Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Sensor Structure and Signal Processing System for Precision Optical Displacement Measurement

초정밀 광학식 변위 측정을 위한 센서 구호 밀 신호 처리 시스템

  • O, Se-Baek (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kim, Gyeong-Chan (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kim, Su-Hyeon (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Gwak, Yun-Geun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 오세백 (한국과학기술원 기계공학과) ;
  • 김경찬 (한국과학기술원 기계공학과) ;
  • 김수현 (한국과학기술원 기계공학과) ;
  • 곽윤근 (한국과학기술원 기계공학과)
  • Published : 2001.08.01
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Abstract

Optical measurement methods make it possible to detect object displacements with high resolution and noncontact measurements. Also, they are very robust against EMI noises and have long operation range. An optical triangulation sensor is one of widely used displacement measurement sensors for its sub-micron resolution, fast response, simple structure, and low cost. However. there are several errors caused by inclinations of a surface. speckle effects, power fluctuations of light sources, and noises of detectors. In this paper, in order to minimize error effects, we performed error analysis and proposed a new structure. Then, we setup a new modeling method and verify it through simulations and experiments. Based on the new model. we propose a new sensor structure and establish design criteria. Finally, we design a signal processing system to overcome a resolution-limited problem of light detectors. The resolution of the proposed system is 0.2${\mu}{\textrm}{m}$ in 5mm operating range.

Keywords

References

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