• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.193-198
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• 2007

The NiSi is very promising candidate for the metallization in 60nm CMOS process such as FUSI(fully silicided) gate and source/drain contact because it exhibits non-size dependent resistance, low silicon consumption and mid-gap workfunction. Ni film was first deposited by using ALD (atomic layer deposition) technique with Bis-Ni precursor and $H_2$ reactant gas at $220^{\circ}C$ with deposition rate of $1.25{\AA}/cycle$. The as-deposited Ni film exhibited a sheet resistance of $5{\Omega}/{\square}$. RTP (repaid thermal process) was then performed by varying temperature from $400^{\circ}C$ to $900^{\circ}C$ in $N_2$ ambient for the formation of NiSi. The process window temperature for the formation of low-resistance NiSi was estimated from $600^{\circ}C$ to $800^{\circ}C$ and from $700^{\circ}C$ to $800^{\circ}C$ with and without Ti capping layer. The respective sheet resistance of the films was changed to $2.5{\Omega}/{\square}$ and $3{\Omega}/{\square}$ after silicidation. This is because Ti capping layer increases reaction between Ni and Si and suppresses the oxidation and impurity incorporation into Ni film during silicidation process. The NiSi films were treated by additional thermal stress in a resistively heated furnace for test of thermal stability, showing that the film heat-treated at $800^{\circ}C$ was more stable than that at $700^{\circ}C$ due to better crystallinity.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.5 no.4
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• pp.358-369
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• 1995

Surface structure and adhesion by the reaction between thin metal films and SiC were studied at temperatures between 550 and $1450^{\circ}C$ for various times. The reaction with the formation of various silicides was initially observed above $850^{\circ}C$ for SiC/Co system and $650^{\circ}C$ for SiC/Ni system. The cobalt reacted with SiC and consumed completely at $1050^{\circ}C$ for 0.5 h and the nickel at $950^{\circ}C$ for 2 h. The observed CoSi phase in SiC/Co and Ni$_2$Si phase in SiC/Ni are thermodynamically stable in the reaction zone up to 125$0^{\circ}C$ and $1050^{\circ}C$ respectively. Carbon was crystallized as graphite above $1450^{\circ}C$ for SiC/Co reaction surface and $1250^{\circ}C$ for SiC/Ni. The critical loads of the thin metal films on SiC substrate were qualitatively compared in terms of the scratch test method. At temperatures between 850 and $1050^{\circ}C$, relatively higher values of 20~33 N were observed for SiC/Ni couples.

• Bulletin of the Korean Chemical Society
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• v.28 no.8
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• pp.1265-1272
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• 2007

A solid acid catalyst, NiSO4/CeO2-ZrO2 was prepared simply by promoting ZrO2 with CeO2 and supporting nickel sulfate on CeO2-ZrO2. The support of NiSO4 on ZrO2 shifted the phase transition of ZrO2 from amorphous to tetragonal to higher temperatures because of the interaction between NiSO4 and ZrO2. The surface area of 10-NiSO4/1-CeO2-ZrO2 promoted with CeO2 and calcined at 600 oC was very high (83 m2/g) compared to that of unpromoted 10-NiSO4/ZrO2 (45 m2/g). This high surface area of 10-NiSO4/1-CeO2-ZrO2 was due to the promoting effect of CeO2 which makes zirconia a stable tetragonal phase as confirmed by XRD. The role of CeO2 was to form a thermally stable solid solution with zirconia and consequently to give high surface area and acidity of the sample, and high thermal stability of the surface sulfate species. 10-NiSO4/1- CeO2-ZrO2 containing 1 mol% CeO2 and 10 wt% NiSO4, and calcined at 600 oC exhibited maximum catalytic activities for both reactions, 2-propanol dehydration and cumene dealkylation.

• Journal of the Korean Magnetics Society
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• v.18 no.3
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• pp.85-88
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• 2008

We calculated the electronic structures of substituted cobalt nitrides, that is $FeCo_3N$ and $NiCo_3Ni$, by using the all electron fullpotential linearized augmented plane-wave (FLAPW) energy band method, and investigated the influence on the magnetic properties of $Co_4N$ due to the substitution of Co atom located at corner sites by iron and nickel atoms. We found that the magnetic moments of CoII atoms located at the face-center positions in these compounds are almost same to that of $Co_4N$. The magnetic moments of Fe and Ni atoms in $FeCo_3N$ and $NiCo_3Ni$ are 3.086 and $0.795\;{\mu}_B$, and they have the localized nature of magnetism.

• Korean Journal of Metals and Materials
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• v.50 no.1
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• pp.64-70
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• 2012

Samples of pure Mg, 76.5 wt%Mg-23.5 wt%Ni, and 71.5 wt%Mg-23.5 wt%Ni-5 wt%$Fe_2O_3$ were prepared by reactive mechanical grinding and their hydriding and dehydriding properties were then investigated. The reactive mechanical grinding of Mg with Ni is considered to facilitate nucleation and to shorten diffusion distances of hydrogen atoms. After hydriding-dehydriding cycling, the 76.5 wt%Mg-23.5 wt%Ni and 71.5 wt%Mg-23.5 wt%Ni-5 wt%$Fe_2O_3$ samples contained $Mg_2Ni$ phase. In addition to the effects of the creation of defects and the decrease in particle size, the addition of Ni increases the hydriding and dehydriding rates by the formation of $Mg_2Ni$. Expansion and contraction of the hydride-forming materials (Mg and $Mg_2Ni$) with the hydriding and dehydriding reactions are also considered to increase the hydriding and dehydriding rates of the mixture by forming defects and cracks leading to the fragmentation of particles. The reactive mechanical grinding of Mg-Ni alloy with $Fe_2O_3$ is considered to decrease the particle size.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.619-622
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• 2005

본 논문에서는 서로 다른 Si 두께 ($T_{Si}$ = 27, 50 nm) 를 갖는 SOI (Silicon On Insulator) 기판 위에 다양한 두께의 Ni/Co를 순차적으로 증착한 후 Bulk-Si과의 비교를 통해 Silicide의 형성 특성에 대하여 분석하였다. 우선 급속 열처리 (RTP, Rapid Thermal Processing) 를 통하여 Silicide를 형성한 후 측정결과 Si두께에 따라 Silicide의 특성이 달라짐을 확인하였다. 두꺼운 두께의 Si-film을 갖는 SOI 기판을 사용한 경우 증착된 금속의 두께에 따라 Bulk-Si와 비슷한 면저항 특성을 보였으나, 얇은 두께의 Si-film을 갖는 SOI기판을 사용한 경우에는 제한된 Si의 공급으로 인한 Silicide의 비저항 증가로 인하여 증착된 금속의 두께에 따라 면저항이 감소하다가 다시 증가하는 'V' 자형 곡선을 나타내었다.

• Korean Journal of Microbiology
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• v.38 no.4
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• pp.241-246
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• 2002

A gene coding for endo-$\beta$-1,3-1,4-glucanase of Bacillus circulans was subcloned into Escherichia coli Ml5 using pQE30 as an expression vector. Endo-$\beta$-1,3-1,4-glucanase produced by the recombinant expression plas-mid pLQ43 was intactly purified to a single protein through a nickel-nitrilotriacetic acid (Ni-NTA) metal-affinity chromatography method. The molecular mass of the purified enzyme was estimated to be 28 kDa by SDS-PAGE. The optimum pH and temperature of the enzyme activity were pH 6.8 and $60^{\circ}C$, respectively. This enzyme was fairly stable in the pH ranging 5.5~7.5 and at the temperatures lower than $55^{\circ}C$. The enzyme appeared to be sensitive to most of the metal ions, especially to $Hg^{2＋$, and also to methanol, ethanol, isopropanol or 1-butanol at a concentration of 10%(v/v).

• Restorative Dentistry and Endodontics
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• v.41 no.4
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• pp.304-309
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• 2016

Objectives: The purpose of this study was to compare the maximum screw-in forces generated during the movement of various Nickel-Titanium (NiTi) file systems. Materials and Methods: Forty simulated canals in resin blocks were randomly divided into 4 groups for the following instruments: Mtwo size 25/0.07 (MTW, VDW GmbH), Reciproc R25 (RPR, VDW GmbH), ProTaper Universal F2 (PTU, Dentsply Maillefer), and ProTaper Next X2 (PTN, Dentsply Maillefer, n = 10). All the artificial canals were prepared to obtain a standardized lumen by using ProTaper Universal F1. Screw-in forces were measured using a custom-made experimental device (AEndoS-k, DMJ system) during instrumentation with each NiTi file system using the designated movement. The rotation speed was set at 350 rpm with an automatic 4 mm pecking motion at a speed of 1 mm/sec. The pecking depth was increased by 1 mm for each pecking motion until the file reach the working length. Forces were recorded during file movement, and the maximum force was extracted from the data. Maximum screw-in forces were analyzed by one-way ANOVA and Tukey's post hoc comparison at a significance level of 95%. Results: Reciproc and ProTaper Universal files generated the highest maximum screw-in forces among all the instruments while M-two and ProTaper Next showed the lowest (p < 0.05). Conclusions: Geometrical differences rather than shaping motion and alloys may affect the screw-in force during canal instrumentation. To reduce screw-in forces, the use of NiTi files with smaller cross-sectional area for higher flexibility is recommended.

• Restorative Dentistry and Endodontics
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• v.45 no.3
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• pp.37.1-37.8
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• 2020

Objectives: This study aims to compare the cyclic fatigue resistance of VDW.ROTATE, TruNatomy, 2Shape, and HyFlex CM nickel-titanium (NiTi) rotary files at body temperature. Materials and Methods: In total, 80 VDW.ROTATE (25/0.04), TruNatomy (26/0.04), 2Shape (25/0.04), and HyFlex CM (25/0.04) NiTi rotary files (n = 20 in each group) were subjected to static cyclic fatigue testing at body temperature (37℃) in stainless-steel artificial canals prepared according to the size and taper of the instruments until fracture occurred. The number of cycles to fracture (NCF) was calculated, and the lengths of the fractured fragments were measured. The data were statistically analyzed using a 1-way analysis of variance and post hoc Tamhane tests at the 5% significance level (p < 0.05). Results: There were significant differences in the cyclic fatigue resistance among the groups (p < 0.05), with the highest to lowest NCF values of the files as follows: VDW.ROTATE, HyFlex CM, 2Shape, and TruNatomy. There was no significant difference in the lengths of the fractured fragments among the groups. The scanning electron microscope images of the files revealed typical characteristics of fracture due to cyclic fatigue. Conclusions: The VDW.ROTATE files had the highest cyclic fatigue resistance, and the TruNatomy and 2Shape files had the lowest cyclic fatigue resistance in artificial canals at body temperature.

• Restorative Dentistry and Endodontics
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• v.42 no.3
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• pp.224-231
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• 2017

Objectives: To determine the actual revolutions per minute (rpm) values and compare the cyclic fatigue life of Reciproc (RPC, VDW GmbH), WaveOne (WO, Dentsply Maillefer), and TF Adaptive (TFA, Axis/SybronEndo) nickel-titanium (NiTi) file systems using high-speed camera. Materials and Methods: Twenty RPC R25 (25/0.08), 20 WO Primary (25/0.08), and 20 TFA ML 1 (25/0.08) files were employed in the present study. The cyclic fatigue tests were performed using a dynamic cyclic fatigue testing device, which has an artificial stainless steel canal with a $60^{\circ}$ angle of curvature and a 5-mm radius of curvature. The files were divided into 3 groups (group 1, RPC R25 [RPC]; group 2, WO Primary [WO]; group 3, TF Adaptive ML 1 [TFA]). All the instruments were rotated until fracture during the cyclic fatigue test and slow-motion videos were captured using high-speed camera. The number of cycles to failure (NCF) was calculated. The data were analyzed statistically using one-way analysis of variance (ANOVA, p < 0.05). Results: The slow-motion videos were indicated that rpm values of the RPC, WO, and TFA groups were 180, 210, and 425, respectively. RPC ($3,464.45{\pm}487.58$) and WO ($3,257.63{\pm}556.39$) groups had significantly longer cyclic fatigue life compared with TFA ($1,634.46{\pm}300.03$) group (p < 0.05). There was no significant difference in the mean length of the fractured fragments. Conclusions: Within the limitation of the present study, RPC and WO NiTi files showed significantly longer cyclic fatigue life than TFA NiTi file.