Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Development of Inspection System With Optical Scanning Mechanism and Near-Infrared Camera Optics for Solar Cell Wafer

광학스캐닝 메커니즘 및 근적외선 카메라 광학계를 이용한 태양전지 웨이퍼 검사장치 개발

  • Kim, Gyung Bum (Aeronautical & Mechanical Design Eng., Korea National Univ. of Transportation)
  • 김경범 (한국교통대학교 공과대학 항공기계설계학과)
  • Received : 2012.07.05
  • Accepted : 2012.09.17
  • Published : 2012.09.30
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Abstract

In this paper, inspection system based on optical scanning mechanism is designed and developed for solar cell wafer. It consists of optical scanning mechanism, NIR camera optics, machinery and control system, algorithm of defect detection and software. Optical scanning mechanism is composed of geometrical camera optics and structured hybrid illumination system. It is used to inspection of surface defects. NIR camera optics is used for inspection of defects inside solar cell wafer. It is shown that surface and internal micro defects can be detected in developed inspection system for solar cell wafer.

Keywords

References

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