• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.11
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• pp.901-907
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• 2000

As the minimum feature size for making ULSI approaches the wavelength of light source in optical lithography, the aerial image is so hardly distorted because of the optical proximity effect that the accurate mask image reconstruction on wafer surface is almost impossible. We applied the Optical Proximity Correction(OPC) on isolated patterns assuming Attenuated Phase Shift Mask(APSM) as well as binary mask, to correct the widening of isolated patterns. In this study, we found that applying OPC to APSM shows much better improvement not only in enhancing the resolution and fidelity of t도 images but also in enhancing the process margin than applying OPC to the binary mask. Also, we propose the OPC method of APSM for isolated patterns, the size of which is less than the wavelength of the ArF excimer laser. Finally, we predicted the resolution limit of optical lithography through the aerial image simulation.

• Journal of the Optical Society of Korea
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• v.14 no.1
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• pp.1-13
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• 2010

This paper describes a development of a fiber optic common-path optical coherence tomography (OCT) based imaging and guided system that possess ability to reliably identify optically transparent targets that are on the micron scale; ability to maintain a precise and safe position from the target; ability to provide spectroscopic imaging; ability to imaging biological target in 3-D. The system is based on a high resolution fiber optic Common-Path OCT (CP-OCT) that can be integrated into various mini-probes and tools. The system is capable of obtaining >70K A-scan per second with a resolution better than $3\;{\mu}m$. We have demonstrated that the system is capable of one-dimensional real-time depth tracking, tool motion limiting and motion compensation, oxygen-saturation level imaging, and high resolution 3-D images for various biomedical applications.

• Proceedings of the Optical Society of Korea Conference
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• 1996.09a
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• pp.49-49
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• 1996

• Journal of Institute of Control, Robotics and Systems
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• v.10 no.3
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• pp.239-248
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• 2004

Optical coherence tomography(OCT) is high resolution imaging system which can see the cross section of microscopic organs in the living tissue. In this paper, we analyze the relation between the light source and the resolution of modulated signal in Michelson interferometer. We construct 1-D OCT signal processing hardware such as amplifiers, filters, and demodulate electronic signals from the photo detector. In order to get 2-D OCT image, the synchronization among optical delay line, sample stage and A/D converter is dealt with. In experiments, we verify analog and digital signal processing blocks which apply to the stacks of glasses. Finally we aquire high resolution 2-D OCT image with respect to the onion tissue. We expect that this result can be applied to the medical instrument through performance improvement.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.16 no.5
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• pp.69-77
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• 2017

This paper introduces an optical encoder using the reflection in the slit. The digital optical encoder is a sensor to generate a pulse according to the displacement. An optical encoder is composed of 3 parts: light source, slit plate and light-receiving element. In a conventional encoder, one slit produces one signal. The resolution of the digital optical encoder is determined by the number of slits in the encoder plate. The small slit size is most important among the factors that determine the resolution in a generic-type optical encoder. However, a small slit has low productivity and technical difficulties, so analog optical encoders have emerged as an alternative. Nonetheless, this alternative requires additional circuitry and equipment because of the noise and drafts in the analog signals. A new sensor is presented in this paper with a high resolution and a slit of the same size using the reflection in the slit. Then, the path of the light that passes through the slit ccording to the shape was analyzed, and some paths were expressed in the mathematical expressions. In addition, the optical paths were analyzed in the rectangular, octagonal, and circular encoders, and shown the obtained number of signals per slit by using them. Thus, we confirm that this method has the best performance in circle-shaped slits.

• Proceedings of the KSRS Conference
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• 2005.10a
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• pp.213-216
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• 2005

A novel hyperspectral imaging spectrometer controlling spatial and spectral resolution individually has been proposed. This imaging spectrometer uses a zoom lens as a telescope and a focusing element. It can change the spatial resolution fixing the spectral resolution or the spectral resolution fixing the spatial resolution. Here, we report the concept of the hyperspectral imaging spectrometer with the novel zooming function and the optical design of a zoom lens as the focusing element. By using lens module and third-order aberration theory, we have presented the initial design of four-group zoom lens with external entrance pupil. And the optimized zoom lens with a focal length of 50 to 150 mm is obtained from the initial design by the optical design software. As a result, the designed zoom lens shows satisfactory performances in wavelength range of 450 to 900 nm as a focusing element in an imaging spectrometer. Furthermore, the collimator lens of the imaging spectrometer is designed through the third-order aberration correction by using an iterative process.

• Journal of the Optical Society of Korea
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• v.9 no.1
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• pp.26-31
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• 2005

We describe the design and the implementation of video-rate reflection confocal scanning microscopy (CSM) using an acousto-optical deflector (AOD) for the fast horizontal scan and a galvanometer mirror (GM) for the slow vertical scan. Design parameters of the optical system are determined for optimal resolution and contrast. The OSLO simulations show that the performances of CSM are not changed with deflection angle and the wavefront errors of the system are less than 0.012λ. To evaluate the performances of designed CSM, we do a series of tests, measuring lateral and axial resolution, real time image acquisition. Due to a higher axial resolution compared with conventional microscopy, CSM can detect the surface of sub-micrometer features. We detect 138㎚ line shape pattern with a video-rate (30 frm/sec). And 10㎚ axial resolution is archived. The lateral resolution of the topographic images will be further enhanced by differential confocal microscopy (DCM) method and computational algorithms.

• Current Optics and Photonics
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• v.6 no.1
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• pp.69-78
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• 2022

A high-resolution camera is a precise optical system. Its vibrations during transportation and launch, together with changes in temperature and gravity field in orbit, lead to different degrees of defocus of the camera. Thermal refocusing is one of the solutions to the problems related to in-orbit defocusing, but there are few relevant thermal refocusing mathematical models for systematic analysis and research. Therefore, to further research thermal refocusing systems by using the development of a high-resolution micro-nano satellite (CX6-02) super-resolution camera as an example, we established a thermal refocusing mathematical model based on the thermal elasticity theory on the basis of the secondary mirror position. The detailed design of the thermal refocusing system was carried out under the guidance of the mathematical model. Through optical-mechanical-thermal integration analysis and Zernike polynomial calculation, we found that the data error obtained was about 1%, and deformation in the secondary mirror surface conformed to the optical index, indicating the accuracy and reliability of the thermal refocusing mathematical model. In the final ground test, the thermal vacuum experimental verification data and in-orbit imaging results showed that the thermal refocusing system is consistent with the experimental data, and the performance is stable, which provides theoretical and technical support for the future development of a thermal refocusing space camera.

• Current Optics and Photonics
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• v.7 no.3
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• pp.263-272
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• 2023

A collimator refers to an optical system that images a collimated beam at a desired point. A resolution target located at a near distance can be converted into a virtual image located at a long distance. To test the resolution for mobile cameras, a large target is placed at a long distance. If a collimator system is used, the target can be placed at a near distance. The space required for a resolution inspection can thus be drastically reduced. However, to inspect a mobile camera, the exit pupil of the collimator system and the entrance pupil of the mobile camera must match, and the stop of the collimator system must be located on the last surface. Because a collimator system cannot be symmetrical with respect to the stop, the distortion becomes extremely large, which can be corrected by combining the collimator symmetrically with respect to the object plane. A novel system was designed to inspect an optical lens on a mobile phone. After arranging the refractive power, lenses were added using the equivalent lens design method. The distortion was reduced to less than 1%. This optical system satisfies a half-field angle of 45° and an optical performance sufficient for inspection.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.8
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• pp.40-47
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• 2001

Optical measurement methods make it possible to detect object displacements with high resolution and noncontact measurements. Also, they are very robust against EMI noises and have long operation range. An optical triangulation sensor is one of widely used displacement measurement sensors for its sub-micron resolution, fast response, simple structure, and low cost. However. there are several errors caused by inclinations of a surface. speckle effects, power fluctuations of light sources, and noises of detectors. In this paper, in order to minimize error effects, we performed error analysis and proposed a new structure. Then, we setup a new modeling method and verify it through simulations and experiments. Based on the new model. we propose a new sensor structure and establish design criteria. Finally, we design a signal processing system to overcome a resolution-limited problem of light detectors. The resolution of the proposed system is 0.2${\mu}{\textrm}{m}$ in 5mm operating range.