• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.135-135
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• 2011

최근, 아이팟, 아이패드, 스마트폰 등의 휴대정보 기기의 수요가 급격히 증가하면서, 고집적성(테라비트급), 초소형, 초고속성, 고신뢰성을 확보할 수 있는 나노스케일(nano-scale)의 비휘발성 메모리(Non-volatile Memory; NVM) 소자 개발에 많은 연구가 집중되고 있다. 현재, 기존 CMOS 반도체 공정과 호환성이 우수하면서 고집적성의 특성이 가능한 전하트랩 플래시(Chrage Trap Flash : CTF) 메모리 소자가 차세대 비휘발성 메모리로써 각광 받고 있다. 하지만, 이러한 CTF 소자가 32 nm 이하로 스케일 다운이 되면서, ONO 층의 크기와 두께가 상당히 작고 얇아짐에 따라, 메모리 트랩수가 상당히 줄어들기 때문에 프로그램/소거 상태를 인지하는 메모리 윈도우의 마진을 확보하는데 어려움이 있다. 본 논문에서는 500 nm 크기를 갖는 폴리스티렌 비드(bead)를 이용한 나노 리소그래피 공정으로 질화막 표면에 roughness를 주어, 질화막과 블로킹 산화막의 경계면에 메모리 트랩의 표면적이 증가시켜, 메모리 윈도우 증가와 프로그램 속도를 개선을 구현하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.214-214
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• 2011

The adsorption and reactions of methanol and methyl iodide on ZnO(0001) and ZnO(11-20) single crystal surfaces have been investigated using the temperature programmed desorption (TPD) technique. The interaction of methanol and methyl iodide with ZnO is stronger on the polar ZnO(0001) surface than the non-polar ZnO(11-20) surface. On ZnO(0001), methanol is decomposed to produce formaldehyde and hydrogen. Two desorption features of formaldehyde and hydrogen are observed at around 500 and 580 K. The interaction of methanol and pre-adsorbed hydrogen has been also investigated. The reaction mechanism of methanol on ZnO will be proposed.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.476-476
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• 2012

Although plasma is an efficient means of microbial sterilization, mechanism of plasma effect on microorganisms still needs to be clarified. In addition, a limited number of studies are available on eukaryotic microorganisms such as yeast and fungi in relation to plasma application. Thus, we investigated cellular and molecular aspects of plasma effects on a filamentous fungus, Neurospora crassa by making use of argon plasma jet at atmospheric pressure. The viability and cell morphology of N. crassa spores exposed to plasma were both significantly reduced depending on the exposure time when treated in water. The intracellular genomic DNA content was dramatically reduced in fungal tissues after a plasma treatment and the transcription factor tah-3 was found to be required for fungal tolerance to a harsh plasma environment.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.245-246
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• 2011

Emission lines ratios were used for diagnostics of and excited level densities in low-temperature plasmas. In this work, an optical emission spectroscopy (OES) was used to determine the electron temperature and metastable level densities in low-pressure inductively coupled plasma. The emission spectroscopy method was based on a simple collisional-radiative model. The selected lines of the Ar(4p to 4s) were influenced by the radiation trapping at relatively high pressures where the plasma become optically thick. To quantify this effect, a pressure dependence factor ${\alpha}$(P) was derived by using corrections for the measured intensities. It was found that the lower metastable level densities were obtained when ${\alpha}$(P) increased with the increasing discharge pressure. The effect of non-Maxwellian electron energy distribution functions (EEDFs) on the metastables was also presented and discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.13-13
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• 2011

Graphene based nano-electronic and nano-electromechanical devices will be introduced in this presentation. The first part of the presentation will be covered by our recent results on the fabrication and physical properties of artificially twisted bilayer graphene. Thanks to the recently developed contact transfer printing method, a single layer graphene sheet is stacked on various substrates/nano-structures in a controlled manner for fabricating e.g. a suspended graphene device, and single-bilayer hybrid junction. The Raman and electrical transport results of the artificially twisted bilayer indicates the decoupling of the two graphene sheets. The graphene based electromechanical devices will be presented in the second part of the presentation. Carbon nanotube based nanorelay and A new concept of non-volatile memory based on the carbon nanotube field effect transistor together with microelectromechanical switch will be briefly introduced at first. Recent progress on the graphene based nano structures of our group will be presented. The array of graphene resonators was fabricated and their mechanical resonance properties are discussed. A novel device structures using carbon nanotube field effect transistor combined with suspended graphene gate will be introduced in the end of this presentation.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.11-11
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• 2011

In this talk, I will discuss roles of pseudo vector and scalar potential in changing physical properties of graphene systems. First, graphene under small uniaxial strain is shown to be described by the generalized Weyl's Hamiltonian with inclusion of pseudo vector and scalar potential simultaneously [1]. Thus, strained graphene is predicted to exhibit velocity anisotropy as well as work function enhancement without any gap. Second, if homogeneous strains with different strengths are applied to each layer of bilayer graphene, transverse electric fields across the two layers can be generated without any external electronic sources, thereby opening an energy gap [2]. This phenomenon is made possible by generation of inequivalent pseudo scalar potentials in the two graphene layers. Third, when very tiny lateral interlayer shift occurs in bilayer graphene, the Fermi surfaces of the system are shown to undergo Lifshitz transition [3]. We will show that this unexpected hypersensitive electronic topological transition is caused by a unique interplay between the effective non-Abelian vector potential generated by sliding motions and Berry's phases associated with massless Dirac electrons.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.05a
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• pp.269-272
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• 2006

Surface contacts between mold and target should be in parallel for the imprinting mechanism. However, the size of contacting area makes it difficult for both mating surfaces to be in all contact because of precision level of the imprinting machine and the waviness of mold and target. The gripping force for both mold and target with the vacuum chuck is also major effect to interrupt the full contact, which must be avoided in imprinting mechanism. In this study, the preliminary study for the causes of non-uniformity of contacting surfaces such as mold and target is performed with $470{\times}370mm^2$ LCD panel size.

• Proceedings of the Korean Vacuum Society Conference
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• 2008.08a
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• pp.144-145
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• 2008

• Journal of the Korean Vacuum Society
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• v.7 no.s1
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• pp.25-29
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• 1998

$SiO_2$ thin films embedded with Ge microcrystallites (Ge-$SiO_2$) were prepared by use of r.f. co-sputtering technique from a Ge, $SiO_2$ composite target. The size of Ge crystallites can been modulated by the experiment parameters. The optical absorption and non-linear optical properties of Ge-$SiO_2$ films were measured. The blue shift of the optical absorption edge, the saturated absorption and two-photon absorption under the condition of resonant absorption have been observed, and are discussed according to the quantum confinement effect.

• Bulletin of the Korean Chemical Society
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• v.24 no.10
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• pp.1437-1443
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• 2003

Thermal decomposition of hydrated surface layer of $Mg(OH)_2$ at $500^{\circ}C$ in vacuum turned non-porous MgO into porous one with high surface area of around $270 m^2$/g. Most of its surface area, 74 %, was from micropores, and rest of it was from mesopores in wedge-shaped slits, exhibiting bimodal size distribution centered around 30 and 90${\AA}$. Rehydration followed by subsequent dehydration at $300 ^{\circ}C$ in dynamic vacuum further raised the surface area to 340 $m^2$/g. Fraction of microporous surface area was increased to 93%, and the shape of the mesopores was modified into parallel slits with a specific dimension of 32 ${\AA}$. Application of $Fe_2O_3$ over MgO via iron complex formation did not alter the pore characteristics of MgO core, except slightly increased pore dimension. Over the course of the modification, $Fe_2O_3$ stayed on the surface possibly via spill-over reaction.