• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 춘계학술대회 논문집
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• pp.131-132
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• 2015

$Ti_{0.26}Al_{0.16}Si_{0.01}N_{0.57}$ (at%) coatings were synthesized on stainless steel 304 by using arc ion plating systems (AIPS). Targets employed for the deposition were Ti, AlSi(67:33at%) and AlSi(82:18at%). The thickness of TiAlSiN coatings is $4{\mu}m$. The oxidation characteristics of the deposited coatings were studied by thermogravimetric analysis (TGA) in air between 800 and $900^{\circ}C$ for 75 hr. The oxide scale formed on the TiAlSiN coatings consisted of $rutile-TiO_2$ layer and ${\alpha}-Al_2O_3$. At $800^{\circ}C$, the coatings oxidized relatively slowly, and the scales were thin and adherent. When oxidized above $900^{\circ}C$, $TiO_2$ grew fast over the mixed oxide layer, and the oxide scale formed on TiAlSiN coatings was prone to spallation. Microstructural changes of the TiAlSiN coatings that occurred during high temperature oxidation were investigated by EPMA, XRD, SEM and TEM.

• 대한화학회지
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• 제38권1호
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• pp.1-7
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• 1994

알루미노인산염 족($AlPO_4-5$, BAPO-5, 그리고 SAPO-5)분자체의 구조 골격인 가교 $$T_1-OH-T_2$(T_1$ = Al, B 그리고 $T_2=$ P, Si) 안정성 및 가교 OH 그룹 이온성을 연구하기 위하여 반경험적 MNDO 계산 방법으로 연구하였다. 이러한 계산은 Al-OH-P, B-OH-P 그리고 Al-OH-Si덩어리 모델로써 실행하였다. Al-OH-P가교 모델에서 Al대신에 B원자를 치환할 때 B-OH-Si가교에서는 변형이 우선적으로 일어났으나, P 대신에 Si원자를 치환한 Al-OH-Si가교에서는 회전이 우선적으로 일어났다. 이러한 모델 덩어리에서 OH그룹 이온성 및 가교 안정성은 B-OH-P < Al-OH-P < Al-OH-Si 가교 순서로 증가하였다.

• Archives of Metallurgy and Materials
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• 제66권4호
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• pp.983-986
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• 2021

This study investigated the recovery behavior of valuable metals (Co, Ni, Cu and Mn) in spent lithium ion-batteries based on Al₂O₃-SiO₂-CaO-Fe₂O₃ slag system via DC submerged arc smelting process. The valuable metals were recovered by 93.9% at the 1250℃ for 30 min on the 20Al₂O₃-40SiO₂-20CaO-20Fe₂O₃ (mass%) slag system. From the analysis of the slag by Fourier-transform infrared spectroscopy, it was considered that Fe₂O₃ and Al₂O₃ acted as basic oxides to depolymerize SiO₄ and AlO₄ under the addition of critical 20 mass% Fe₂O₃ in 20Al₂O₃-40SiO₂-CaO-Fe₂O₃ (CaO + Fe₂O₃ = 40 mass%). In addition, it was observed that the addition of Fe₂O₃ ranging between 20 and 30 mass% lowers the melting point of the slag system.

• 한국분말재료학회지
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• 제14권6호
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• pp.354-361
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• 2007

The bi-materials with Al-Mg alloy and its composites reinforced with SiC and $Al_2O_3$ particles were prepared by conventional powder metallurgy method. The A1-5 wt%Mg and composite mixtures were compacted under $150{\sim}450\;MPa$, and then the mixtures compacted under 400 MPa were sintered at $773{\sim}1173K$ for 5h. The obtained bi-materials with Al-Mg/SiCp composite showed the higher relative density than those with $Al-Mg/Al_2O_3$ composite after compaction and sintering. Based on the results, the bi-materials compacted under 400 MPa and sintered at 873K for 5h were used for mechanical tests. In the composite side of bi-materials, the SiC particles were densely distributed compared to the $Al_2O_3$ particles. The bi-materials with Al-Mg/SiC composite showed the higher micro-hardness than those with $Al-Mg/Al_2O_3$ composite. The mechanical properties were evaluated by the compressive test. The bi-materials revealed almost the same value of 0.2% proof stress with Al-Mg alloy. Their compressive strength was lower than that of Al-Mg alloy. Moreover, impact absorbed energy of bi-materials was smaller than that of composite. However, the bi-materials with Al-Mg/SiCp composite particularly showed almost similar impact absorbed energy to $Al-Mg/Al_2O_3$ composite. From the observation of microstructure, it was deduced that the bi-materials was preferentially fractured through micro-interface between matrix and composite in the vicinity of macro-interface.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.153-156
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• 2005

원자층 증착 (atomic layer deposit : ALD) 방식으로 증착한 $Al_2O_3$의 건식식각 특성을 연구하였다. 전자 싸이클로트론 공진 (electron cyclotron resonance : ECR) 방식의 건식식각장치에서 source power, bias power, 압력 그리고 $Cl_2$ 가스를 변수로 하여 $Al_2O_3$의 식각속도와 Poly-Si 의 $Al_2O_3$에 대한 선택비를 측정하였다. bias power가 감소할수록 그리고 압력이 증가할수록 $Al_2O_3$의 식각속도는 감소하였고 Poly-Si 의 $Al_2O_3$에 대한 선택비는 증가하였다. 이 특성을 이용하여 TiN/$Al_2O_3$/Poly-Si 구조의 캐패시터와 Periphery 회로영역의 레지스터를 $Al_2O_3$를 식각 정지막으로 이용하여 구현하였다.

• 반도체디스플레이기술학회지
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• 제14권4호
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• pp.45-49
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• 2015

Using a combined CVD and ALD equipment system, multi-layer quantum well structures of $Al_2O_3/a-Si/Al_2O_3$ were fabricated on silicon Schottky junction devices and implemented to quantum well solar cells, in which the 1~1.5 nm thicknesses of the aluminum oxide films and the a-Si thin film layers were deposited at $300^{\circ}C$ and $450^{\circ}C$, respectively. Fabricated solar cell was operated by tunneling phenomena through the inserted quantum well structure being generated electrons on the silicon surface. Efficiency of the fabricated solar cell inserted with multi-quantum well of 41 layers has been increased by about 10 times that of the solar cell of pure Schottky junction solar cell.

• 한국세라믹학회지
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• 제25권3호
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• pp.231-236
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• 1988

$Al_2O_3$ 기지에 미치는 2차상의 영향을 알아보기 위하여 SiC 입자를 5~20vol.% 분산시키고 소결조제로서 $TiO_2$ 또는 RY_2O_3$를 2.5wt.%첨가하여 180$0^{\circ}C$, $N_2$분위기 중에서 90분간 상압소결 하였다. SiC함량이 증가함에 따라 소결체의 밀도는 감소하였지만 기계적 물성은 증가하여 $Y_2O_3$를 소결조제로 첨가한 경우, 꺾임강도는 525MPa, 경도는 17.1GPa,파괴인성은 4.1 MPa.$m^{1/2}$ 정도의 최고값을 나타내었고 반면 $TiO_2$를 소결조제로 첨가한 경우 꺾임강도 285MPa , 경도 12.1GPa 정도의 값을 나타냈다. 그리고 이와 같은 기계적 물성의 증진은 주로 SiC의 복합화에 따른 균열의 편향과 $Al_2O_3$ 의 입자성장억제효과에 의한 것으로 밝혀졌다.

• 한국세라믹학회지
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• 제35권3호
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• pp.303-309
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• 1998

The fabrication of Al2O3/Al composite by pressureless infiltration was investigated by the change of Mg and Si content in Al alloy infiltration process and infiltration atmosphere. The effect of alloying elements infiltration atmosphere and interfacial reactants between Al alloy matrix and Al2O3 particles were in-vestigated in terms of bendingstrength and harness test,. The fabrication of Al2O3/Al composite by the vestigated in terms of bending strength and hardness test. The fabrication of Al2O3/Al composite by the pressureless infiltration was done in nitrogen atmosphere with Mg in Al alloy. It was successfully fabricated at $700^{\circ}C$ according to Mg contents in Al alloy and infiltration condition. Because Mg in the Al alloy and ni-trogen atmosphere of infiltratio condition produced Mg-N compound(Mg3N2) it decreased the wetting an-gle between molten Al alloy and Al2O3 particles by coating on surface of Al2O3 particles. The fracture strength of Al2O3/Al-Mg composite was 800MPa and Al2O3/Al-Si-Mg composite was 400MPa. Si in Al alloy decreased the interfacial strength between Al alloy matrix and Al2O3 particles.

• Nuclear Engineering and Technology
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• 제53권12호
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• pp.3952-3965
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• 2021

In this study, volcanic ash was used as raw material to prepare waste forms with different silicon/aluminum (Si/Al) molar ratios to immobilize sodium-salt waste (SSW) containing simulated ¹³⁷Cs. Effects of Si/Al molar ratios (3:1 and 2:1) and sodium salts on sintering behavior of waste forms and immobilization mechanism of Cs⁺ were investigated. Results indicated that the main mineral phase of sintered waste-form matrixes was albite, and the formation of major phases was found to depend on Si/Al molar ratios. Si/Al molar ratio of 2 was favorable for the formation of pollucite, and the formation and crystallization of mineral phases were also decided based on physicochemical characteristics of sodium salts. Furthermore, product consistency test results indicated that the immobilization of Cs⁺ was related to Si/Al molar ratio, types of sodium salts, and glassy phase. Waste forms with Si/Al molar ratio of 2 exhibited better ability to immobilize Cs⁺, whereas the influence of sodium salts and glassy phases on the immobilization of SSW showed more complicated relationship. In waste forms with Si/Al molar ratio of 2, Cs⁺ leaching concentrations of samples containing Na₂B₄O₇·10H₂O and NaOH were low. Na₂B₄O₇·10H₂O easily transformed into liquid phase during sintering to consequently achieve low temperature liquid-phase sintering, which is beneficial to avoid the volatilization of Cs⁺ at high temperature. Results clearly reveal that waste forms with Si/Al molar ratio of 2 and containing Na₂B₄O₇·10H₂O show excellent immobilization of Cs⁺.

• 반도체디스플레이기술학회지
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• 제22권1호
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• pp.64-71
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• 2023

In this study, we investigated the effects of BiAlSiO glass composition on its glass forming range, thermal properties, and plasma resistance. The results showed that increasing the Al2O3 content suppressed the tendency for crystallization and hindered glass formation beyond a certain threshold. Bi2O3 was found to increase the content of non-bridging oxygen, resulting in a decrease in glass transition temperature and an increase in thermal expansion coefficient. Furthermore, the etching rate was found to improve with increasing Al2O3 content but decrease with increasing SiO2 content. It was concluded that the boiling point of fluorinated compounds should be considered to 900℃. Therefore, this study is expected to contribute to the understanding of the properties of BiAlSiO glass and its application to low temperature melting PRG compositions.