• Journal of the Korean institute of surface engineering
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• v.37 no.1
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• pp.53-57
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• 2004

Austenitic stainless steel AISI 304 was nitrided in a low-pressure RF plasma using pure nitrogen. With a treatment of time of 4.0h at $400^{\circ}C$, the nitrogen-rich layer on the sample was $3\mu\textrm{m}$thick and had a hardness of approximately 4.4 times higher than that of untreated material. XRD data showed that as the process temperature rose from 350∼$450^{\circ}C$, the expanded austenite peaks became more prominent while the austenite peaks became weaker. Expanded austenite was transformed to ferrite and CrN at the treatment of$ 500^{\circ}C$. Langmuir probe measurements showed that electron density decreased above $450^{\circ}C$.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.05a
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• pp.75-75
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• 2015

산업이 발달되고 제품이 소형화 및 고품질화됨에 따라 그에 따른 제품의 품질 조절이 용이하고 자동화하기 쉬울 뿐만 아니라 공해문제 및 후가공 문제 등이 없는 이온질화 열처리 기술의 보급이 급속도로 확산되고 있다. 특히 플라즈마 이온질화는 가스조성, 처리온도, 질화시간, 가스압력 및 인가전류를 조절함으로써 질화층은 물론 화합물의 상을 용이하게 조절할 수 있다. 위와 같은 변수들을 조절함으로써 PECVD 장비에서 DC pulse power를 사용하여 플라즈마 질화법으로 질화처리하였으며 AISI4140강에서 화합물층의 유무에 따른 기계적인 특성을 비교 조사하고자 하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.116-116
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• 2007

We investigated the characteristics of the Hafnium silicate (Hf-silicate) film which is grown by ALD (atomic layer deposition). The Hf-silicate films that were annealed by the RTP. The physical and electrical properties of nitrided Hf-silicate films, incorporated by NO gas and $NH_3$ gas annealing, were investigated by XPS, TEM and I-V measurement. We confirmed the nitrogen incorporation during NO gas annealing treatment effectively enhances the thermal stability of Hf-silicate. The tendency of nitnitridation in NO gas and $NH_3$ is different. Leakage current is improved in post NO gas annealing.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.117-117
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• 2007

The physical and electrical properties of nitrided Hf-silicate films, incorporated by NO gas annealing, were investigated by XPS, NEXAFS, TEM and C-V measurement. We confirmed the nitrogen incorporation during NO gas annealing treatment effectively enhances the thermal stability of Hf-silicate. The suppression of phase separation was observed in Hf-silicate films with high nitrogen contents. The negative shift of threshold voltage is caused by the incorporation of nitrogen in the hafnium silicate films.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.12 no.6
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• pp.304-310
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• 2002

Novel charge trap type memory devices with reoxidized oxynitride gate dielectrics made by NO annealing and reoxidation process of initial oxide on substrate have been fabricated using 0.35 $\mu \textrm{m}$ retrograde twin well CMOS process. The feasibility for application as NVSM memory device and characteristics of traps have been investigated. For the fabrication of gate dielectric, initial oxide layer was grown by wet oxidation at $800^{\circ}C$ and it was reoxidized by wet oxidation at $800^{\circ}C$ after NO annealing to form the nitride layer for charge trap region for 30 minutes at $850^{\circ}C$. The programming conditions are possible in 11 V, 500 $\mu \textrm{s}$ for program and -13 V, 1ms for erase operation. The maximum memory window is 2.28 V. The retention is over 20 years in program state and about 28 hours in erase state, and the endurance is over $3 \times 10^3$P/E cycles. The lateral distributions of interface trap density and memory trap density have been determined by the single junction charge pumping technique. The maximum interface trap density and memory trap density are $4.5 \times 10^{10} \textrm{cm}^2$ and $3.7\times 10^{18}/\textrm{cm}^3$ respectively. After $10^3$ P/E cycles, interlace trap density increases to $2.3\times 10^{12} \textrm{cm}^2$ but memory charges decreases.

• Journal of the Korean Society for Heat Treatment
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• v.32 no.5
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• pp.201-211
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• 2019

Low carbon steel (S20C steel) and SPCC steel sheet have been austenitic nitrided at $700^{\circ}C$ in a closed pit type furnace by changing the flow rate of ammonia gas and heat treating time. When the flow rate of ammonia gas was low, the concentration of residual ammonia appeared low and the hardness value of transformed surface layer was high. The depth of the surface layer, however, was shallow. With increasing the concentration of residual ammonia by raising up the ammonia gas flow, both the depth of the surface layer and the pore depth increased, while the maximum hardness of the surface layer decreased. By introducing a large amount of ammonia gas in a short time, a deep surface layer with minimal pores on the outermost surface was obtained. In this experiment, while maintaining 10~12% of residual ammonia, the flow rate of inlet ammonia gas, 7 liter/min, was introduced at $700^{\circ}C$ for 1 hour. In this condition, the thickness of the surface layer without pores appeared about $60{\mu}m$ in S20C steel and $30{\mu}m$ in SPCC steel plate. Injecting additional methane gas (carburizing gas) to this condition played a deteriorating effect due to promoting the formation of vertical pores in the surface layer. For $1^{st}$ transformed surface layer for S20C steel, maintaining 10~12% residual ammonia condition via austenitic nitriding process resulted in ${\varepsilon}$ phase with relatively high nitrogen concentration (just below 4.23 wt.%N) among the mixed phases of ${\varepsilon}+{\gamma}$. The ${\varepsilon}$ phase was formed a specific orientation perpendicular to the surface. For $2^{nd}$ transformed layer for S20C steel, ${\gamma}$ phase was rather dominant (just above 2.63 wt.%N). For SPCC steel sheet, there appeared three phases, ${\gamma}$, ${\alpha}(M)$ and weak ${\varepsilon}$ phase. The nitrogen concentration would be approximately 2.6 wt.% in these phases condition.

• Journal of the Korean institute of surface engineering
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• v.29 no.6
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• pp.634-639
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• 1996

In oder to improve the wear resistance as well as oxidation resistance at high temperature a AISI H13 steel was treated by a duplex process of calorizing followed by plasma nitriding. The surface properties of the duplex-treated AISI H13 steel was characterized and compared with those treated by single surface process of calorizing and plasma nitriding, in terms of microstruture, microhardness, wear resistance at $500^{\circ}C$, and the oxidation behaviours at $700^{\circ}C$, Duplex process on H13 steel had created duplex layer of approximately $190\mu\textrm{m}$ on the surface, and surface microhardness was measured to be above 1450Hv(0.1Kgf). There was considerable improvement of the high temperature wear resistance at $500^{\circ}C$ in the duplex-treated steel when both wear volume and weight change due to oxidation were considered. In addition the duplex-treated steel showed an improved high temperature oxidation resistance than the plasma nitrided steel at $700^{\circ}C$.

• Journal of the Korean Society for Heat Treatment
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• v.7 no.3
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• pp.184-189
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• 1994

The heat treatment charaterristic of SCM 440 and B 16 steels has been investigated in various condition(A, B and C) to the effect of heat treatment on mechanical properties, and the following results were obtained. 1. We are obtained a good nitriding characteristic in bainitic structure than other heat treatment cycle in our experiment. 2. Fatigue characteristic has shown in order of B)C)A condition as heat treatment cycle. 3. The effective hardening depth and fatigue characteristic has been excellented in B 16 than SCM 440 after the nitriding and Q. T for Band C condition. 4. Nitriding depth has been increased in addition of Cr, V and the nitriding efficiency is increased as easiness of banite formation to wide range of cooling rate by addition of Mo. 5. The depth of compound layer in parallel surface, notched slop plane and notched bottom has been varied to the nitriding depth of 5, 4 and 3 ${\mu}$ in relatively uniform pattern after 10h nitriding treatment for SCM 440 into A condition.

• Journal of the Korean institute of surface engineering
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• v.44 no.5
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• pp.190-195
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• 2011

Diamond-like carbon (DLC) has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion on the metal substrates because of weak bonding between DLC film and the metal substrate. The purpose of this study is to enhance an adhesion of DLC film. For improving adhesion, the substrate was treated by active screen plasma nitriding before DLC film deposing. Nitrided substrates were investigated by Glow Discharge Spectrometer (GDS), Micro-Vickers Hardness. DLC films were deposited on several metals by linear ion source, and characteristics of the films were investigated using nano-indentation, Field Emission Scanning Electron Microscope (FESEM). The adhesion was measured by scratch tester. The adhesion of DLC films was increased when nitriding layer was formed before DLC deposition. Therefore, the adhesion of DLC film can be enhanced as increasing the hardness of materials.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.3 no.2
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• pp.115-119
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• 2002

This study was performed to improve mechanical properties of rotor and bushing materials. SACD and SKD11 steels as rotor and bushing materials were investigated. Gas nitriding and TiN coating were carried out on SACM and SKD11 steels. TiN coating was deposited on SKD11 steel by reactive sputtering process. This coated layer was picked off during the operation because of insufficient adhesion. Gas nitriding was carried out on SACM and SKD11 steels in an ammonia atmosphere at 51$0^{\circ}C$ for 72 hrs. These gas nitrided parts showed good mechanical properties. SKD11 steels were heat-treated to obtain optimum carbide size and distribution. As a results, the hardness increased.