• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.287-287
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• 2011

ITRS(international technology roadmap for semiconductors)에 따르면 MOS (metal-oxide-semiconductor)의 CD(critical dimension)가 45 nm node이하로 줄어들면서 poly-Si/SiO2를 대체할 수 있는 poly-Si/metal gate/high-k dielectric이 대두되고 있다. 일반적으로 metal gate를 식각시 정확한 CD를 형성시키기 위해서 plasma를 이용한 RIE(reactive ion etching)를 사용하고 있지만 PIDs(plasma induced damages)의 하나인 PICD(plasma induced charging damage)의 발생이 문제가 되고 있다. PICD의 원인으로 plasma의 non-uniform으로 locally imbalanced한 ion과 electron이 PICC(plasma induced charging current)를 gate oxide에 발생시켜 gate oxide의 interface에 trap을 형성시키므로 그 결과 소자 특성 저하가 보고되고 있다. 그러므로 본 연구에서는 이에 차세대 MOS의 metal gate의 식각공정에 HDP(high density plasma)의 ICP(inductively coupled plasma) source를 이용한 중성빔 시스템을 사용하여 PICD를 줄일 수 있는 새로운 식각 공정에 대한 연구를 하였다. 식각공정조건으로 gas는 HBr 12 sccm (80%)와 Cl2 3 sccm (20%)와 power는 300 w를 사용하였고 200 eV의 에너지로 식각공정시 TEM(transmission electron microscopy)으로 TiN의 anisotropic한 형상을 볼 수 있었고 100 eV 이하의 에너지로 식각공정시 하부층인 HfO2와 높은 etch selectivity로 etch stop을 시킬 수 있었다. 실제 공정을 MOS의 metal gate에 적용시켜 metal gate/high-k dielectric CMOSFETs의 NCSU(North Carolina State University) CVC model로 effective electric field electron mobility를 구한 결과 electorn mobility의 증가를 볼 수 있었고 또한 mos parameter인 transconductance (Gm)의 증가를 볼 수 있었다. 그 원인으로 CP(Charge pumping) 1MHz로 gate oxide의 inteface의 분석 결과 이러한 결과가 gate oxide의 interface trap양의 감소로 개선으로 기인함을 확인할 수 있었다.

• Journal of Korea Spatial Information System Society
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• v.10 no.1
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• pp.51-63
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• 2008

Previous studies for routing In USN (Ubiquitous Sensor Networks) appear to be unreliable due to the dependence on non-spatial data and the lack of map overlay analysis. Multiple spatial parameters and radio propagation modeling techniques were integrated to derive RSSI (Received Signal Strength Indicator) value between route nodes and produce a highly reliable path map. It was possible to identify area-wide patterns of USN route subject to many different Influences (e.g. the specific effects of radio blocking factors such as the visible area, road area, cell duplicated area, and building density), which cannot be acquired by traditional non-spatial modeling. The quantitative evidence concerning the USN route for individual cell as well as entire study area would be utilized as major tools to visualize paths in real-time and to select alternative path when failure or audition of route node occurs.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.125-125
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• 2018

반도체 소자의 미새화에 따라 선폭이 10nm 이하로 줄어듦에 따라, 금속 배선의 저항이 급격하게 상승하고 있다. Cu는 낮은 저항과 높은 전도도를 가지고 있어 현재 배선물질로써 가장 많이 사용되고 있지만, 소자가 미세화됨에 따라 Cu를 미래의 배선물질로써 계속 사용하기에는 몇 가지 문제점이 제기되고 있다. Cu는 electron mean free path (EMFP)가 39 nm로 긴 특성을 가지기 때문에, 선폭이 줄어듦에 따라 surface 및 grain boundary scattering이 증가하여 저항이 급격하게 증가한다. 또한, technology node에 따른 소자의 operating temperature와 current density의 증가로 인해 Cu의 reliability가 감소하게 된다. 텅스텐은 EMFP가 19 nm로 짧은 특성을 가지고 있어, 소자의 크기가 줄어듦에 따라 Cu보다 낮은 저항 특성을 가질 수 있으며, 녹는점이 3695K로 1357K인 Cu보다 높으므로 배선물질로써 Cu를 대체할 가능성이 있다. 본 연구에서는 Inductively Coupled Plasma (ICP) assisted magnetron sputtering을 통해 매우 얇은 텅스텐 박막을 증착하여 저항을 낮추고자 하였다. 고밀도 플라즈마의 방전을 위해, internal-type coil antenna를 사용하였으며 텅스텐 박막의 증착을 위해 DC sputter system이 사용되었다. 높은 에너지를 가진 텅스텐 이온을 이용하여 낮은 온도에서 고품위 박막을 증착할 수 있었으며, dense한 구조의 박막 성장이 가능하였다. ICP assisted를 이용하여 증착했을 때와, 그렇지 않을 때를 비교하여 ICP 조건에 따라서 박막의 저항이 감소함을 확인할 수 있었을 뿐만 아니라 최대 약 65% 감소함을 확인할 수 있었다. XRD를 이용하여 ICP power를 인가했을 때, 높은 저항을 갖는 A-15 구조를 가진 ${\beta}$ peak의 감소와 낮은 저항을 갖는 BCC 구조를 가진 ${\alpha}$ peak의 증가를 상온과 673K에서 증착한 박막 모두에서 확인하였으며, 이를 통해 ICP power가 저항 감소에 영향을 미친다는 것을 확인하였다. 또한, 두 온도 조건에서 grain size를 계산하여 ICP power를 인가함에 따라 두 조건 모두 grain size가 증가하였음을 조사하였다. 또한, XPS 분석을 통해 ICP power를 인가하였을 때 박막의 저항에 많은 영향을 끼치는 O peak이 감소하는 것을 통해 ICP assisted의 효과를 확인하였다. 이를 통해, ICP assisted magnetron sputtering을 통해 텅스텐 박막을 증착함으로써 차세대 배선물질로써 텅스텐의 가능성을 확인할 수 있었다.

• The Bulletin of The Korean Astronomical Society
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• v.36 no.2
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• pp.122.2-122.2
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• 2011

For more than a decade, NEA (Near-Earth Asteroid) survey teams equipped with 1 meter-class telescopes discovered thousands of NEAs in the northern sky. As of August 2011, some 8,200 NEAs have been cataloged, yet only five percent of them has been investigated for their physical and chemical properties. In order to improve current situation, we propose a deep ecliptic survey utilizing KMTNet, for detection and characterization of NEAs in the southern sky. Thanks to the wide-field capability (four square degrees) of the telescopes, we will be able to considerably expand the search volume carrying out precision photometry down to 21.5th magnitude. We plan to focus our survey on opposition and two "sweet spots" in the ecliptic belt. Since SDSS colors characterize mineralogical properties of NEAs, g', r', i', z' filters will be employed. Based on the round-the-clock observation, we will study their rotational properties; for multiple systems, mass, density and other physical parameters can be obtained. We plan to maintain a dedicated database of the physical and mineralogical properties of NEAs. With this archive, it is expected that our understanding on the population will see a drastic change. We also plan to participate in the GAIA Follow-Up Network for ground based observation of the Solar System Objects (GAIA-FUN-SSO). The follow- up astrometry will be performed upon alerts issued by the GAIA-FUN-SSO Central Node in France.

• Journal of the Institute of Electronics Engineers of Korea CI
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• v.47 no.3
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• pp.83-89
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• 2010

Scalable routing is one of the key challenges in designing and operating large scale MANETs. Performance of routing protocols proposed so far is only guaranteed under various limitation, i.e., dependent of the number of nodes in the network or needs the location information of destination node. Due to the dependency to the number of nodes in the network, as the number of nodes increases the performance of previous routing protocols degrade dramatically. We propose Cluster Overlay Dynamic Source Routing (CODSR) protocol. We conduct performance analysis by means of computer simulation under various conditions - diameter scaling and density scaling. Developed algorithm outperforms the DSR algorithm, e.g., more than 90% improvement as for the normalized routing load. Operation of CODSR is very simple and we show that the message and time complexity of CODSR is independent of the number of nodes in the network which makes CODSR highly scalable.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.23 no.11
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• pp.1248-1255
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• 2012

LDPC decoder architectures are generally classified into serial, parallel and partially parallel architectures. Conventional method of LDPC decoding in general give rise to a large number of computation operations, mass power consumption, and decoding delay. It is necessary to reduce the iteration numbers and computation operations without performance degradation. This paper studies horizontal shuffle scheduling(HSS) algorithm and self-correction normalized min-sum(SC-NMS) algorithm. In the result, number of iteration is half than conventional algorithm and performance is almost same between sum-product(SP) and SC-NMS. Finally, This paper implements high-speed LDPC decoder based on FPGA. Decoding throughput is 816 Mbps.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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• 2004.11a
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• pp.62-67
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• 2004

Many ships in voyage experience weight and buoyancy distribution change by various reasons such as change of sea water density and waves, weather condition, and consumption of fuel, provisions, etc . The weight and buoyancy distribution change can bring the ships out of allowable trim, heeling angle. In these case, the ships should adjust trim and heeling angle by shifting of liquid cargo or ballasting, deballasting of ballast tanks for recovery of initial state or for a stable voyage. But, if the adjustment is performed incorrectly, ship's safety such as longitudinal strength, intact stability, propeller immersion, wide visibility, minimum forward draft cannot be secured correctly. So it is required that the adjustment of trim and heeling angle should be planned not by human operators but by optimization computer algorithm. To make an optimized plan to adjust trim and heeling angle guaranteeing the ship's safety and quickness of process, Uk! combined mechanical analysis and optimization algorithm. The candidate algorithms for the study were heuristic algorithm, meta-heuristic algorithm and uninformed searching algorithm. These are widely used in various kinds of optimization problems. Among them, heuristic algorithm $A^\ast$ was chosen for its optimality. The $A^\ast$ algorithm is then applied for the study. Three core elements of $A^\ast$ Algorithm consists of node, operator, evaluation function were modified and redefined. And we analyzed the $A^\ast$ algorithm by considering cooperation with loading instrument installed in most ships. Finally, the algorithm has been applied to tanker ship's various conditions such as Normal Ballast Condition, Homo Design Condition, Alternate Loading Condition, Also the test results are compared and discussed to confirm the efficiency and the usefulness of the methodology developed the system.

• Journal of the Korean Institute of Intelligent Systems
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• v.18 no.1
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• pp.122-126
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• 2008

Integrating a 3D solid modeler with a general purpose FEM code, an automatic stress intensity factor analysis system of the 3D crack problems has been developed. A geometry model, i.e. a solid containing one or several 3D cracks is defined. Several distributions of local node density are chosen, and then automatically superposed on one another over the geometry model by using the fuzzy knowledge processing. Nodes are generated and quadratic tetrahedral solid elements are generated by the Delaunay triangulation techniques. Finally, the complete finite element(FE) model generated, and a stress analysis is performed. This paper describes the methodologies to realize such functions, and demonstrates the validity of the present system.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.20 no.10
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• pp.1881-1886
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• 2016

In this paper, by using D2D communications that perform direct communications among devices within small transmission range of each device without base station, we assume that a device generates and transmits data packets to other proximate devices and the devices which receive the data packets relay those to other adjacent devices. To maximize the total number of devices which successfully receive data packets, Epidemic routing protocol is considered in this paper. In Epidemic routing protocol, all devices which received data packets try to relay the packets to other adjacent devices. We assume various network environment where devices are densely distributed in specific area(crowded area). In this environment, D2D SD can be a source node and D2D devices can be relay nodes. By setting transmission range of D2D SD and D2D devices as parameters, we analyze performance results of coverage probability of Epidemic routing protocol through intensive simulations.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.33 no.6B
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• pp.403-410
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• 2008

In this paper, we investigate the performance of MMR system in Non-transparent mode. The IEEE 802.16j MMR system has two node of operation, Single-frame (in band) and Multi-frame (out band) mode. In the analysis, we assume that channel interference between MR-BS and RS, or between RSs anywhere in the given area is ignored. The performance is presented in terms of the delay and the frame efficiency by varying number of RS and BS coverage to RS coverage ratio and the maximum coverage area of a BS by varying traffic density. Analytical results show that the Single-frame is more efficient than Multi-frame in frame efficiency and coverage extension.