• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.792-795
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• 2005

The guide-ways of precision machine tools are one of important element of machine tools. It has usually a pair of surfaces for constraint of one direction with bearing. In the case of precision machine tools, non-contact bearing such as hydrostatic bearing and aerostatic bearing is adopted usually. In this case, profiles of rails has effect on straightness and the clearance of bearing has effect on stiffness of guide way, which changes to higher if clearance changes to smaller. The clearance is varied along moving table according to relative distance of pair of rails. The relative distance of pair of rail can be divided by three properties. First and second properties are straightness of each pair of rail and bearing pad. And, third is parallelism about pair of rails and pairs of bearing pad. There are several methods for measuring straightness of each surface such as reversal method, sequential two point method, and way straightness. These straightness measuring methods are always acquiring deviation of profile from eliminating linear fitted inclined line and don't have the information of parallelism. Therefore, to get the small clearance for high stiffness, the straightness of rail and bearing pad and parallelism about pair of rails and pair of bearing pads are measured for correction such as regrinding, reassembling and lapping. In this research, new and easy method for measuring parallelism of pair of rails is suggested. Two displacement probe and sensor stage, which is carry on the displacement sensor, are needed. The simulation and experiment was accomplished about pair of horizontal guide way to confirm the measurement of parallelism. And, the third probe is added to measure the straightness of each rails by sequential two point method. From the estimation of combined these two methods, it is confirmed that the profiles of a pairs of rails can be measured.

• Tribology and Lubricants
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• v.36 no.1
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• pp.39-46
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• 2020

Air stages are usually applied to precision engineering in sectors such as the semiconductor industry owing to their excellent performance and extremely low friction. Since the productivity of a semiconductor depends on the acceleration and deceleration performance of the air stage, many attempts have been made to improve the speed of the stage. Even during sudden start or stop sequences, the stage should maintain an air film to avoid direct contact between pad and the rail. The purpose of this study is to quantitatively predict the dynamic behavior of the air stage when acceleration and deceleration occur. The air stage is composed of two parts; the stage and the guide-way. The stage transports objects to the guideway, which is supported by an externally pressurized gas bearing. In this study, we use COMSOL Multiphysics to calculate the pressure of the air film between the stage and the guide-way and solve the two-degree-of-freedom equations of motion of the stage. Based on the specified velocity conditions such as the acceleration time and the maximum velocity of stage, we calculate the eccentricity and tilting angle of the stage. The result shows that the stiffness and damping of the gas bearing have non-linear characteristics. Hence, we should consider the operating conditions in the design process of an air stage system because the dynamic behavior of the stage becomes unstable depending on the maximum velocity and the acceleration time.

• Journal of Yeungnam Medical Science
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• v.20 no.2
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• pp.160-168
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• 2003

Background: Confirm the stability of intervertebral disc sustaining each fused lumbar spine cases, comparing vertical compression, A-P shear force and rotational moment on intervertebral disc of instrumented lumbar spine with simple vertical compression load and follower load using finite element analysis. Materials and Methods: We analyze the stability of intervertebral disc L4-5 supporting fused lumbar spine segments. After performing finite element modelling about L1-L5 lumbar vertebral column and L1-L4 each fusion level pedicle screw system for fused lumbar spine fine element model. Intervertebral discs with complex structure and mechanical properties was modeled using spring element that compensate stiffness and tube-to-tube contact element was employed to give follower load. Performing geometrical non-linear analysis. Results: The differences of intervertebral disc L4-5 behavior under the follower compression load in comparision with vertical compression load are as follows. Conclusion: As a result of finite element interpretation of instrumented lumbar spine, the stability of L4-5 sustaining fused lumbar segment, the long level fused lumbar spine observed hing stability under follower load. This research method can be the basis tool of effects prediction for instrumentation, a invention of a more precious finite element interpretation model which consider the role of muscle around the spine is loaded.