• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.90-95
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• 2007

Single side final polishing is a very important role to stabilize a wafer finally before the device process on the wafer is executed. In this study, the machining variables, such as pressure, machining time, and the velocity of pad table were adopted. These parameters have the major influence on the characteristics of wafer polishing. We investigated the surface roughness changing these variables to find the optimal polishing condition. Pad, slurry, slurry quantity, and oscillation distance were set to the fixed variables. In order to reduce defects and find a stable machining condition, a hall sensor was used on the polishing process. AE sensor was attached to the polishing machine to verify optimal condition. Applying data analysis of the sensor signal, experiments were performed. We can get better surface roughness from loading the quasi static force and improving wafer-holding method.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.1
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• pp.26-32
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• 2012

Polishing is one of the important methods in manufacturing of Si wafers and in thinning of completed device wafers. This study will report the characteristic of wafer according to processing time, machining speed and pressure which have major influence on the abrasion of Si wafer polishing. It is possible to evaluation of wafer abrasion by load cell and infrared temperature sensor. The characteristic of wafer surface according to processing condition is selected to use a result data that measure a pressure, machining speed, and the processing time. This result is appeared by the characteristic of wafer surface in machining condition. Through that, the study cans evaluation a wafer characteristic in variable machining condition. It is important to obtain optimal condition. Thus the optimum condition selection of ultra precision Si wafer polishing using load cell and infrared temperature sensor. To evaluate each machining factor, use a data through each sensor. That evaluation of abrasion according to variety condition is selected to use a result data that measure a pressure, machining speed, and the processing time. And optimum condition is selected by this result.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.10
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• pp.31-40
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• 2003

In this paper, optimal cutting condition to minimize the form error in side wall machining with a flat end mill is studied. Cutting forces and tool deflection are calculated considering surface shape generated by the previous cutting such as roughing. Using the form error prediction method from tool deflection, optimal cutting condition considering form accuracy is investigated. Also, the effects of tool teeth number, tool geometry and cutting conditions on form error are analyzed. The characteristics and the difference of generated surface shape in up and down milling are discussed and over-cut free condition in up milling is presented. Form error reduction method through successive up and down milling is also suggested. The effectiveness and usefulness of the presented method are verified from a series of cutting experiments under various cutting conditions. It is confirmed that form error prediction from tool deflection in side wall machining can be used in optimal cutting condition selection and real time surface error simulation for CAD/CAM systems. This study also contributes to cutting process optimization for the improvement of form accuracy especially in precision die and mold manufacturing.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.26 no.1
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• pp.13-19
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• 2017

In modern industry, the machining process is very important for manufacturing various products. More than 80% of machining processes apply rough cutting. The target of this study is to establish the optimal condition of rough cutting using trochoidal motion for improving productivity. For research, the range of cutting conditions is defined by trochoidal motion. The cutting time and tolerance are measured and evaluated according to the cutting conditions of machining. Experimental data are utilized for comparing trochoidal motion and contouring. It is found that the cutting time of trochoidal motion is two times less than that of contouring with optimal cutting conditions. To conclude, trochoidal motion for rough cutting under appropriate cutting conditions improves productivity and shortens processing time significantly.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.12
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• pp.14-20
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• 1998

Cutting fluid is a factor which has big effects on both machinability and environment in machining process. The loss of cutting fluids may be reduced by the optimization of machining parameters in process planning. In this study, the environmental impact of fluid loss is analyzed. The fluid loss models in milling process are constructed with the machining parameters. The models are utilized to obtain the optimal machining parameters to minimize the fluid loss. The factors with significant effects on the fluid loss are analyzed by ANOVA test. Finally, optimal parameters are suggested considering both machining economics and environmental impact. This study is expected to be used as a part of a framework for the environmental impact assessment of machining process.

• Journal of Power System Engineering
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• v.18 no.6
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• pp.91-98
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• 2014

The purpose of this research is to investigate optimum machining conditions to improve the quality of die using the CAD/CAM system(Power Shape/Power Mill) and 3D printing. Surface roughness is widely used as an index for processing degree of accuracy. The Power Shape was used to model the shape of product. And the model shape is confirmed by 3D printing system(BFB-3000). Also, tool path and NC-codes were generated using Power Mill. Finally, the product was cut using CNC machine(NBS-2025). The cutting time and surface roughness were measured by measuring instrument. And then this process was repeated by changing the conditions to find optimal machining conditions. The surface roughness behavior with regard to specific factors were analyzed. Through this study, the optimal machining condition can be obtained.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.245-249
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• 2002

Tungsten carbide microshaft is used as various micro-tools in MEMS because it has high hardness and good rigidity. In this study, experiments were performed to produce tungsten carbide microshaft using electrochemical machining. $H_2SO_4$solution was used as electrolyte because it can dissolve tungsten and cobalt simultaneously. Optimal electrolyte concentration and machining voltage satisfying uniform shape and large MRR of workpiece were found. For one-step machining, the immersion depth over 1 mm was selected for avoidance of concentration of electric charge at the tip of the microshaft. The limit diameter with good straightness was shown and an empirical formula for WC-microshaft machining was suggested. By controlling the various machining parameters, a straight microshaft with 30 $\mu\textrm{m}$ diameter, over 1 mm length and under 0.5$^{\circ}$ taper angle was obtained.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.999-1002
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• 2002

In this research, the mechanism of micro-ECM was investigated with potentiodynamic method and the optimal condition for micro-ECM was selected by voltage-current-time curve with potentiostatic method. From the experimental result. it was confirmed that anodic voltage curve could be used very effectively for determining the optimal condition of micro-ECM, and the micro part which has extremely fine surface could be fabricated by use of micro-ECM with point electrode method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.19-22
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• 1997

The objective of this research is to use an analytical and experimental approach to develop optimal tool geometry for high speed machining. The tool geometry parameters and cutting process have complex relationships. Until now, numerous cutting tests were needed to acquire optimal design of endmill for the purpose of high speed machining, dut to the insufficient knowledge about process in high speed machining. In order to improve the cutting ability of endmill, a model for optimal cutter shape was developed to minimize resultant cutting force by combing cutting force and wear test and surface roughness test from optimized and conventional cutter with the same cutting condition. Using various tools with different geometry, relationships between the tool geometry parameter, rake angle, clearance angle, lengh of cutter have been stuied.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.4
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• pp.48-68
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• 2000

The high-speed machining technology of difficult-to-cut material is needed to achieve the high-efficiency of die manufacturing. The high-speed machining is applied in automobile, airplane and electricityㆍelectro industry etc, because it can improve machining efficiency and productivity with high speed, high power and high rotation. In this study, high speed machinability, tool wear characteristics and its monitoring, characteristics of damaged layer, machinability of difficult-to-cut material, characteristics of a free curved surface and method of CAD/CAM system were introduced to acquire the shortening of machining time, the improvement of machining efficiency and the high quality of machined surface. Therefore, we establish the stabilization condition of difficult-to-cut material machining and present the optimal cutting condition for high-efficiency cutting.