• 반도체디스플레이기술학회지
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• 제11권3호
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• pp.1-6
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• 2012

In this paper, inspection system based on optical scanning mechanism is designed and developed for solar cell wafer. It consists of optical scanning mechanism, NIR camera optics, machinery and control system, algorithm of defect detection and software. Optical scanning mechanism is composed of geometrical camera optics and structured hybrid illumination system. It is used to inspection of surface defects. NIR camera optics is used for inspection of defects inside solar cell wafer. It is shown that surface and internal micro defects can be detected in developed inspection system for solar cell wafer.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.162.6-162
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• 2001

Confocal scanning microscopy (CSM) is an important instrument in a wide variety of imaging applications because of its ability to provide three-dimensional images of thick, volume specimens. The mechanism for two-dimensional beam scanning and optical sectioning has an important roe in CSM as the three-dimensional profiler. This optical sectioning property arises from the use of a point detector, which serves to attenuate the signals from out-of-focus. The intensity profile for the open loop scanning should be matched with its response for the standard. The non-linearity can be minimized with the optical sectioning or the optical probe of the closed loop control. This paper shows the mathematical expression of the light such as the extinction curve in the optical fields of system using AO deflector, the axial/lateral response experimentally when the error sources change, and the methods of optical sectioning. Thorough design of optical sectioner is crucial to the success of CSM in the field ...

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 추계학술대회 논문집
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• pp.201-206
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• 2004

Laser scanner are getting used for inspection and reverse engineering in industry such as motors, electronic products, dies and molds. However, due to the lack of efficient scanning technique, the tasks become limited to the low accuracy purpose. The main reasons for this limitation for usefulness are caused from the optical drawback, such as irregular reflection, scanning direction normal to measuring surface, the influence of surface integrity, and other optical disturbances. To overcome these drawback of laser scanner, this study propose the mechanism to reduce the optical trouble by using the 2 kinds of rotational movement axis and by composing the spherical coordinate to scanning the surface keeping normal direction consistently. So, it could be designed and interfaced the measuring device to realize that mechanism, and then it could acquisite the accurate 3D form cloud data. Also, these data are compared with the standard master ball and the data acquisited from the touch point sensor, to evaluate the accuracy and stability of measurement and to demonstrate the implementation of an dental tooth purpose system

• Journal of the Optical Society of Korea
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• 제15권4호
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• pp.340-344
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• 2011

Airborne infrared techniques have been used in wild land fire management for decades. This paper describes a kind of infrared scanning system based on a rotating drum with a tilted porthole underside the plane nose. This design increases the stability of the mechanism system, reduces air resistance and protects inner parts. Aberration characteristics of a tilted ellipsoid porthole are analyzed and an effective solution is invented which makes the system achieve $30^{\circ}$ field of regard. The system's ultimate value of modulation transfer function is near the diffraction limit, which indicates that the performance of the rotating optical system meets the imaging requirements.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.562-565
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• 2002

Recent technologic innovations have created possibilities for restorative dentistry, such as computer-aided design and computer-aided manufacturing. This article presents a CAD process that has been developed for the fabrication of dental restorations. This process uses a 4-axes driving mechanism and an improved optical displacement sensor, successfully applied in other industries. In optical displacement sensor, the light beam emitted from the LED is converged through the light source lenses and thrown on the object to be detected. When the light beam is reflected from the object, however, it is diffused. The diffused light beam is converged again by the receiver lenses and cast on the optical position detector element as a small spot.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 추계학술대회논문집
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• pp.841-844
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the vibration behavior of flexural beam in the ultrasonic transport system is verified using Laser Scanning Vibrometer. The experiments for verifying vibration are performed in three conditions such as in the maximum transport speed, in the zero speed, and in the change of transport direction.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.149-154
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• 2004

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the relationship of transporting speed according to the change of flexural beam shape and the effect of transporting speed according to the change of weight and amplification voltage are verified. The vibration behavior of flexural beam in the ultrasonic transport system is experimented using Laser Scanning Vibrometer.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1539-1542
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• 2005

Self-assembled monolayers (SAMs) formed by the adsorption of alkanethiols, $HS(CH_2)_nX$, where X is an organic functional group, onto gold surfaces have attracted widespread interest as templates for the fabrication of molecular and biomolecular microstructures. Previously photopatterning has been thought of as being restricted to the micron scale, because of the wellknown diffraction limit. So, we have explored a novel approach to nanofabrication by utilizing a femtosecond laser coupled to a near-field scanning optical microscope (NSOM).

• Journal of the Optical Society of Korea
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• 제20권1호
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• pp.125-129
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• 2016

In this study, we have investigated a high-temperature AlN nucleation layer and AlGaN epilayers on c-plane sapphire substrate by low-pressure metal-organic chemical vapor deposition (LP-MOCVD). High resolution X-ray diffraction (HRXRD), atomic force microscopy (AFM), scanning electron microscope (SEM) and Raman scattering measurements have been exploited to study the crystal quality, surface morphology, and residual strain of the HT-AlN nucleation layer. These analyses reveal that the insertion of an LT-AlN nucleation layer can improve the crystal quality, smooth the surface morphology of the HT-AlN nucleation layer and further reduce the threading dislocation density of AlGaN epifilms. The mechanism of inserting an LT-AlN nucleation layer to enhance the optical properties of HT-AlN nucleation layer and AlGaN epifilm are discussed from the viewpoint of driving force of reaction in this paper.

• 한국세라믹학회지
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• 제27권1호
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• pp.136-146
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• 1990

Whiskers of SiC were grown from the mixture of silica and graphite powders by Acheson method(direct heating method). The structrua, morphological and chemical characterizations have been performed by X-ray diffractometer(XRD), transmission electron microscopy(TEM), optical microscopy(OM), scanning electron microscopy(SEM), X-ray photoelectron spectroscopy(XPS) and energy dispersive spectrometer(EDS). The growth mechanism of SiC whiskers is also discussed.