic hazardous chemical substance class 1(0.2 mg/L/6hr/90day(rat) defined by the GHS which is a criteria of classification and identification of chemical compounds. However, considering the boiling point($30-204^{\circ}C$), flashing point($-40^{\circ}C$), vapor pressure(40 mmHg), and the inflammable range(1.0 - 6.0 %), sufficient care should be taken for handling in the safety aspects including fire or explosion.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.363-363
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• 2014

Ruthenium (Ru) has attractive material properties due to its promising characteristics such as a low resistivity ($7.1{\mu}{\Omega}{\cdot}cm$ in the bulk), a high work function of 4.7 eV, and feasibility for the dry etch process. These properties make Ru films appropriate for various applications in the state-of-art semiconductor device technologies. Thus, it has been widely investigated as an electrode for capacitor in the dynamic random access memory (DRAM), a metal gate for metal-oxide semiconductor field effect transistor (MOSFET), and a seed layer for Cu metallization. Due to the continuous shrinkage of microelectronic devices, better deposition processes for Ru thin films are critically required with excellent step coverages in high aspect ratio (AR) structures. In these respects, atomic layer deposition (ALD) is a viable solution for preparing Ru thin films because it enables atomic-scale control of the film thickness with excellent conformality. A recent investigation reported that the nucleation of ALD-Ru film was enhanced considerably by using a zero-valent metallorganic precursor, compared to the utilization of precursors with higher metal valences. In this study, we will present our research results on the synthesis and characterization of novel ruthenium complexes. The ruthenium compounds were easy synthesized by the reaction of ruthenium halide with appropriate organic ligands in protic solvent, and characterized by NMR, elemental analysis and thermogravimetric analysis. The molecular structures of the complexes were studied by single crystal diffraction. ALD of Ru film was demonstrated using the new Ru metallorganic precursor and O2 as the Ru source and reactant, respectively, at the deposition temperatures of $300-350^{\circ}C$. Self-limited reaction behavior was observed as increasing Ru precursor and O2 pulse time, suggesting that newly developed Ru precursor is applicable for ALD process. Detailed discussions on the chemical and structural properties of Ru thin films as well as its growth behavior using new Ru precursor will be also presented.

• Korean Chemical Engineering Research
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• 제50권4호
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• pp.702-707
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• 2012

지난 수십 년간 다양한 산업에서 사용된 유독 화학물질은 심각한 환경오염을 초래했다. 그리고 이산화탄소나 메탄가스 같은 부산물로 인해 지구 온난화를 가속화 시켰다. 그래서 현재 사용하고 있는 유기 용매를 대체할 새로운 환경친화적인 소재 개발의 중요성이 부각되고 있다. 이온성 액체는 비휘발성, 비가연성, 화학적 불활성과 같은 친환경적인 물성을 지니고 있다. 이 밖에도 넓은 전기화학적 범위, 높은 전기전도도, 넓은 열적 작용 범위 그리고 유기용매와의 높은 용해성과 같은 물성을 지니고 있어 합성용매, 촉매제, 가스추출제로서 각광받고 있는 물질이다. 이번 연구에서는 모폴린 계열의 이온성 액체인 N-ethyl-N-methylmorpholine Bromide, N-butyl-N-methylmorpholine Bromide, N-octyl-N-methylmorpholine Bromide, N-ethyl-N-methylmorpholine Tetrafluoroborate, N-butyl-N-methylmorpholine Tetrafluoroborate, N-octyl-N-methylmorpholine Tetrafluoroborate, N-ethyl-N-methylmorpholine Hexafluorophosphate, N-butyl-N-methylmorpholine Hexafluorophosphate, N-octyl-N-methylmorpholine Hexafluorophosphate를 합성하였다. 합성물의 녹는점, 분해 온도, 전기화학적 안전성은 각각 DSC, TGA, CV로 측정하였다. 할로겐 음이온($Br^-$)을 지닌 이온성 액체는 대체로 높은 온도($150{\sim}200^{\circ}C$)에서 녹는점 갖고, 비교적 낮은 열분해 온도($200{\sim}230^{\circ}C$), 좁은 전기화학적 안전성(3.4~3.6 V)을 보였다. 반면에 무기 음이온($BF_4^-$, $PF_6^-$)을 지닌 이온성 액체들은 비교적 낮은 온도($50{\sim}110^{\circ}C$)에서 녹는점을 가졌고, 높은 열분해 온도($250{\sim}380^{\circ}C$), 넓은 영역에 걸친 전기화학적 안전성(6.1~6.3 V)을 보였다. 뿐만 아니라 동일한 음이온에서도 양이온의 탄소 사슬의 길이에 따라 물성이 상이함을 확인할 수 있었다. 이번 연구를 통해 얻은 자료들은 이온성 액체의 상용화에 밑거름이 될 것이다.