• 제목/요약/키워드: Optical line emission

검색결과 156건 처리시간 0.026초

Measurement of electron temperature and density using Stark broadening of the coaxial focused plasma for extreme ultraviolet (EUV) lithography

  • Lee, Sung-Hee;Hong, Young-June;Choi, Eun-Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.475-475
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    • 2010
  • We have generated Ar plasma in dense plasma focus device with coaxial electrodes for extreme ultraviolet (EUV) lithography and investigated an emitted visible light for electro-optical plasma diagnostics. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas of pressure 8 mTorr. The inner surface of the cylindrical cathode has been attatched by an acetal insulator. Also, the anode made of tin metal. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature and density of the coaxial plasma focus could be obtained by Stark broadening of optical emission spectroscopy (OES). The Lorentzian profile for emission lines of Ar I of 426.629 nm and Ar II of 487.99 nm were measured with a visible monochromator. And the electron density has been estimated by FWHM (Full Width Half Maximum) of its profile. To find the exact value of FWHM, we observed the instrument line broadening of the monochromator with a Hg-Ar reference lamp. The electron temperature has been calculated using the two relative electron density ratios of the Stark profiles. In case of electron density, it has been observed by the Stark broadening method. This experiment result shows the temporal behavior of the electron temperature and density characteristics for the focused plasma. The EUV emission signal whose wavelength is about 6 ~ 16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD). The result compared the electron temperature and density with the temporal EUV signal. The electron density and temperature were observed to be $10^{16}\;cm^{-3}$ and 20 ~ 30 eV, respectively.

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Dy3+와 Eu3+ 이온이 동시 도핑된 CaMoO4 형광체의 합성과 발광 특성 (Synthesis and Photoluminescence Properties of Dy3+- and Eu3+-codoped CaMoO4 Phosphors)

  • 김준한;조신호
    • 한국표면공학회지
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    • 제48권3호
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    • pp.82-86
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    • 2015
  • $Dy^{3+}$- and $Eu^{3+}$-codoped $CaMoO_4$ Phosphors were synthesized by using the solid-state reaction method. The crystal structure, morphology, and optical properties of the resulting phosphor particles were investigated by using the X-ray diffraction, field-emission scanning electron microscopy, and photoluminescence spectroscopy. XRD patterns exhibited that all the synthesized phosphors showed a tetragonal system with a main (112) diffraction peak, irrespective of the content of $Eu^{3+}$ ions. As the content of $Eu^{3+}$ ions increased, the grains showed a tendency to agglomerate. The excitation spectra of the synthesized powders were composed of one strong broad band centered at 305 nm in the range of 220 - 350 nm and several weak peaks in the range of 350 - 500 nm resulting from the 4f transitions of activator ions. Upon ultraviolet excitation at 305 nm, the yellow emission line due to the $^4F_{9/2}{\rightarrow}^6H_{13/2}$ transition of $Dy^{3+}$ ions and the main red emission spectrum resulting from the $^5D_0{\rightarrow}^7F_2$ transition of $Eu^{3+}$ ions were observed. With the increase of the content of $Eu^{3+}$, the intensity of the yellow emission band gradually decreased while that of the red emission increased. These results indicated that the emission intensities of yellow and red emissions could be modulated by changing the content of the $Dy^{3+}$ and $Eu^{3+}$ ions incorporated into the host crystal.

글로우 방전 원자방출에서의 Hybrid Neural Network를 이용한 유해 중금속 분석 (Analysis of Toxic Heavy Meatals using Hybrid Neural Network in Glow Discharge Atomic Emission Spectroscoy)

  • 이장수;이상천;최규성;김용성;서쌍희;하경재;류동항;조태화;정민수
    • 분석과학
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    • 제15권5호
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    • pp.399-409
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    • 2002
  • 글로우방전 (Glow Discharge)을 이용한 원자방출 분광계의 On-line 분광분석을 위해 개발된 본 시스템을 위한 프로그램은 주변 광학기기들을 제어하는 부분과 스펙트럼의 비선형적인 오차를 줄여 보다 정확한 결과를 얻기 위해 인공지능 기법을 도입한 스펙트럼 해석 부분으로 구성되어져 있다. McPHERSON 207 Monochromator를 GPIB 통신 프로토콜로서 제어하였으며, (주)Photon_Tek에서 제작한 A/D Amplifier를 사용하여 PMT로부터 검출 신호를 측정할 수 있었다. 인공지능 기법인 HNN(Hybrid Neural Network)을 스펙트럼 해석 부분에 도입하여 P, Cu, Fe, Cr, 등의 정성 분석과, Cd 10 ppb의 미량 검출을 통한 정량분석을 기존의 상용화된 방법보다 정확하게 수행할 수 있었다.

원자외선 영상/분광 측정기 광학설계 (OPTICAL DESIGN OF THE FAR ULTRAVIOLET IMAGING SPECTROGRAPH)

  • 유광선;선광일;민경욱
    • Journal of Astronomy and Space Sciences
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    • 제15권2호
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    • pp.359-371
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    • 1998
  • 본 연구에서는 원자외선 영역($900~1750AA$)에서 오로라, 주/DIRKS 대기 광 관측 및 천문학적 관측을 동시에 수행하기 위한 FUVS(Far Ultraviolet Spectrograph)를 설계하고, 그 성능을 평가하였다. FUVS의 설계는 에돌이발(grating)의 광학적 특성과 비구면 광학을 충분히 고려하여 이루어졌으며, 분해능 계산을 위해 ray-trace 방법과 파면수차 계산에 의한 방법을 사용하여 설계의 검증을 시도하였다. 두 가지 방법에 의한 결과가 오차범위 안에서 일치하여 분석 방법에 큰 문제점이 없다는 것을 간접적으로 확인할 수 있었고, 전 영역에 걸쳐 대략 $2~5AA$의 분해능을 얻었다. 또한, FUVS의 수행 임무 중 가장 검출이 힘들 것으로 생각되는 고온의 성간 플라즈마에서 방출되는 선 방출의 검출 가능성을 타진하기 위하여 FUVS의 최소 검출가능 플럭스(MDF)를 계산하였다. 이 계산을 위하여 지금까지 알려진 반사물질, MCP 등의 특성을 충분히 고려하였으며, 선의 세기에 따라 하루에서 일주일에 걸친 관측을 통해 고온의 성간 플라즈마에서 방출되는 선 방출을 검출할 수 있다는 결론을 얻었다.

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Polarization of Rayleigh Scattered Lyα in Active Galactic Nuclei

  • Chang, Seok-Jun;Lee, Hee-Won;Yang, Yujin
    • 천문학회보
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    • 제41권1호
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    • pp.70.3-70.3
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    • 2016
  • Active galactic nuclei (AGNs) typically show a non-thermal continuum locally represented by a power-law and many prominent emission lines in the UV and optical regions. AGNs are classified by two types, where Type I AGNs exhibit both broad and narrow lines and only narrow lines are observed in Type 2 AGNs. The unification models of AGNs invoke the existence of a molecular torus just outside of the broad line region. In the presence of a high column HI region associated with the molecular torus, we propose that significant fraction of broad line photons near Lyman series can be scattered by atomic hydrogen in the torus. In particular, $Ly{\alpha}$ being the strongest emission line, strong linear polarization may develop around $Ly{\alpha}$ through Rayleigh scattering. We adopt a Monte Carlo technique to investigate the polarized transfer of $Ly{\alpha}$ in a thick HI region with the shape of a torus. We consider the range of HI column density N_HI = 1020-23 with fixed geometric parameters of the torus such as the inner and outer radii and the height. We present the polarized spectra and angular distribution of Rayleigh scattered radiation around $Ly{\alpha}$. We find that the $Ly{\alpha}$ core part is polarized in the direction perpendicular to the symmetry axis whereas in the far wing part it is polarized in the parallel direction. It is concluded that the unification of AGNs implies that $Ly{\alpha}$ can be uniquely polarized through Rayleigh scattering.

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Diagnostics of Diffuse Two-Phase Matter Using Techniques of Positron Annihilation Spectroscopy in Gamma-Ray and Optical Spectra

  • Doikov, Dmytry;Yushchenko, Alexander;Jeong, Yeuncheol
    • Journal of Astronomy and Space Sciences
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    • 제36권3호
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    • pp.115-119
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    • 2019
  • This paper is a part of the series on positron annihilation spectroscopy of two-phase diffuse gas-and-dust aggregates, such as interstellar medium and the young remnants of type II supernovae. The results obtained from prior studies were applied here to detect the relationship between the processes of the annihilation of the K-shell electrons and incident positrons, and the effects of these processes on the optical spectra of their respective atoms. Particular attention was paid to the Doppler broadening of their optical lines. The relationship between the atomic mass of the elements and the Doppler broadening, ${\Delta}{\lambda}_D$ (${\AA}$), of their emission lines as produced in these processes was established. This relationship is also illustrated for isotope sets of light elements, namely $^3_2He$, $^6_3Li$, $^7_3Be$, $^{10}_5B$ and $^{11}_5B$. A direct correlation between the ${\gamma}-line$ luminosity ( $E_{\gamma}=1.022MeV$) and ${\Delta}{\lambda}_D$ (${\AA}$) was proved virtually. Qualitative estimates of the structure of such lines depending on the positron velocity distribution function, f(E), were made. The results are presented in tabular form and can be used to set up the objectives of further studies on active galactic nuclei and young remnants of type II supernovae.

Influence of Ne-Xe Gas Mixture Ratio on the Extreme Ultraviolet (EUV) Emission Measurement from the Coaxially Focused Plasma

  • Lee, Sung-Hee;Hong, Young-June;Choi, Duk-In;Uhm, Han-Sup;Choi, Eun-Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.220-220
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    • 2011
  • The Ne-Xe plasmas in dense plasma-focus device with coaxial electrodes were generated for extreme ultraviolet (EUV) lithography. The influence of gas mixture ratio, Ne-Xe (1, 10, 15, 20, 25, 30, 50%) mixture gas, on EUV emission measurement, EUV intensity and electron temperature in the coaxially focused plasma were investigated. An input voltage of 4.5 kV was applied to the capacitor bank of 1.53mF and the diode chamber was filled with Ne-Xe mixture gas at a prescribed pressure. The inner surface of the cylindrical cathode was lined by an acetal insulator. The anode was made of tin metal. The EUV emission signal of the wavelength in the range of 6~16 nm has been detected by a photo-detector (AXUV-100 Zr/C, IRD). The visible emission line was also detected by the composite-grating spectrometer of the working wavelength range of 200~1100 nm (HR 4000CG). The electron temperature is obtained by the optical emission spectroscopy (OES) and measured by the Boltzmann plot with the assumption of local thermodynamic equilibrium (LTE).

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ACCRETION FLOW AND DISPARATE PROFILES OF RAMAN SCATTERED O VI λλ 1032, 1038 IN THE SYMBIOTIC STAR V1016 CYGNI

  • Heo, Jeong-Eun;Lee, Hee-Won
    • 천문학회지
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    • 제48권2호
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    • pp.105-112
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    • 2015
  • The symbiotic star V1016 Cygni, a detached binary system consisting of a hot white dwarf and a mass-losing Mira variable, shows very broad emission features at around 6825 Å and 7082 Å, which are Raman scattered O vi λλ 1032, 1038 by atomic hydrogen. In the high resolution spectrum of V1016 Cyg obtained with the Bohyunsan Optical Echelle Spectrograph these broad features exhibit double peak profiles with the red peak stronger than the blue counterpart. However, their profiles differ in such a way that the blue peak of the 7082 feature is relatively weaker than the 6825 counterpart when the two Raman features are normalized to exhibit an equal red peak strength in the Doppler factor space. Assuming that an accretion flow around the white dwarf is responsible for the double peak profiles, we attribute this disparity in the profiles to the local variation of the flux ratio of O vi λλ 1032, 1038 in the accretion flow. A Monte Carlo technique is adopted to provide emissivity maps showing the local emissivity of O vi λ1032 and O vi λ1038 in the vicinity of the white dwarf. We also present a map indicating the differing flux ratios of O vi λλ 1032 and 1038. Our result shows that the flux ratio reaches its maximum of 2 in the emission region responsible for the central trough of the Raman feature and that the flux ratio in the inner red emission region is almost 1. The blue emission region and the outer red emission region exhibit an intermediate ratio around 1.5. We conclude that the disparity in the profiles of the two Raman O vi features strongly implies accretion flow around the white dwarf, which is azimuthally asymmetric.

A Solar Stationary Type IV Radio Burst and Its Radiation Mechanism

  • Liu, Hongyu;Chen, Yao;Cho, Kyungsuk;Feng, Shiwei;Vasanth, Veluchamy;Koval, Artem;Du, Guohui;Wu, Zhao;Li, Chuanyang
    • 천문학회보
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    • 제43권1호
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    • pp.52.2-53
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    • 2018
  • A stationary Type IV (IVs) radio burst was observed on September 24, 2011. Observations from the Nançay RadioHeliograph (NRH) show that the brightness temperature (TB ) of this burst is extremely high, over 10^11K at 150 MHz and over 10^8K in general. The degree of circular polarization (q ) is between -60%~-100%, which means that it is highly left-handed circularly polarized. The flux-frequency spectrum follows a power-law distribution, and the spectral index is considered to be roughly -3~-4 throughout the IVs. Radio sources of this event are located in the wake of the coronal mass ejection and are spatially dispersed. They line up to present a formation in which lower-frequency sources are higher. Based on these observations, it is suggested that the IVs was generated through electron cyclotron maser emission.

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High Dispersion Spectra of the Young Planetary Nebula NGC 7027

  • Hyung, Siek;Lee, Seong-Jae;Bok, Jang-Hee
    • 한국지구과학회지
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    • 제36권5호
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    • pp.419-426
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    • 2015
  • We investigated the high dispersion spectra that had been secured at the center of the planetary nebula NGC 7027 with the Bohyunsan Optical Echelle Spectrograph (BOES) on October, 20, 2009. We analyzed the forbidden lines of [OI], [SII], [OII], [NII], [ClIII], [ArIII], [OIII], [ArIV], [NeIII], [ArV], and [CaV] in the $3770-9225{\AA}$ wavelength region. The expansion velocities were derived from double Gaussian line profiles of the emission lines, after eliminating the subsidiary line broadening effects. The radial variations of the expansion velocities were obtained by projecting the derived expansion velocities: $19.56-31.93kms^{-1}$ onto the equatorial shell elements of the inner and the outer boundaries of the main shell of 2.5(2.1)" and 3.8(3.6)", according to the ionization potential of each ion. Analysis of equatorial shell spectra indicated that the equatorial shell generally expands in an accelerated velocity mode, but the expansion pattern deviates from a linear velocity growth with radial distance. NGC 7027, of which age is about 1000 years or less, might be still at its early stage. During the first few hundred years, plausibly in its early stage, the main shell of PN expands very slowly and, later, it gradually gain its normal expansion speed.