• Journal of the Korean Society for Precision Engineering
• /
• v.20 no.2
• /
• pp.104-111
• /
• 2003

Micro force measurement is required more frequently for a precision manufacturing and investment in fields of precision industries such as semiconductor, chemistry and biology, and so forth. Null balance method has been introduced as an alternative of a loadcell. Loadcells have advantages in aspects of low cost and easy manufacturing, but have also the limitation in resolution and sensitivity to environment variations. In this paper, null balance method is explained and the dominant parameters related to system performances are mentioned. Null position sensor, electromagnetic system and controller are investigated. Also, the characteristic experiment is carried out in order to estimate the resolution and the measurement range. In order to overcome the limitation by the drift of position sensor and the performance of controller, double electromagnetic force compensation method is proposed and experimented. After controlling and filtering, the resolution under $\pm$ 1mg and measurement range over 300g could be obtained.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.27 no.1
• /
• pp.183-193
• /
• 2003

Micro-weighing device by using null balance method is being essential part in fields of high-technology industries such as precision semiconductor industry, precision chemistry, biotechnology and genetics etc. Also, requirements for high resolution and for large measurement range increase more and more. The performance of the micro-weighing device can be determined by the mechanism design and analysis. The analytical design method has been proposed for the performance improvement such as resolution, measurement range and fast response. The 2-stage displacement amplification is designed to overcome the limit of conventional force transmitting lever. The parallel spring is designed for the measurement result independent of the input force position variation. Also, the natural frequency of mechanism is analyzed for the fast response. After each analysis, optimal design has been carried out. To verify the analysis and design result, characteristics experiments had been carried out after construction. Finally, the system had been controlled.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.1051-1054
• /
• 2003

For micro-weighing, null balance method is widely used in the precision industrial fields, such as biomedicine, semiconductor, chemistry and so on. In order to obtain high resolution and large measurement range simultaneously, the mechanism should be analyzed and optimized. However, large measurement error can be generated according to the mass loading position and this error is called as a corner loading error. The corner loading error is caused by the parallelism error of a Roberval mechanism used to minimize it. The corner loading error is one of the most dominant error sources that should be removed. It is possible to design that the mechanism has no corner loading error theoretically, but the mechanism of the micro weighing device is very difficult to be realized as original design due to assembling and manufacturing error. For the required specification of the device, the precise manufacturing technique under a few $\mu\textrm{m}$ is required for the realization of the design. In this paper, the effects of the parallelism error are analyzed by using Lagrange method and verified by experiment. Also, the compensation mechanism is proposed and the corner loading error is reduced by restoring tile parallelism.

• Journal of Sensor Science and Technology
• /
• v.29 no.5
• /
• pp.336-341
• /
• 2020

The deflection and null balance methods are used for precision force measurement in the precision industry. Since both methods are based on deformation, the performance of the load cell mechanism is important. In this study, the design variables were obtained via the free body diagram of a lever-linked Roberval mechanism (combined with a flexible hinge link and a Roberval mechanism), and the design characteristics were analyzed according to the weight method. Based on the design characteristics, the optimal design was conducted according to the weight method and FEM was used to verify its reliability.

• Journal of Sensor Science and Technology
• /
• v.7 no.1
• /
• pp.31-38
• /
• 1998

Multi-channel sensors can be used to increase the reliability and remove the random iloise in ion-sensitive field effect transistors(ISFETs). Multi-channel sensors is also an essential step toward potential fabrication of sensors for several ionic species in one device. However, when the multi-channel sensors are separately biased, the biasing problems become difficult, that is to say, the bias circuit is needed as many sensors. In this work, a circuit for biasing the four pH-ISFETs in null-balance method, where bias voltages are switched, was proposed. The proposed concept is need only one bias circuit for the four sensors. Therefore it has advantages of smaller size and lower power consumption than the case that all sensors are separately biased at a time. The proposed circuit was tested with discrete devices and its performance was investigated. In the recent trend, sensor systems are implemented as portable systems. So the verified measurement circuit was integrated by using the CMOS circuit. Fortunately, ISFET fabrication process can be compatible with CMOS process. Full circuit has a mask area of $660{\mu}m{\times}500{\mu}m$. In the future, this step will be used for developing the smart sensor system with ISFET.