• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.3
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• pp.261-264
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• 2005

The 90 nm gate pattern technology have been virtualized by employing the hard mask and the planarization of fate poly silicon. We fabricated 70nm poly-Si on $200 nm-SiO_2/p-Si(100)$ substrates using low pressure chemical vapor deposition (LPCVD) to investigate roughness evolution by varying rapid annealing temperatures. The samples were annealed at the temperatures of $700^{\circ}C\~1100^{\circ}C$ for 40 seconds with a rapid thermal annealer. The surface image and the surface roughness were measured by a field emission scanning electron microscopy (FESEM) and an atomic force microscopy (AFM), respectively. The poly silicon surface became more rough as temperature increased due to surface agglomeration. The optimum conditions of poly silicon planarization were achieved by annealed at $700^{\circ}C$ for 40 seconds.

• Journal of Surface Science and Engineering
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• v.41 no.1
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• pp.38-42
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• 2008

316L stainless steel welding tube was electrolytically polished and the inner surface characteristics of the tube were tested. Electro-polishing variables such as current, voltage, concentration of electrolyte and electropolishing time were changed to seek for optimum condition. These makes a optimum conditions for the electro-polishing as 4000 A, 9 V, 1.7 specific gravity of electrolyte, and 30 minute of electro-polishing time. It makes the surface roughness as Ra < $0.25{\mu}m$. XPS test resulted as the ratio of CrO/FeO equals or more to 3/1. AES test resulted as the thickness of CrO film of $38{\AA}$. DTA test resulted as the tube did not react with $N_2,\;H_2\;and\;O_2$ gas below 1073K. As summarize above results, the electro- polished 316L stainless steel welding tube satisfied the conditions to apply as a pipeline for semi- conductor production facility and clean room.

• Journal of Surface Science and Engineering
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• v.49 no.3
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• pp.231-237
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• 2016

This article reports a new chemical bath for preparing a mirror-like surface of AZ31 Mg alloy. In order to find an appropriate chemical polishing solution, four different acidic solutions of sulphuric acid, nitric acid, acetic acid and a specially designed mixture of nitric acid and acetic acid were investigated in view of the changes in surface appearance, roughness and dissolution rate of AZ31 Mg alloy. The surface scales on AZ31 Mg alloy were readily removed by all the acidic solutions, but a reflective surface was produced only by etching in the specially designed solution, and only after a specific etching time. The surface roughness increased with etching time in sulphuric acid, nitric acid, and acetic acid, but it lowered after a specific etching time in the specially designed mixture of nitric acid and acetic acid. Dissolution rate of the alloy in the specially designed mixture of nitric acid and acetic acid appeared to be more than twice than that in separate nitric acid or acetic acid. In this work, we recommend the mirror-like surface of AZ31 Mg alloy obtained by polishing for an optimum time in a mixture of nitric acid and acetic acid for following surface finishings, chemical conversion coating, electroplating, electrophoretic painting and anodizing treatment.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.5 s.182
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• pp.44-50
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• 2006

This paper describs about the technique of ultra-precision machining for an infrared(IR) camera aspheric mirror. A 200 mm diameter aspheric mirror was fabricated by SPDTM(Single Point Diamond Turning Machine). Aluminum alloy as mirror substrates is known to be easily machined, but not polishable due to its ductility. Aspheric large reflector without a polishing process, the surface roughness of 5 nm Ra, and the form error of ${\lambda}/2\;({\lambda}=632.8\;nm)$ for reference curved surface 200 mm has been required. The purpose of this research is to find the optimum machining conditions for cutting reflector using Al6061-T651 and apply the SPDTM technique to the manufacturing of ultra precision optical components of Al-alloy aspheric reflector. The cutting force and the surface roughness are measured according to each cutting conditions feed rate, depth of cut and cutting speed, using diamond turning machine to perform cutting processing. As a result, the surface roughness is good when feed rate is 1mm/min, depth of cut $4{\mu}m$ and cutting speed is 220 m/min. We could machined the primary mirror for IR camera in diamond machine with a surface roughness within $0.483{\mu}m$ Rt on aspheric.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.938-942
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• 2002

This paper has studied to obtain the grinding characteristics and optimal grinding renditions of ceramic materials in the grinding with diamond wheel by the experimental plan method. The load on wheel by varying the feed rate was related with the surface roughness due to the minute destruction phenomenon of grains for the Si$_3$${N^4} and Zr{O_2}$. The depth of cut is related with the surface roughness because the grinding is carried out by grain shedding process due to the brittle fracture phenomenon for the ${Al_2}{O_3}$. The major factors affecting the surface roughness and the optimum grinding conditions were obtained with minimum experiments using the experimental plan method.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.226-229
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• 1999

Epoxy compound has been used as insulation material in electrical equipment for a long time because of its excellent electrical, mechanical and chemical properties. Nowdays, becoming higher voltage system, the properties of interface between epoxy and metal insert become more important. The breakdown voltage of epoxy compound for electric material is variable according to the surface roughness of metal insert. Generally, with metal insert sanding, the adhesion strength is enhanced and the breakdown strength is reduced. But in this study, we knew that the adhesion strength became enhanced but the breakdown strength didn\`t reduced with metal insert sanding. So in this study sanding. So in this study, we suggest the optimum interface condition by adjusting the surface roughness.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.10 no.5
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• pp.1-8
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• 2001

A measuring system is developed to acquire static image from rotary state through CCD camera in back light illumination by synchronizing chopper to workpiece. In image processing of acquired image, lowpass filter is very useful in view of noise removal, and optimum binary image can be made through histogram equalization which is one of the histogram technique to maximize brightness intensity between workpiece and background. After image treatment applying Laplacian operator, surface roughness is calculated by introducing conversion coefficient of pixel which edge is composed of.

• Journal of the Semiconductor & Display Technology
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• v.18 no.2
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• pp.17-22
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• 2019

The method of electrical discharge machining (EDM), one of the processing methods based on non-traditional manufacturing procedures, is gaining increased popularity, since it does not require cutting tools and allows machining involving hard, brittle, thin and complex geometry. This present investigation details the determination of optimum process parameter to attain the better machining performance in EDM of AISI 4340 steel with graphite as a tool electrode. The experimental combinations are planned and analyzed by Taguchi's design of experiments approach. To predict the optimal condition, the experiments are conducted by using Taguchi's L27 orthogonal array. The influence of process variables such as discharge current, pulse on and pulse off time, voltage and spark speed were investigated to control the various desired performance measures such as surface roughness. Analysis of Variance (ANOVA) has to be performed to know the magnitude of each factor. Investigations indicate that the surface roughness is strongly depend on pulsed current.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.1
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• pp.80-86
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• 2004

With the increasing demand of environmentally clean machining in recent years, the use of coolants has been restricted extensively. In this paper, a multiple comparison method(Tukey's HSD method) is proposed to choose the optimum level of coolant necessary for an efficient and environmentally clean machining. The cutting temperature, specific cutting energy, and surface roughness in turning process are analysed by ANOVA(Analysis Of Variance) and Tukey's HSD method. From the experimental results and statistical analysis, it is found that the optimum condition of coolant level is 10 ml/min with 6% mix ratio, which is almost half of the commonly used level.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.5
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• pp.29-34
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• 2012

This study describes the selection of optimum machining conditions for a high-hardness resin by using a large 5-axis machine. The experiments were conducted to examine the main factors that affect the surface roughness, such as the spindle speed, axial and radial depths of the cut, and pattern of the cutter path. To analyze the experiment results, the factor with the biggest impact on machining was determined using the smaller-the-better characteristic of the Taguchi method; the effectiveness of the experiment was then confirmed by verifying the selected optimum machining condition.