• Proceedings of the Optical Society of Korea Conference
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• 2005.07a
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• pp.286-287
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• 2005

• Journal of Industrial Technology
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• v.22 no.B
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• pp.241-249
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• 2002

Optical fiber is indispensable for optical communication systems that transmit large volumes of data at high speed, but super precision technology in sub-micron units is required for optical axis adjustment. We developed the automatic optical fiber by image processing and automatic loading system. we have developed 6-axis micro stage system for I/O optical fiber arrays, the initial automatic aligning system software for a input optical array by the image processing technique, fast I/O-synchronous aligning strategy, the automatic loading/unloading system and the automatic UV bonding mechanism. In order to adjust the alignment it used on PC based motion controller, a $10{\mu}m$ repeat-detailed drawing of automatic loading system is developed by a primary line up for high detailed drawing. Also, at this researches used the image processing system and algorithm instead of the existing a primary hand-line up and fiber input array and waveguide chip formed in line by automatic.

• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.17-21
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• 2010

Currently miniaturized electron-optical columns find their way into electron beam lithography systems. For better lithography process, it is required to make smaller spot size and longer working distance. But, the micro-columns of the multi-beam lithography system suffer from chromatic and spherical aberration, even when the electron beam is exactly on the symmetric axis of the micro-column. The off-axis error of the electron emitting source is expected to become worse with increasing off-axis distance of the focusing spot. Especially the electron beams far from the system optical axis have a non-negligible asymmetric intensity distribution in the micro-column. In this paper, the effect of the off-axis e-beam source is analyzed. To analyze this effect is to introduce a micro-column model of which the e-beam emitting source is aligned with the center of the electron beam by shifting them perpendicular to the system optical axis. The presented solution can be used to analysis the performance of the multi-electron-beam system. The performance parameters, such as the working distances and the focusing position are obtained by the computational simulations as a function of the off-axis distance of the emitting source.

• Korean Journal of Optics and Photonics
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• v.24 no.5
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• pp.271-278
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• 2013

The effective reflection coefficients of an obliquely incident wave on a multi-layered substrate coated with a uniaxially anisotropic alignment layer are derived. The effective reflection coefficients as well as explicit ellipsometric expressions are provided as a function of film constants of multiple layers together with magnitude of anisotropy, direction of optic axis, and thickness of the alignment layer. It is expected that by adapting these expressions to the conventional modelling technique, the ordinary refractive index, the extra-ordinary refractive index, the azimuth angle and the tilt angle of the optic axis, and the thickness of the aligned surface can be determined simultaneously together with the thickness and volume fraction of each layer beneath the alignment layer.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.81-86
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• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.302-302
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• 2000

This paper presents the measurement and correction of PCB alignment errors for PCB-manufacturing machines. The conventional PCB-manufacturing machine doesn't have enough accuracy to accommodate the demand for high-resolution circuit pattern and high-density mounting capacity of electronic chips. It is because of alignment errors of PCB loaded to the PCB-manufacturing machine. Therefore, this study focuses on the development of the system which is able to measure and correct alignment errors whit high-accuracy. An automatic optical inspection part measures the PCB alignment error using two cameras, and the high-accuracy 3-axis stage makes correct of these error. The operating system is run in the environment of Window 98 (or NT). Finally we implemented this system to PCB screen printer and PCB exposure system.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.31 no.11A
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• pp.1053-1058
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• 2006

In this paper, We proposed a efficient OSA(Optical Sub-Assembly) packaging method in use 1.31/1.49um bi-directional hybrid-integrated PLC chip for low-cost OSA in optical access network system applications as GE-PON in FTTH. Fabricated OSA with passive optical fiber alignment and nonhermetic plastic package method and measured optical coupling efficiency and electric-optical characteristics. Its performance is feasible to satisfy the GE-PON ONU specifications with the results as less than 0.5dB coupling losses within 40um alignment of z-axis and less than -24dBm sensitivity. It also has good temperature characteristics to sustain optical output power more than 1.5mW and 10dB extinction ratio, less than 0.3dB tracking error.

• Proceedings of the Optical Society of Korea Conference
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• 2008.02a
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• pp.385-386
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• 2008

• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.15-21
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• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.536-539
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• 2002

In this paper, we developed the automatic optical fiber aligner by image processing and automatic loading system. Optical fiber is indispensable for optical communication systems that transmit large volumes of data at high speed, but super-precision technology in sub-micron units is required for optical axis adjustment, we have developed 6-axis micro stage system for I/O optical fiber arrays, the initial automatic aligning system/software for a input optical array by the image processing technique, fast I/O-synchronous aligning strategy, the automatic loading/unloading system and the automatic UV bonding mechanism. In order to adjust the alignment it used on PC based motion controller, a $10\mu\textrm{mm}$ repeat-detailed drawing of automatic loading system is developed by a primary line up for high detailed drawing. Also, at this researches used the image processing system and algorithm instead of the existing a primary hand-line up. and fiber input array and waveguide chip formed in line by automatic. Therefore, the developed and manufactured optical aligning system in this research fulfills the great role of support industry for major electronics manufacturers, telecommunications companies, universities, government agencies and other research institutions.