• 한국광학회지
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• 제19권5호
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• pp.365-369
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• 2008

정전기장 편향기를 사용하는 저전압 초소형 전자칼럼에서 전자빔 집속 적정조건에 대해 조사하였다. 일정한 전자 방출 팁 전압조건에서 소스렌즈를 이용하여 전자빔을 집속할 경우 아인젤 렌즈를 이용할 경우보다 주사면적은 컸으나 전류영상의 선명도는 낮게 측정되었다. 3차원 전산시늉 결과 소스렌즈를 사용하여 전자빔을 집속할 경우 전자빔의 초점크기와 편향이 아인젤 렌즈를 이용하여 집속할 경우보다 큰 것으로 조사되었다.

• 한국정밀공학회지
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• 제16권6호
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• pp.141-147
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• 1999

Optical disk technology with a laser beam for data recording and retrieval is one of the most promising route for high density information storage in multimedia era. As the storage density and data transfer rates are increased, mechanical issues, mainly noise and vibration, become critical. Rubber materials are extensively used in various machine design application, mainly for vibration/shock/noise control devices. Over the years an enormous effort has been put into developing procedures to provide properties of rubber components with complex shape and under pre-deformed state. In this paper, non-linear large deformations of a rubber mount for optical disk drive were investigated using the finite element method. A tension test of rubber material was performed, to calculate a strain energy function. According to the pre-deformed state, the variation of rubber mount stiffness were calculated and the reliability of numerical results were checked by compared with the measuring the deflection values. Also, the effects of the pre-deformed rubber mount on the system dynamic characteristics were investigated and the relation between the static stiffness variation of rubber mount and the natural frequence variation of system was discussed.

• 한국산학기술학회논문지
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• 제16권7호
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• pp.4405-4410
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• 2015

두 개의 1차원 주기 패턴을 수직으로 중첩시켜 상하층 패턴으로부터 이축 변위 정보를 각각 디코딩할 수 있는 방법을 제안한다. 투명한 상층 패턴 판별은 굴절률차에 기인한 레이저 빔의 디플렉션 검출을 통해 이뤄지고 하층 패턴 판별은 수광 전압 차의 검출를 통해 이뤄진다. 빌드 업 필름 재질의 상층 패턴은 UV 레이저 가공에 의해 미세가공되고 그리고 알루미늄 하층 패턴은 초정밀 머시닝에 의한 트렌치 가공과 불투명 소재 증착 그리고 폴리싱 과정을 통해 제작된다. 10마이크로미터 간격으로 제작된 샘플 패턴과 이를 인코딩할 수 있는 전용 광학계에 의한 변위 측정 방법은 대면적 스테이지에 장착되어 레이저 간섭계를 이용한 측정데이터와 비교하여 검증된다.

• Journal of Electrical Engineering and Technology
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• 제1권2호
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• pp.263-267
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• 2006

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

• 대한기계학회논문집B
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• 제25권11호
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• pp.1483-1491
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• 2001

Enhancement of pulsed-laser ablation by an artificially deposited liquid film is presented. Measurements of ablation rate, ablation threshold, and surface topography arc performed. Correlation between material ablation and photoacoustic effect is examined by the optical beam deflection method. The dependence of ablation rate on liquid-film thickness and chemical composition is also examined. The results indicate that photomechanical effect in the phase explosion of liquid is responsible for the enhanced ablation. The low critical temperature of liquid induces explosive vaporization with localized photoacoustic excitation in the superheat limit and increases the ablation efficiency. Experiments were carried out utilizing a Q-swiched Nd:YAG laser at near-threshold laser fluences with negligible plasma effect (up to ∼100 MW/cm$^2$).

• 한국정밀공학회지
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• 제24권9호
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• pp.95-102
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• 2007

The scanning electron microscope (SEM) is one of the most popular instruments available for the measurement and analysis of the micro/nano structures. It is equipped with an electron optical system that consists of an electron beam source, magnetic lenses, apertures, deflection coils, and a detector. The magnetic lenses playa role in refracting electron beams to obtain a focused spot using the magnetic field driven by an electric current from a coil. A SEM column usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present work concerns finite element analysis for the electron magnetic lenses so as to analyze their magnetic characteristics. To improve the performance of the magnetic lenses, the effect of the excitation current and pole-piece design on the amount of resulting magnetic fields and their peak locations are analyzed through the finite element analysis.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1198-1201
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• 2005

A new foxtail actuator driven by V-shape beam deflection using electrostatic force has been designed, fabricated and characterized for nano-resolution manipulators. The proposed foxtail mechanism was implemented using a pair of electrostatic actuators and a pair of holding actuators, which was analyzed based on the electromechanically coupled motion of voltage - displacement relation. The proposed actuator was fabricated onto Silicon-on-Insulator (SOI) wafer and its stepping characteristics were measured by micro optical interferometer consisting of integrated micromirror and optical fiber. The fabricated foxtail microactuator was successfully operated from 1nm to 76nm, and the magnitude of step displacement was controllable up from 26nm/cycles to 53nm/cycle by changing the voltage.

• 한국광학회지
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• 제18권6호
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• pp.426-431
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• 2007

초소형 전자칼럼을 위한 마이크로 자기장 디플렉터를 제작하여 저에너지 영역에서 디플렉터의 동작 특성을 확인하였다. 마이크로 디플렉터는 지름이 $500{\mu}m$의 원통형 코어에 감겨진 $100{\mu}m$ 지름의 Cu 코일로 구성되어 있다. 두 쌍의 디플렉터는 $10{\times}10mm$ 크기의 절연 기판에 고정되어 전자빔을 2차원 스캔할 수 있도록 고안되었다. 마이크로 자기장 디플렉터를 부착한 초소형 전자칼럼을 저전력으로 시험 구동한 결과 $100{\mu}m/A$의 편향 결과를 얻어 활용 가능성을 확인하였다.

• 연구논문집
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• 통권30호
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• pp.147-157
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• 2000

The filtered vacuum arc source (FVAS), which is adopted by magnetic filtering methode to remove the macro-particle in vacuum arc plasma, was composed of a torus structure with bending angle of 60 degree. The radius of torus was 266 mm, the radius of plasma duct was 80 mm and the total length was 600 mm. The magnet parts were consisted of one permanent magnet, one magnetic yoke and five solenoid magnets. The plasma duct was electrically isolated from the ground so that a bias voltage could be applied. The baffles inside plasma duct were installed in order to prevent the recoil effect of macro-particles. Graphite was used as the cathode material to coat the amorphic diamond film and its diameter was 80 mm. The amorphic diamond film attracts much attention due to its excellent mechanical, optical and tribological properties suitable for wide range of applications. The effects of solenoid magnet in plasma extraction were studied by computer simulation and experiment using Taguchi's method. The source and extraction magnet affected the arc stabilization. The extraction beam current was maximized with low value of the source magnet current and high value of the filtering magnet current. Optimum deposition condition was obtained when the currents of arc discharge, source, extraction, bending, deflection and outlet magnet were 30 A, 1 A, 3 A, 5 A, and 5 A, respectively.

• 한국산학기술학회논문지
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• 제19권11호
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• pp.1-7
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• 2018

마이크로칼럼에서는 전자빔을 스캔하기 위해 초소형화된 정전디플렉터를 사용하는 경우가 많다. 주로 두 개의 8중극 디플렉터(double octupole deflector)를 사용하는 경우가 많은데, 이는 스캔 영역을 넓게 하면서도 전자빔이 대물렌즈를 통과할 때에 광축 근처에 위치하도록 함으로써 수차를 작게 유지할 수 있는 장점이 있기 때문이다. 마이크로칼럼은 최종적으로는 멀티 칼럼 형태로 사용하여 전자빔 장비의 throughput을 높이고자 하는 목적으로 연구가 되고 있는데, 칼럼의 수가 많아지게 되면 각 부품에 연결되는 배선의 수도 함께 증가하게 된다. 이에 따라 정전렌즈, 디플렉터 등의 마이크로칼럼 부품 배선을 진공 챔버 밖에 있는 제어장비와 연결하는 과정에서 실질적인 문제에 봉착하게 된다. 이러한 문제를 완화하기 위하여 렌즈 수를 최소화할 수 있도록 대물렌즈를 제거한 마이크로칼럼 구조를 선택하여, 변형된 4중극 및 8중극 디플렉터의 동작을 전산모사 방법으로 연구하였다. 기본적으로 MEMS 공정을 적용하기 용이한 실리콘 디플렉터 구조에서 각 전극의 크기를 동일하게 하지 않고, 서로 다른 크기의 전극을 교대로 배치하도록 디자인하였다. 8중극과 4중극 디플렉터 각각에서 디플렉터 전압을 인가하는 구동전극의 크기에 변화를 주었을 때 스캔 영역과 디플렉터 중심점에서의 전기장의 변화를 조사하여 비교하였다. 스캔 영역은 디플렉터전압에 따라 선형적으로 비례하였다. 스캔영역과 중심점에서의 전기장 세기 모두 8중극 디플렉터에 비해 4중극 디플렉터에서 더 크게 나타났으며, 전극의 크기에 따라 약 1.3 ~ 2.0 배 큰 것으로 조사되었다.