• 한국광학회:학술대회논문집
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• 한국광학회 1991년도 제6회 파동 및 레이저 학술발표회 Prodeedings of 6th Conference on Waves and Lasers
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• pp.81-87
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• 1991

A design of a four-mirror optical system for submicron lithography using KrF excimer laser beam(λ=248nm) is presented. By using the third order aberration theory, analytic solutions for a telecentric, flat-field, and anastigmatic four-spherical-mirror system (reduction magnification 5$\times$) are found. Aspherization is carried out to the spherical mirror surfaces in order to reduce the residual higher order aberrations and vignetting effect. Finally we obtain a reflection system useful in submicron lithographic application.

• 대한기계학회논문집A
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• 제26권6호
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• pp.1194-1202
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• 2002

A study on the topology optimization of a multi-spectral camera for space-use is presented. The optimization is carried out under self-weight and polishing pressure loading. A multi-spectral camera for space-use experiences degradation of optical image in the space, which can not be detected on the optical test bench on the earth. An optical surface deformation of a primary mirror, which is a principal component of the camera system, is an important factor affecting the optical performance of the whole camera system. In this study, topology optimization of the primary mirror of the camera is presented. As an objective function, a measure of Strehl ratio is used. Total mass of the primary mirror is given as a constraint to the optimization problem. The sensitivities of the objective function and constraint are calculated by direct differentiation method. Optimization procedure is carried out by an optimality criteria method. For the light-weight primary mirror design, a three dimensional model is treated. As a preliminary example, topology optimization considering a self-weight loading is treated. In the second example, the polishing pressure is also included as a loading in the topology optimization of the mirror. Results of the optimized design topology for the mirror with various mass constraints are presented.

• 한국광학회지
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• 제28권4호
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• pp.146-152
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• 2017

우주용 인공위성 카메라를 구성하는 반사경의 정렬은 광학계의 고분해능, 고성능을 얻기 위한 중요한 과정 중 하나이다. 반사경들의 상호정렬에는 큐브미러(cube mirror)가 대신 사용되기 때문에, 각 반사경과 해당 큐브미러 간의 상호위치관계 정보가 우선 필요하다. 따라서 우주용 카메라 반사경들의 정렬을 위해 각 반사경의 정점과 해당 큐브미러의 상대 좌표값을 정확하게 측정해야하며, 본 논문에서는 컴퓨터 제작 홀로그램(computer-generated hologram, CGH)의 정렬용 세그먼트와 광섬유를 이용하는 새로운 측정 시스템을 제안함으로써 우주용 카메라를 구성하는 반사경의 정점을 요구조건 이내로 측정할 수 있었다. 측정 시스템은 광학계 평가용 간섭계, CGH, 광섬유, 반사경으로 구성되어 있으며, 최종적으로 데오도라이트를 이용해 큐브미러를 기준으로 주 반사경의 정점에 위치한 광섬유 끝단의 3차원 상대 좌표값을 $25{\mu}m$ 이하의 정밀도로 측정할 수 있었다.

• 한국광학회지
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• 제11권3호
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• pp.163-165
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• 2000

한 쌍의 파장 다중화기/역 다중화기와 스위칭 가능한 거울을 이용한 새로운 구조의 광 크로스 커넥트를 제안하였다. 실험에서는 스위칭 가능한 거울로써 $2\times2$ 광스위치에 루프(loop) 구조의 광섬유 거울을 연결한 것을 사용하여 제안된 구조의 광 크로스 커넥트의 성능을 광스펙트럼의 영역에서 검증하였다.

• 한국정밀공학회지
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• 제25권8호
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• pp.21-28
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• 2008

Fizeau interferometer is used for inspecting the lens surface profile accurately. This study is focused on the design and optical measuring techniques for large optical components, such as a reflection mirror for large area lithography or astronomical purpose. A tower type Fizeau interferometer is designed and set up in horizontally with a 45$^{\circ}$ fold mirror which makes easy to align the optical path of heavy interferometer system. To align the optical path, a five-axes stage for the interferometer is required. This study shows a method of the 45$^{\circ}$ fold mirror alignment by using a three-axis stage instead of adjusting the interferometer itself or measuring object. This system will be installed on the large optics polishing machine during the manufacturing process as an on-machine inspection system.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집A
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• pp.920-925
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• 2001

A study on the topology optimization of a multi-spectral camera for space-use is presented. A multi-spectral camera for space-use experiences degradation of optical image in the space, which can not be detected on the optical test bench on the earth. An optical surface deformation of a primary mirror, which is a principal component of the camera system, under the self-weight loading is an important factor affecting the optical performance of the whole camera system. In this study, topology optimization of the primary mirror of the camera is presented. Total mass of the primary mirror is given as a constraint to the optimization problem. The sensitivities of the objective function and constraint are calculated by direct differentiation method. Optimization procedure is carried out by an optimality criterion method using the sensitivities of the objective function and the constraint. As a preliminary example, topology optimization considering a self-weight loading is treated. For practical use, the polishing pressure is included as a loading in the topology optimization of the primary mirror. Results of the optimized design topology for the primary mirror with varying mass ratios are presented.

• Journal of the Optical Society of Korea
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• 제16권3호
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• pp.243-246
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• 2012

An off-axis four-mirror-anastigmatic telescope is presented here which is composed of two aspheric surfaces and two spherical surfaces. The entrance pupil diameter is 290 mm and the stop is located at the primary mirror. The effective focal length is 900 mm. The strip field of view for the telescope is $15^{\circ}{\times}0.2^{\circ}$ and if the telescope is launched into an orbit about 400 km altitude, the observed range width will be more than 105 km within a scene without any other auxiliary scanning instrument. The spectral range can be as wide as from visual wave band to infrared wave band in the mirror system. This telescope can be used for environmental monitoring with different detectors whose pixel is adapted to the optical resolution. In this paper, the spectral range is chosen as 3.0 -5.0 ${\mu}m$, and center distance of the pixel is 30 ${\mu}m$. And the image quality is near the diffraction limit.

• 한국광학회:학술대회논문집
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• 한국광학회 1999년도 제16회 광학 및 양자전자 학술발표회Proceedings of 16th Optics and Quantum Electronics Conference, 1999
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• pp.128-129
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• 1999

Polygon Mirror Scanning(PMS) is composed of LED array, magnifying lens, polygon mirror and motor. It is important to correct the lens aberrations to gain the image we want to show. In this paper, we have simulated the lens aberration correction to reduce the spherical aberration . We have obtained a aspherical lens which is corrected the spherical aberration.

• 한국가스학회지
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• 제12권4호
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• pp.63-68
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• 2008

본 논문은 적외선 센서의 광 강도 및 효율을 증가시키기 위해 새로운 오목한 반사 벽면(curved mirror surface)과 기존의 수직 반사 벽면(vertical mirror surface)구조와의 모의해석 및 실험 결과에 대해 기술하였다. 모의해석 결과 수직 반사 벽면을 사용했을 때 적외선 센서 필터 표면에 도달하는 광의 분포는 타원 형상으로 적외선 센서 표면에 도달함을 볼 수 있고, 오목한 반사 벽면을 사용하는 경우에는 광이 원형상으로 집광되는 것을 볼 수 있었다. 따라서 초기 평행광의 면적보다 작은 면적으로 집광됨으로 인해 단위면적당 광 강도는 향상되고, 이에 따라 광학적 센서의 출력전압은 향상될 것이라 예측되었다. 이 모의해석을 근간으로 하여 $25^{\circ}C$, 45%R.H.에서 이산화탄소를 0 ppm에서 2500 ppm까지 250 ppm 간격으로 주입시켰을 때, 오목한 반사 벽면의 광 공동이 수직 반사 벽면의 광 공동보다 출력전압이 약 200 mV 증가하였다.

• 대한기계학회논문집A
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• 제24권11호
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• pp.2732-2741
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• 2000

Combination of magnetic recording technology and optical recording technology such as Near Field Optical Recording is watched recently. In order to accomplish this technology, the development of an electromagnetic driven mm-sized mirror shifting laser beam in track direction have to needed. In Near Field Optical Recording System, shifting laser beam in track direction mean as fine tracking and means as coarse tracking. Therefore in Near Field Optical Recording, 2-stage actuator is composed of servo controller in reading or recording information on disc layer. In our research, through design and simulation process of driven mm-sized mirror, we arrange systematically design process of driven mm-sized mirror having good frequency transfer characteristics. Design and simulation processes included modal analysis of spring, calculation of magnetic moment according to the number of turns and geometric configuration of coil and magnetic circuit analysis meaning that calculation of magnetic flux density in air gap of magnetic circuit. After that we design and make parts of driven mm-sized mirror, assemble and evaluate our electriomagnetic driven mm-sized mirror. we compared design values with actual characteristic values and present solution scheme. Through these processes we performed manufacturing of an electromagnetic driven mm-sized mirror having good frequency-domain characteristics and high sensitivity characteristics.