• Title/Summary/Keyword: NmF2

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웨이퍼 스텝퍼에서의 기준정렬을 위한 2차원 버니어 패턴의 성능예측

  • 이종현;장원익;최부연;장기호;김도훈;유형준
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1993.10a
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    • pp.243-248
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    • 1993
  • New methodology for fiducial alignment is proposed to improve the alignment accuracy in wafer steppers. The positioning error is detected by PSD(Position Sensitive Detector)when 2-dimensional vernier patterns on a reticle on a reticle are projected on the fiducial marks of wafer stage. The width and period of vernier patterns are deter mined to get the highest S/N ratio for the exposure wavelength 248.4nm of KrF excimer laser. This new method has an advantage of higher accuracy and faster alignment over the conventional one.

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Synthesis and Properties of Diarylamino-Substituted Linear and Dendritic Oligoquinolines for Organic Light-Emitting Diodes

  • Lee, Ho-Joon;Xin, Hao;Park, Seong-Min;Park, Seog-Il;Ahn, Taek;Park, Dong-Kyu;Jenekhe, Samson A.;Kwon, Tae-Woo
    • Bulletin of the Korean Chemical Society
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    • v.33 no.5
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    • pp.1627-1637
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    • 2012
  • The coupling reaction between 5-bromo-3-phenylbenzo[c]isoxazole and diphenylamine followed by further condensation with a mono-, di- or ter-acetyl aromatic compound in the presence of diphenyl phosphate at $145^{\circ}C$ gave a novel asymmetric diarylquinolines, oligoquinolines with diphenylamine endgroups, and a first generation quinoline dendrimer in 41-82% isolated yield. The electrochemical and photophysical properties of the oligoquinolines were characterized by cyclic voltammograms (CVs) and spectroscopy. All the quinolines emit bright sky blue light due to charge transfer from quinoline group to diphenly amine with very high quantum efficiency (> 90%). Organic light-emitting diodes (OLEDs) were fabricated using these quinolines as emitting materials. Among different device architectures explored, OLEDs with a structure of ITO/PEDOT (40 nm)/TAPC (15 nm)/D-A quinoline (40 nm)/TPBI (30 nm)/LiF (1 nm)/Al using TAPC as an electron blocking layer and TPBI as a hole blocking layer gave the best performance. A high external quantum efficiency in the range of 1.2-2.3% were achieved in all the quinolines with the best performance in BBQA(5). Our results indicate diarylamino-substituted oligoquinoline and dendrimer are promising materials for OLEDs applications.

The Electrochemical Characteristics of Mesopore Active Carbon Fiber for EDLC Electrode (EDLC 전극용 메조기공 활성탄소 섬유의 전기화학적 특성)

  • Kang, Chae-Yoen;Shin, Yun-Sung;Lee, Jong-Dae
    • Korean Chemical Engineering Research
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    • v.49 no.1
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    • pp.10-14
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    • 2011
  • The electrode material performances of electric double layer capacitor(EDLC) were investigated using mesopous active carbon fiber(ACF), which was prepared by the iron exchange method. The mesoporous ACF had pore characteristics of specific surface area around 1249, 664 $m^2$/g, mesoporous fraction around 70.6-81.3% and meanpore size around 2.78-4.14 nm. The results showed that as HNO3 treatment time decreased, the specific surface area increased and mesoporous fraction decreased. To investigate electrochemical performance of EDLC, unit cell was manufactured using mesoporus ACF, conducting material and binder; organic elctrolyte was used on this experiment. The specific capacitance of ACF treated with HNO3 for 2 hours turned out to be 0.47 $F/cm^2$and the results of the cyclic charge-discharge tests were stable. Thus, the electrochemical performance of EDLC was mainly dependent on specific surface area of ACF electrode and the diffusion resistance of charge decreased as the mesopore increased.

Luminescence in SrCl2:Eu2+,Na+ X-ray Storage Phosphor (SrCl2:Eu2+,Na+ X-선 영상저장 형광체의 발광특성)

  • Kim, Sung-Hwan;Kim, Wan;Kang, Hee-Dong;Doh, Sih-Hong;Seo, Hyo-Jin;Kim, Young-Kook;Kim, Do-Sung
    • Korean Journal of Materials Research
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    • v.13 no.6
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    • pp.343-346
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    • 2003
  • Photoluminescence(PL), photostimulated luminescence(PSL) and thermoluminescence(TL) in $SrC1_2$:$Eu^{2+}$ , $Na^{+}$ phosphor powder were measured, and the activation energies(trap depth) of traps associated with TL and PSL were investigated. The PL and PSL in the studied sample is due to the $4f^{6}$ 5d\longrightarrow$4f^{7}$transition of $Eu^{ 2+}$. TL glow curve is single peak, and its peak temperature is about 377.2 K. The PL, PSL and TL emission spectra of the phosphors are located in the range of 380∼440 nm, peaking at 408 nm. The activation energy of the PSL trapping center is 0.78 eV and that of the TL trapping center is 0.79 eV. We, thus, suggest that the trapping centers giving rise to the PSL are identical to those giving rise to the TL.

A Fundamental Study of Structure-Property Relationships in $Eu^{3+}$ Luminescence ($Eu^{3+}$ 이온의 발광성에 대한 구조와 성질의 기본적인 연구)

  • Chang, Ki-Seog
    • Korean Journal of Crystallography
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    • v.13 no.1
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    • pp.25-30
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    • 2002
  • The M/sub 1-x/Na/sub 2x/Al₂(BO₃)₂O (M = Ca and Sr) solid solution systems have been shown interstitial solid solutions and continuous substitutional solid solutions. The symmetry around the Eu site of yEu/sup 3+/ : M/sub 1-x/Na/sub 2x/Al/sub 2-y/Mg/sub /(BO₃)₂O (M = Ca and Sr) changes the intensities and the chromaticities of transitions. The Eu/sup 3+/ion can be very bright and efficient and have the desired emission wave-length depending on the site symmetry of the Eu/sup 3+/ion site. As the amount of Na in the Eu/sup 3+/ion doped Ca/sub 1-x/Na/sub 2x/Al₂(BO₃)₂O system increases, the Eu site symmetry is going to be a noncentrosymmetric site. With increasing x, the decreased intensity in the /sup 5/D/sub 0/→/sup 7/F₁(590 nm) transition relates to the low symmetry of the Eus/up 3+/-doped Ca/sub 1-x/Na/sub 2x/Al₂(BO₃)₂O system, because of the Ca-centered octahedron in the CaAl₂(BO₃)₂O compound. The SrAl₂(BO₃)₂O compound also provides an improved chromaticity due to the lower site symmetry of Eu/sup 3+/ion.

Implementation of High Throughput LDPC Code Decoder for DVB-S2 (높은 throughput 성능을 갖는 DVB-S2 LDPC 부호의 복호기 구현)

  • Kim, Seong-Woon;Park, Chang-Soo;Hwang, Sun-Young
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.33 no.9A
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    • pp.924-933
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    • 2008
  • This paper proposes a novel LDPC code decoder architecture to improve throughput for DVB-S2, a second generation standard of ETSI for satellite broad-band applications. The proposed architecture clusters 360 bitnodes and checknodes into groups utilizing the property of IRA-LDPC code. Functional modules which perform calculations for bitnode groups and checknode groups have local memories and store the messages from the other type of functional modules connected by edges at their local memories. The proposed architecture can avoid memory conflicts by accessing stored messages sequentially, hence, increases throughput in the proposed DVB-S2 LDPC code decoder architecture. The proposed architecture was synthesized using the TSMC 90nm technology. Synthesis results show that throughput of the proposed architecture is improved by 104% and 478%, respectively, when compared with those of the architectures proposed by F. Kienle and J. Dielissen.

The Properties of $Bi_2Mg_{2/3}Nb_{4/3}O_7$ Thin Films Deposited on Copper Clad Laminates For Embedded Capacitor (임베디드 커패시터의 응용을 위해 CCL 기판 위에 평가된 BMN 박막의 특성)

  • Kim, Hae-Won;Ahn, Jun-Ku;Ahn, Kyeong-Chan;Yoon, Soon-Gil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.45-45
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    • 2007
  • Capacitors among the embedded passive components are most widely studied because they are the major components in terms of size and number and hard to embed compared with resistors and inductors due to the more complicated structure. To fabricate a capacitor-embedded PCB for in-line process, it is essential to adopt a low temperature process (<$200^{\circ}C$). However, high dielectric materials such as ferroelectrics show a low permittivity and a high dielectric loss when they are processed at low temperatures. To solve these contradicting problems, we studied BMN materials as a candidate for dielectric capacitors. processed at PCB-compatible temperatures. The morphologies of BMN thin films were investigated by AFM and SEM equipment. The electric properties (C-F, I-V) of Pt/BMN/Cu/polymer were evaluated using an impedance analysis (HP 4194A) and semiconductor parameter analyzer (HP4156A). $Bi_2Mg_{2/3}Nb_{4/3}O_7$(BMN) thin films deposited on copper clad laminate substrates by sputtering system as a function of Ar/$O_2$ flow rate at room temperature showed smooth surface morphologies having root mean square roughness of approximately 5.0 nm. 200-nm-thick films deposited at RT exhibit a dielectric constant of 40, a capacitance density of approximately $150\;nF/cm^2$, and breakdown voltage above 6 V. The crystallinity of the BMN thin films was studied by TEM and XRD. BMN thin film capacitors are expected to be promising candidates as embedded capacitors for printed circuit board (PCB).

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Design of a 12-bit, 10-Msps SAR A/D Converter with different sampling time applied to the bit-switches within C-DAC (C-DAC 비트 스위치에 다른 샘플링 시간을 인가하는 12-bit, 10-Msps SAR A/D 변환기 설계)

  • Shim, Minsoo;Yoon, Kwangsub;Lee, Jonghwan
    • Journal of IKEEE
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    • v.24 no.4
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    • pp.1058-1063
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    • 2020
  • This paper proposes a 12-bit SAR A/D(Successive Approximation Register Analog-to-Digital) converter that operates at low power for bio-signal and sensor signal processing. The conventional SAR A/D converter utilized the reduction of the dynamic current, which resulted in reducing total power consumption. In order to solve the limitation of the sampling time due to charging/discharging of the capacitor for reducing dynamic current, the different sampling time on the C-DAC bit switch operation was applied to reduce the dynamic current. In addition, lowering the supply voltage of the digital block to 0.6V led to 70% reduction of the total power consumption of the proposed ADC. The proposed SAR A/D was implemented with CMOS 65nm process 1-poly 6-metal, operates with a supply voltage of 1.2V. The simulation results demonstrate that ENOB, DNL/INL, power consumption and FoM are 10.4 bits, ±0.5LSB./±1.2LSB, 31.2uW and 2.8fJ/step, respectively.

Thermoluminescene Properties of Li6Gd(BO3)3:Ce3+ Scintillation Single Crystal (리튬 가돌리늄 보레이트 섬광단결정의 열형광 특성)

  • Kim, Sunghwan;Lee, Joonil
    • Journal of the Korean Society of Radiology
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    • v.8 no.7
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    • pp.455-459
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    • 2014
  • We grew the $Li_6Gd(BO_3)_3:Ce^{3+}$ scintillator and determined the scintillation and thermoluminescence properties for X-rays. The emission spectrum of $Li_6Gd(BO_3)_3:Ce^{3+}$ is located in the range of 370~500 nm, peaking at 423 nm an 455 nm, due to the $4f{\rightarrow}5d$ transition of $Ce^{3+}$ ions. The fluorescence decay time of the crystal is composed three components. The fast component is 60 ns (25%), the intermediate component is 787 ns (29%) and the slow component is $5.9{\mu}s$ (46%) of the crystal. The after-glow is caused by the electron and hole traps in the crystal lattice. We determined physical parameters of the traps in the crystal. The thermoluminescence trap are composed two traps. The determined activation energy (E), kinetic order (m) and frequency factor (s) of the first trap are 0.65 eV, 1.01 and $6.9{\times}10^8s^{-1}$. And, the determined activation energy, kinetic order and frequency factor of the second trap are 0.96 eV, 1.79 and $3.1{\times}10^{12 }s^{-1}$, respectively.