• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.1198-1201
• /
• 2005

A new foxtail actuator driven by V-shape beam deflection using electrostatic force has been designed, fabricated and characterized for nano-resolution manipulators. The proposed foxtail mechanism was implemented using a pair of electrostatic actuators and a pair of holding actuators, which was analyzed based on the electromechanically coupled motion of voltage - displacement relation. The proposed actuator was fabricated onto Silicon-on-Insulator (SOI) wafer and its stepping characteristics were measured by micro optical interferometer consisting of integrated micromirror and optical fiber. The fabricated foxtail microactuator was successfully operated from 1nm to 76nm, and the magnitude of step displacement was controllable up from 26nm/cycles to 53nm/cycle by changing the voltage.

• Korean Journal of Optics and Photonics
• /
• v.10 no.6
• /
• pp.453-461
• /
• 1999

In this paper, we have studied on the effects of annular and quadrupole illuminations by changing their conditions for enhancing the pattern resolution and depth of focus (OaF) in the optical lithography system using KrF Eximer laser 0.248$\mu$m and 0.65 NA. As a result, it is revealed that each illumination condition to optimize the resolution and the OaF for the mask containing the assistance pattern is different under the annular illumination. And in case of quadrupole illumination, we could ascertain that the resolution and the OaF would be enhanced through changing the arrangement of each pole from the conventional X type (45 degrees) to some proper type according to the main pattern direction. ction.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.23 no.6
• /
• pp.590-595
• /
• 2014

We have investigated anamorphic prism lenses with distortions of 0.3-0.5%. We designed the plastic triangular lens and confirmed the minimum resolution using MTF graphs. Also we confirmed that the SVGA optical system can realize a resolution of $864{\times}648$ 56 megapixels. A distortion of about 0.5% aberration appears in the maximum field, and a finite beam aberration of about $15{\mu}m$ is confirmed. We made a mold based on the design data and completed the prism lens through exodus molding. We confirmed the shape error (< $30{\mu}m$) and surface roughness (> 40 nm) of the three sides. We made the video-information-display prototype glasses using prism lens by measuring the performance, we determined the distortion aberration (0.3%) and SVGA resolution. Our approach will enable fabrication of a portable large-screen display device for glasses and sunglasses for the domestic market and, after 2015, for the world market.

• Bulletin of the Korean Chemical Society
• /
• v.33 no.12
• /
• pp.4141-4144
• /
• 2012

This paper introduces a technique for resolving amino acids that combines the advantages of the conventional CSP (chiral stationary phase) method with the CMPA (chiral mobile phase additive) method. A commercially available chiral crown ether column, CROWNPAK CR(+), was used as the CSP and three cyclodextrins (${\beta}$-CD, ${\gamma}$-CD, HP-${\beta}$-CD) were used as the mobile phase additives. Chromatographic resolution was performed at $25^{\circ}C$ and $50^{\circ}C$ with or without sonication. A comparison of the chromatographic results under ultrasonic conditions with those under non-ultrasonic conditions showed that ultrasound decreased the elution time and enantioselectivity at all temperatures. In the case of the ${\beta}$-CD mobile phase additive, the elution time and enantioselectivity under ultrasonic condition were significantly higher than under non-sonic condition at all temperatures. Commercially available Chiralpak AD, Whelk-O2 and Pirkle 1-J columns were used as CSPs to examine more meticulously the effects of ultrasonication and temperature on the optical resolution. The optical resolution of some chiral samples analyzed at $25^{\circ}C$ and $50^{\circ}C$ with or without sonication was compared. As in the previous case, the enantioselectivity was lower at $25^{\circ}C$ but similar enantioselectivity was observed at $50^{\circ}C$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.14 no.1
• /
• pp.6-11
• /
• 2001

We studied the feasibility of optical lithography for the critical layers of 0.12${\mu}{\textrm}{m}$ DRAM assuming ArF excimer laser as a light source. To enhance the fidelity of aerial image and process margin, Phase shift mask (PSM) patterns as well as binary mask patterns are corrected with in-house developed Optical Proximity Correction (OPC) software. As the result, w found that the aerial image of critical layers of DRAM cell with 0.12${\mu}{\textrm}{m}$ design rule could not be reproduced with binary masks. But if we use PSM or optical proximity corrected PSM, the fidelity of aerial image ,resolution and process margin are so much enhanced that they could be processed with optical lithography.

• Journal of the Optical Society of Korea
• /
• v.16 no.1
• /
• pp.42-46
• /
• 2012

We have developed a fluorescence optical detection system using a digital micromirror device (DMD) for monitoring 3D cell culture matrices in situ. Full 3D imaging with fast scanning speed was implemented by the combined action of a DMD and a motorized stage. Imaging results with fluorescent microbeads measure the minimum axial resolution of the system as $6.3{\mu}m$, while full 1-mm scanning through 3D alginate-based matrix was demonstrated. For cell imaging, improved images were obtained by removing background fluorescence although the scanning distance was reduced because of low intracellular fluorescence efficiency. The system is expected to be useful to study various dynamics and behaviors of 3-dimensionally cultured cells in microfluidic systems.

• Journal of IKEEE
• /
• v.18 no.1
• /
• pp.19-24
• /
• 2014

We report stable, wideband, flat-topped, 10 GHz optical frequency comb generation from a semiconductor-based mode-locked ring laser with an intra-cavity high finesse Fabry-Perot etalon. We demonstrate a stable 10 GHz comb with greater than 200 lines within a spectral power variation below 1 dB, which is the largest value obtained from a similar mode-locked laser in our knowledge. Greater than 20 dB of the spectral peak to deep ratio at 0.02 nm resolution, ~92 femtosecond timing jitter over 1 kHz to 1 MHz range, and non-averaged time traces of pulses confirm very stable optical frequency comb lines.

• Proceedings of the IEEK Conference
• /
• 2002.06e
• /
• pp.201-204
• /
• 2002

A high accuracy ozone monitor using UV absorption method was developed for ambient ozone monitoring. The system was mainly composed of a high power pulsed xenon lamp as UV source, an optical spectrometer with a high sensitivity linear CCD array as UV detector and signal processing unit. The optical signal from the CCD array that provides unusually high response and excellent optical resolution for ozone concentration was converted to digital signal and the digital signal was displayed on screen using PC interface. The optical signal was propagated using optic fiber to reduce optical loss to increase the accuracy of the measuring system. This paper has been studied a interworking signalling protocol between two hybrid networks by analyzing Satellite B-ISDN architecture, DSS2 Layer 3 Signalling protocol, B-ISUP protocol, S-BISUP protocol stack and so on. Also in the paper, messages and primitives have been defined for B-ISDN's Connection Type, Ownership and each protocol in order to connect point-to-multipoint. The ozone sensing properties of the CCD ozone monitor was compared with those of the photo multiplier ozone monitor.

• Journal of the Optical Society of Korea
• /
• v.9 no.2
• /
• pp.49-53
• /
• 2005

We report a new configuration of a reflection-type confocal scanning optical microscope system for measuring the refractive index profile of an optical waveguide. Several improvements on the earlier design are proposed; a light emitting diode (LED) at 650 nm wavelength instead of a laser diode (LD) or He-Ne laser is used as a light source for better index precision, and a simple longitudinal linear scanning and curve fitting techniques are adapted instead of a servo control for maintaining an optical confocal arrangement. We have obtained spatial resolution of 700 nm and an index precision of $2\times10^{-4}$. To verify the system's capability, the refractive index profiles of a conventional multimode fiber and a home-made four-mode fiber were examined with our proposed measurement method.

• Journal of the Optical Society of Korea
• /
• v.9 no.2
• /
• pp.54-58
• /
• 2005

A novel mode analysis method and differential mode delay measurement technique for a multimode optical fiber based on optical frequency domain reflectometry has been proposed for the first time. We have used a conventional OFDR with a tunable external cavity laser and a Michelson interferometer. A few-mode optical multimode fiber was prepared to test our proposed measurement technique. The differential mode delay (DMD) of the sample fiber was measured to be 16.58 ps/m with a resolution of 1.5 ps/m. We have also compared the OFDR measurement results with those obtained using a traditional time-domain measurement method.