• 제목/요약/키워드: Nitrogen flow ratio

검색결과 189건 처리시간 0.026초

기상반응에 의한 $Si_3N_4$ 미세분말의 합성 (Synthesis of Ultrafine Silicon Nitride Powders by the Vapor Phase Reaction)

  • 유용호;어경훈;소명기
    • 한국세라믹학회지
    • /
    • 제37권1호
    • /
    • pp.44-49
    • /
    • 2000
  • Silicon nitride powders, were synthesized by the vapor phase reaction using SiH4-NH3 gaseous mixture. The reaction temperature, ratio of NH3 to SiH4 gas and the overall gas quantity were varied. The synthesized powders were characterized using X-ray, TEM, FT-IR and EA. The synthesized silicon nitride powders were in amorphous state, and the average particle size was about 100nm. TEM analysis revealed that the particle size decreased with increasing reaction temperature and gas flow quantity. As-received amorphous powders were annealed in nitrogen atmosphere at 140$0^{\circ}C$ for 2h, then the powders were completely crystallized at 0.2 ratio of NH3 to SiH4.

  • PDF

Oxygen Transfer Rate Coefficient of Membrane Aeration Bioreactor for Vero Cell Culture

  • 전주미;정연호;김익환;이상종;장용근;전계택
    • 한국생물공학회:학술대회논문집
    • /
    • 한국생물공학회 2002년도 생물공학의 동향 (X)
    • /
    • pp.269-270
    • /
    • 2002
  • Oxygen is a key substrate in animal cell metabolism and its consumption is thus a parameter of great interest for monitoring and control in animal cell culture bioreactor. The use of a gas-permeable membrane offered the possibility to provide the required quantity of oxygen into the culture. while avoiding problems of foaming or shear damage generally linked to sparging. For determining the optimum DO control strategy of this gas-permeable membrane aeration bioreactor, the oxygen transfer rate coefficient was measured with varying $N_2$ ratio in inlet air. The results showed that an increasing mass flow rate of nitrogen reduced the $K_La$ value. and 5% nitrogen in air did not result in any oxygen limitation.

  • PDF

고정밀 저항용 질화탄탈 박막의 특성 (Characteristic of Tantalum Nitride Thin-films for High Precision Resistors)

  • 최성규;나경일;남효덕;정귀삼
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
    • /
    • pp.537-540
    • /
    • 2001
  • This paper presents the characteristics of Ta-N thin-film for high precision resistors, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(4~16 %)$N_2$). Structural properties studied using X-ray diffraction(XRD) indicate the presence of TaN, $Ta_3N_5$ or a mixture of Ta-N phases in the films depending on the amount of nitrogen in the sputtering gas. The chemical composition are investigated by auger electro spectroscopy(AES). The optimized conditions of Ta-N thin-film resistors were deposited in 4 % $N_2$ gas flow ratio. Under optimum conditions, the Ta-N thin-film resistors are obtained a high resistivity, $\rho=305.7{\mu}{\Omega}cm$, a low temperature coefficient of resistance, TCR=-36 $ppm/^{\circ}C$.

  • PDF

PVD법으로 증착한 W-B-C-N 박막의 질소량에 따른 구조변화 연구 (Structure Behavior of Sputtered W-B-C-N Thin Film for various nitrogen gas ratios)

  • 송문규;이창우
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
    • /
    • pp.109-110
    • /
    • 2005
  • We have suggested sputtered W-C-N thin film for preventing thermal budget between semiconductor and metal. These results show that the W-C-N thin film has good thermal stability and low resistivity. In this study we newly suggested sputtered W-B-C-N thin diffusion barrier. In order to improve the characteristics, we examined the impurity behaviors as a function of nitrogen gas flow ratio. This thin film is able to prevent the interdiffusion during high temperature (700 to $1000^{\circ}C$) annealing process and has low resistivity ($\sim$200$\mu{\Omega}-cm$). Through the analysis of X-Ray diffraction, resistivity and XPS, we studied structure behavior of W-B-C-N diffusion barrier.

  • PDF

제어자발화 가솔린기관의 배기 특성 (An Emission Characteristics of a Controlled Auto-Ignition Gasoline Engine)

  • 김홍성
    • 동력기계공학회지
    • /
    • 제13권3호
    • /
    • pp.5-10
    • /
    • 2009
  • This work deals with a controlled auto-ignition (CAI) single cylinder gasoline engine, focusing on the extension of operating conditions. The fuel is injected indirectly into electrically heated inlet air flow. In order to keep a homogeneous air-fuel mixing, the fuel injector is cooled by the water of a specially designed coolant passage. The engine emission characteristics were investigated under the wide range of operating conditions such as 32 to 63 in the air-fuel ratio, 1000 to 1800 rpm in the engine speed, and 150 to $180^{\circ}C$ in the inlet air temperature. The ultra lean-burn can be achieved by the auto-ignition of gasoline fuel due to the heated inlet air in the compression ignition gasoline engine. It is confirmed that the emission concentrations of carbon monoxide, hydrocarbons and nitrogen oxide can be significantly reduced by CAI combustion compared with the combustion of a conventional spark ignition engine.

  • PDF

고정밀 저항용 질화탄탈 박막의 특성 (Characteristic of Tantalum Nitride Thin-films for High Precision Resistors)

  • 최성규;나경일;남효덕;정귀상
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
    • /
    • pp.537-540
    • /
    • 2001
  • This paper presents the characteristics of Ta-N thin-(ibm for high precision resistors, which were deposited oni substrate by DC reactive magnetorn sputtering in an argon-nitrogen atmosphere(Ar-(4∼16%)N$_2$). Sturcutural properties sutided using X-ray diffraction (XRD) indicate the presence of TaN, Ta$_3$N$\sub$5/ or a mixture of Ta-N phases in the films depending on the amount of nitrogen in the sputtering gas. The chemical composition are investigated by auger electro spectroscopy(AES). The optimized conditions of Ta-N thin-film resistors were deposited in 4 % N$_2$ gas flow ratio. Under optimum conditions, the Ta-N thin-film resistors are obtained a high resistivity, $\rho$=305.7 ${\mu}$Ωcm, a low temperature coefficient of resistance, TCR=-36 ppm/$^{\circ}C$.

  • PDF

압축점화 가솔린기관의 성능 및 배기특성 (Performance and Emission Characteristics of Compression Ignition Gasoline Engine)

  • 김홍성;김문헌
    • 대한기계학회논문집B
    • /
    • 제27권7호
    • /
    • pp.1007-1014
    • /
    • 2003
  • This work deals with a controlled auto-ignition (CAI) single cylinder gasoline engine, focusing on the extension of operating conditions. The fuel is injected indirectly into electrically heated inlet air flow. In order to keep a homogeneous air-fuel mixing, the fuel injector is water-cooled by a specially designed coolant passage. Investigated are the engine performance and emission characteristics under the wide range of operating conditions such as 32 to 63 in the air-fuel ratio, 1000 to 1800 rpm in the engine speed, and 150 to 18$0^{\circ}C$ in the inlet air temperature. The compression ignition gasoline engine can be achieved that the ultra lean-burn with self-ignition of gasoline fuel by heating inlet air. For example. the allowable lean limit of air-fuel ratio is extended until 63 at engine speed of 1000 rpm and inlet air temperature of 17$0^{\circ}C$. It can be achieved that the emission concentrations of carbon monoxide, hydrocarbons and nitrogen oxide had been significantly reduced by CAI combustion compared with conventional spark ignition engine.

다단 원판형 드래그펌프의 배기 성능에 관한 실험적 연구 (An Experimental Study on the Pumping Performance of the Multi-stage Disk-type Drag Pump)

  • 권명근;허중식;황영규
    • 한국진공학회지
    • /
    • 제12권2호
    • /
    • pp.79-85
    • /
    • 2003
  • 다단 원판형 드래그펌프의 배기특성을 출구측 압력변화에 따른 입구측의 압력을 측정함으로써 파악하였다. 압력측정범위는 유량이 없을 때 출구측에서 0.13∼533 Pa로 하였다. 펌프 로터의 회전 속도는 24,000rpm이며, 질소가스를 사용하여 유량에 대한 성능실험을 수행하였다. 본 연구에서는 원판의 단의 수에 따른 원판형 드래그 펌프의 성능을 측정하였다. 3단, 2단, 단단형으로 원판형 드래그펌프를 구성하여 성능 실험하였으며, 최대도달진공도, 최대압축비, 배기속도등을 각각 측정하여 상호 성능을 비교·고찰하였다.

USB 반응조에서 ${NO_3}^--N/COD$ 비해 따른 탈질과 메탄화 동시반응 (Simultaneous Denitrification and Methanogenesis at Various ${NO_3}^--N/COD$ Ratios in an USB Reactor)

  • 박상민;전항배;박노백;오규환
    • 대한환경공학회지
    • /
    • 제27권11호
    • /
    • pp.1174-1179
    • /
    • 2005
  • 상향류식 슬러지 블랭킷(USB) 반응조에서 탈질 및 메탄생성 동시반응에 N/C(${NO_3}^--N/COD$)비가 미치는 영향을 관찰하였다. 질산염을 첨가하지 않은 반응조에서 84%의 유입 COD가 메탄가스로 전환되었다. N/C 비가 증가함에 따라, 질소가스의 발생량은 증가하였으나, 메탄가스 발생은 감소하여 N/C 비 0.20 이상에서 중지되었다. 유입된 질산염은 완전히 질소가스로 탈질 되었으나 N/C비가 0.40에서는 유기탄소원의 부족으로 인해 질산염 제거효율이 40% 미만으로 감소하였다. N/C 비가 증가함에 따라 탈질반응에 의해 소비된 COD 양은 증가하였다. 메탄생성 반응은 N/C 비 0.05 이상에서 영향을 받기 시작하였는데, 이는 질산염과 이들의 탈질과정에서 발생된 중간생성물의 저해영향보다는 탈질과 메탄생성에 관여하는 미생물간의 유기탄소원에 대한 기질경쟁으로 설명될 수 있다. 동시 탈질과 메탄생성반응이 발생할 수 있는 임계 N/C 비는 0.20이었으며, 이 범위에서 유입된 COD는 탈질, 메탄생성 및 세포합성을 포함하는 기타 생화학적 반응들에 의해 92% 이상 제거되었다.

WASP7 모형을 이용한 임하호 수질모의에 관한 연구 (The Research about the Water Quality Prediction at Imha Reservoir Using a WASP7 Model)

  • 안승섭;서명준;정도준;박노삼
    • 한국환경과학회지
    • /
    • 제17권6호
    • /
    • pp.611-621
    • /
    • 2008
  • This study intends to provide the necessary basic data needed for predicting the water quality and examining changes in water quality on the basis of the hydrological changes: an outflow or the character of a flow by investigating the interaction of the parameters through the estimation of optimal parameters need for predicting the water quality of the dam basin and the sensitivity among those estimated parameters. Im-Ha Dam in the upstream area of the Nakdong River was selected for analysis, and the water quality survey data necessary for parameter estimation was based on the monthly water quality data (water temperature, BOD, T-N and T-P) between December 1, $2005{\sim}$November 31, 2006. K1C(the saturated growth rate of plant plankton), K1RC (endogenous respiratory quotient of plankton), KDC(deoxidized ratio), K71C(minealized ratio of dissolved organic phosphorus), K83C(mineralized ratio of dissolved organic nitrogen) have been considered as the factors of the water quality performed in this water quality simulation, that is, the most effective parameters on BOD, T-N and T-P. In the result of the analysis of the sensitivity, KDC(deoxidized ratio) was the most sensitively reacted parameter on BOD and it was K71C(mineralized ratio of dissolved organic phosphorus) and K83C(mineralized ratio of dissolved organic nitrogen) on T-N and T-P. It is considered that it will be possible to apply the most optimal parameter to an analysis of the water quality simulation at Im-Ha Ho basin in the goal year by examining the interaction of the parameters through the parameters sampling which are able to applicable to prediction of the water quality and the analysis of the its sensitivity, in the future, also the analysis on the basis of the hydrological conditions: an outflow or the character of a flow will be needed.