• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.357.2-357.2
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• 2014

Ruthenium (Ru) 박막은 우수한 화학적 열적 안정성 및 높은 일함수(4.7eV) 특성으로 인해 20 nm급 이하의 차세대 DRAM capacitor의 전극 물질 및 Cu metalization을 위한 seed layer로 각광을 받고 있다. Ru박막의 나노스케일 정보전자소자로의 적용을 위해서는 두께제어가 용이하고 3D 구조에서 우수한 단차 피복 특성을 갖는 atomic layer deposition (ALD)을 이용한 박막 형성이 필수적이다. 이에 본 연구에서는 ALD 방법을 이용하여 0가의(cymene) (1,5-hexadiene) Ru (0) (C16H24Ru) 전구체를 합성, ALD 방법을 이용하여 우수한 초기성장거동을 갖는 Ru 박막을 증착 하였다. 형성된 Ru 박막의 표면 형상, 두께, 밀도를 주사전자현미경(Scanning electron microscopy)과 X-선 반사율 측정(X-ray reflectometer)으로 조사하였다. 또한 전기적 특성을 4침법(four-point-probe)으로 측정하였고, 박막의 화학적 조성과 결정성의 정보를 X-선 광전자분광법(X-ray photoelectron spectroscopy)과 X-선 회절(X-ray diffraction)을 이용하여 확인하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.386.1-386.1
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• 2014

The ionic polymer-metal composite (IPMC), a type of electro-active polymer material, has received enormous interest in various fields such as robotics, medical sensors, artificial muscles because it has many advantages of flexibility, light weight, high displacement, and low voltage activation, compare to traditional mechanical actuators. Mostly noble metal materials such as gold or platinum were used to form the electrode of an IPMC by using electroless plating process. Furthermore, carbon-based materials, which are carbon nanotube (CNT) and reduced graphene-CNT composite, were used to alter the electrode of IPMC. To form the electrode of IPMC, we employ the synthesized graphene on copper foil by chemical vapor deposition method and use the transfer process by using a support of PET/silicone film. The properties of graphene were evaluated by Raman spectroscopy, UV/Vis spectroscopy, and 4-point probe. The structure and surface of IPMC were analyzed via field emission scanning electron microscope. The fabricated IPMC performance such as displacement and operating frequency was measured in underwater.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.302-302
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• 2011

The binary chalcogenide semiconductor Bi2Se3 is at the center of intensive research on a new state of matter known as topological insulators. It has Dirac point in their band structures with robust surface states that are protected against external perturbations by strong spin-orbit coupling with broken inversion symmetry. Such unique band configurations were confirmed by recent angle-resolved photoelectron emission spectroscopy experiments with an unwanted n-type doping effect, showing a Fermi level shift of about 0.3 eV caused by atomic defects such as Se vacancies. Since the number of defects can be reduced using the molecular beam epitaxy (MBE) method. We have prepared the Bi2Se3 film on noble metal Au(111) and semiconductor Si(111) substrates by MBE method. To characterize the film, we have introduced several surface sensitive techniques including x-ray photoemission electron spectroscopy (XPS) and micro Raman spectroscopy. Also, crystallinity of the film has been confirmed by x-ray diffraction (XRD). Using home-built scanning tunneling microscope, we observed the atomic structure of quintuple layered Bi2Se3 film on Au(111).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.37 no.4
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• pp.347-357
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• 2024

Oxide semiconductor gas sensors are widely used for detecting toxic, explosive, and flammable gases due to their simple structure, cost-effectiveness, and potential integration into compact devices. However, their reliable gas detection is hindered by a longstanding issue known as humidity dependence, wherein the sensor resistance and gas response change significantly in the presence of moisture. This problem has persisted since the inception of oxide semiconductor gas sensors in the 1960s. This paper explores the root causes of humidity dependence in oxide semiconductor gas sensors and presents strategies to address this challenge. Mitigation strategies include functionalizing the gas-sensing material with noble metal/transition metal oxides and rare-earth/rare-earth oxides, as well as implementing a moisture barrier layer to prevent moisture diffusion into the gas-sensing film. Developing oxide semiconductor gas sensors immune to humidity dependence is expected to yield substantial socioeconomic benefits by enabling medical diagnosis, food quality assessment, environmental monitoring, and sensor network establishment.

• The Journal of Korean Academy of Prosthodontics
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• v.35 no.1
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• pp.118-129
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• 1997

The purpose of this study was to evaluate the shock absorbing effect of 4 restorative materials and intramobile connector. The damping effect of four restorative materials used to veneer test crown rigidly connected to IMZ implant and subjected to an impact force was measured. These materials included a gold alloy(stabilor G) : a noble metal ceramic alloy(Degudent H) : porcelain(Duceram) : composite resin(Dentacolor). In addition, this study compared damping effect of same restoretive materials after using polyoxymethylene intramobile connector(POM IMC). The result of this study suggest that : In case of using metal IMC 1. Veneered composite resin(group IV) reduced the impact force by 75%, when compared to an equivalent thickness of porcelain(group III). Group IV reduced the impact force by 87% and 89%, respectively, when compared to Stabilor G(group I) and Degudent H(group II). 2. The impact force recorded was higher for the alloy with the higher elastic modulus.(Stabilor G, group I, Young's modulus 107 Gpa, versus Degudent H, Group II, Young's modulus 95 Gpa) 3. It took the longest time for composite resin veneered group(IV) to reach to peak force when compared group I, II, III. In case of using POM IMC 4. The mean impact force recorded were reduced by 79%(group I), 78%(group II), 69%(group III), 84%(group IV), respectively, when compared to using metal IMC. 5. The time required to reach the peak force were increased by 78%(group I, II) 87%(group III), 34%(group IV), respectively, when compared to using metal IMC>.

• Journal of Surface Science and Engineering
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• v.49 no.2
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• pp.159-165
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• 2016

The hydrogen has been recognized as a clean, nonpolluting and unlimited energy source that can solve fossil fuel depletion and environmental pollution problems at the same time. Water electrolysis has been the most attractive technology in a way to produce hydrogen because it does not emit any pollutants compared to other method such as natural gas steam reforming and coal gasification etc. In order to improve efficiency and durability of the water electrolysis, comprehensive studies for highly active and stable electrocatalysts have been performed. The platinum group metal (PGM; Pt, Ru, Pd, Rh, etc.) electrocatalysts indicated a higher activity and stability compared with other transition metals in harsh condition such as acid solution. It is necessary to develop inexpensive non-noble metal catalysts such as transition metal oxides because the PGM catalysts is expensive materials with insufficient it's reserves. The optimization of operating parameter and the components is also important factor to develop an efficient water electrolysis cell. In this study, we optimized the operating parameter and components such as the type of AEM and density of gas diffusion layer (GDL) and the temperature/concentration of the electrolyte solution for the anion exchange membrane water electrolysis cell (AEMWEC) with the transition metal oxide alloy anode and cathode electrocatalysts. The maximum current density was $345.8mA/cm^2$ with parameter and component optimization.

• Journal of Powder Materials
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• v.21 no.2
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• pp.119-123
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• 2014

Pt has been widely used as catalyst for fuel cell and exhausted gas clean systems due to its high catalytic activity. Recently, there have been researches on fabricating composite materials of Pt as a method of reducing the amount of Pt due to its high price. One of the approaches for saving Pt used as catalyst is a core shell structure consisting of Pt layer on the core of the non-noble metal. In this study, the synthesis of Pt shell was conducted on the surface of $TiO_2$ particle, a non-noble material, by applying ultraviolet (UV) irradiation. Anatase $TiO_2$ particles with the average size of 20~30 nm were immersed in the ethanol dissolved with Pt precursor of $H_2PtCl_6{\cdot}6H_2O$ and exposed to UV irradiation with the wavelength of 365 nm. It was confirmed that Pt nano-particles were formed on the surface of $TiO_2$ particles by photochemical reduction of Pt ion from the solution. The morphology of the synthesized Pt@$TiO_2$ nano-composite was examined by TEM (Transmission Electron Microscopy).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.117-117
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• 2008

In MIM capacitor, poly-Si bottom electrode is replaced with metal bottom electrode. Noble metals can be used as bottom electrodes of capacitors because they have high work function and remain conductive in highly oxidizing conditions. In addition, they are chemically very stable. Among novel metals, Ru (ruthenium) has been suggested as an alternative bottom electrode due to its excellent electrical performance, including a low leakage of current and compatibility to high dielectric constant materials. Chemical mechanical planarization (CMP) process has been suggested to planarize and isolate the bottom electrode. Even though there is a great need for development of Ru CMP slurry, few studies have been carried out due to noble properties of Ru against chemicals. In the organic chemistry literature, periodate ion ($IO_4^-$) is a well-known oxidant. It has been reported that sodium periodate ($NaIO_4$) can form $RuO_4$ from hydrated ruthenic oxide ($RuO_2{\cdot}nH_2O$). $NaIO_4$ exist as various species in an aqueous solution as a function of pH. Also, the removal mechanism of Ru depends on solution of pH. In this research, the static etch rate, passivation film thickness and wettability were measured as a function of slurry pH. The electrochemical analysis was investigated as a function of pH. To evaluate the effect of pH on polishing behavior, removal rate was investigated as a function of pH by using patterned and unpatterned wafers.

• Clean Technology
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• v.18 no.1
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• pp.89-94
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• 2012

In this study, we investigated the activity of Pd and Pt supported on acidic Fe-ZSM5 supports for selective catalytic oxidation of ammonia ($NH_3$-SCO). Among the catalysts, Pt/Fe-ZSM5 catalyst exhibited superior $NH_3$-SCO activity to Pd/Fe-ZSM5 catalyst. We also tested Pt/Fe-ZSM5 catalysts with different Fe loading using ion-exchange method to prepare Fe-ZSM5 supports, which resulted in the increased catalytic performance with smaller Fe content: $NH_3$ was oxidized completely at low temperature ($250^{\circ}C$). The physicochemical properties of Fe-ZSM5 were investigated to figure out the relationship between the characteristics of the catalysts and the catalytic activity on $NH_3$-SCO by Inductively coupled plasma-atomic emissions spectrometer (ICP-AES), $N_2$ sorption, X-ray diffraction (XRD), temperature programmed desorption of $NH_3$ ($NH_3$-TPD) technique.

• Journal of the Korean Institute of Gas
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• v.3 no.3 s.8
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• pp.39-44
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• 1999

In the study, corrosion characteristics under various corrosion environments(neutral solution, acid solution), for various hinge materials(SM20C, BsC3 and STC4H), were investigated by immersion test, and the behaviour of fretting wear under atmosphere was studied. In immersion test, corrosion potential of those materials showed to be noble in the sequence of $0.5\%HNO_3$> underground water> $0.5\%\;H_2SO_4$ solution, and potential of a sole material, except BsC3, was more noble than these of mixed materials. In same material SM20C, the fretting wear loss of rotary materials increased about 1.9 times to that of moving materials, because of surface hardening by frictional force.