• Title/Summary/Keyword: NiO thin film

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Effect of Oxyfluorination on Electroless Ni Deposition of Carbon Nanotubes (CNTs) and Their EMI Shielding Properties (탄소나노튜브의 무전해 니켈도금 및 전자파 차폐 특성에 미치는 함산소불소화의 영향)

  • Choi, Ye Ji;Lee, Kyeong Min;Yun, Kug Jin;Lee, Young-Seak
    • Applied Chemistry for Engineering
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    • v.30 no.2
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    • pp.212-218
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    • 2019
  • To investigate the effect of the oxyfluorination of carbon nanotubes (OF-CNTs) on electroless Ni deposition and electromagnetic interference shielding efficiency (EMI SE), CNTs were treated with a mixture of oxygen and fluorine gases and sequentially deposited with nickel. These samples were then manufactured into thin films on a polyimide film to evaluate their EMI SE. The surface chemical property of OF-CNTs was investigated by X-ray photoelectron spectroscopy. From the results of thermogravimetric and scanning electron microscopic analyses, it was found that both the amount of deposited Ni and the surface morphology changed depending on oxyfluorination. Moreover, the Ni-deposited CNTs pretreated with $O_2:F_2=1:9vol%$ exhibited the maximum EMI SE as approximately 19.4 dB at 1 GHz. These results were attributed to the formation of oxygen and fluorine functional groups on the surface of CNTs due to the oxyfluorination, and the functional groups enabled to deposit a suitable amount of Ni and improve the dispersion in the deposited solution.

Thermoelectric/electrical characterization of electrodeposited BixTey thin films (전기도금법에 의해 전착된 BixTey 박막의 전기 및 열전 특성)

  • Yu, In-Jun;Lee, Gyu-Hwan;Kim, Yang-Do;Im, Jae-Hong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2012.05a
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    • pp.308-308
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    • 2012
  • Electrodeposition of thermoelectric materials, including binary and ternary compounds, have been attracting attentions, because its many advantages including cost-effectiveness, rapid deposition rate, and ease of control their microstructure and crystallinity by adjusting electrodeposition parameters. In this work, $Bi_xTe_y$ films were potentiostatically electrodeposited using Au/Ni(80/20 nm)/Si substrate as the working electrode in solutions consisting of 10mM $TeO_2$ and 1M $HNO_3$ where $Bi(NO_3)_3$ was varied from 2.5 to 10 mM. Prior to electrodeposition potentiostatically, linear sweep voltammograms (LSV) were acquired with a standard three-electrode cell. The $Bi_xTe_y$ films deposited using the electrolyte containing low Bi ions shows p-type conductivity, which might be attributed by the large incorporation of Te phases. Near stoichiometric $Bi_2Te_3$ thin films were obtained from electrolytes containing 5mM $Bi(NO_3)_3$. This film shows the maximum Seebeck coefficient of $-100.3{\pm}12.7{\mu}V/K$. As the increase of Bi ions in electrolytes decreases the Seebeck coefficient and resistivity. The maximum power factor of $336.2{\mu}W/m{\cdot}K^2$ was obtained from the film deposited using the solution of 7.5mM $Bi(NO_3)_3$.

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Effects of Substrate and Annealing Temperature on the Characteristics of Mn-Ni oxide Thin Films (Mn-Ni계 산화물 박막의 특성에 대한 기판과 열처리 온도의 영향)

  • Kim, Cheol-Su;Cho, Seong-Ho;Lee, Yong-Seong;Cho, Byeong-Ryeol;Kim, Byeong-Su
    • Korean Journal of Materials Research
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    • v.8 no.5
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    • pp.424-428
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    • 1998
  • Mn-Ni oxide thin films for NTC thermistor application were deposited on alumina substrates by using rf magnetron sputter. Effects of various substrate temperatures and annealing temperatures on the microstructure. crystal phase, resistivity and B constant were investigated. Microstructure of the films deposited below 178$^{\circ}C$ was fibrous microcrystalline and at 32$0^{\circ}C$and 40$0^{\circ}C$their microstructure was changed to columnar grain structure. After annealing at 90$0^{\circ}C$, the microstructure was transformed to equiaxed grain structure. Most of the phases were mixture of cubic spinel and $Mn_2O_2$ The crystal phase of the film deposited at 40$0^{\circ}C$ was changed to cubic spinel after annealing above 700"c. As the substrate temperature increased, the resistivity and B constant were greatly decreased, and these values become low and stable after annealing between $600^{\circ}C$and $700^{\circ}C$, All thin films deposited in the present study showed NTC thermistor characteristicsstics.

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Fabrication and Test of the Three-Phase 6.6 kV Resistive Superconducting Fault Current Limiter Using YBCO Thin Films (YBCO 박막을 이용한 3상 6.6kV 저항형 초전도 한류기 제작 및 시험)

  • Sim J.;Kim H. R.;Park K. B.;Kang J. S.;Lee B. W.;Oh I. S.;Hyun O. B.
    • Progress in Superconductivity and Cryogenics
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    • v.6 no.3
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    • pp.50-55
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    • 2004
  • We fabricated and tested a resistive type superconducting fault current limiter (SFCL) of three-phase 6.6 $kV_{rms}/200 A_{rms}$ rating based on YBCO thin films grown on sapphire substrates with a diameter of 4 inches, Short circuit tests were carried out at a accredited test facility for single line-to- ground faults, phase-to-phase faults and three-phase faults, Each phase of the SFCL was composed of 8${\times}$6 elements connected in series and parallel respectively. Each element was designed to have the rated voltage of 600 $V_{rms}$. A NiCr shunt resistor of 23 Ω was connected to each element for simultaneous quenches. Firstly, single phase-to-ground fault tests were carried out. The SFCL successfully developed the impedance in the circuit within 0.12 msec after fault and controlled the fault current of 10 $kA_{rms} below 816 A_{peak}$ at the first half cycle. In addition, in case of phase-to-phase fault and three- phase fault test. simultaneous quenches among the SFCLs of the phases successfully accomplished. In conclusion. the SFCL showed excellent performance of current limitation upon fault and stable operation regardless of the amplitude of fault currents.

Temperature and Gas Sensing Multifunctional Ceramic Sensors (온도 가스 감지 다기능성 세라믹 복합 센서)

  • Moon, Hi-Gyu;Shim, Young-Seok;Kim, Do-Hong;Ryu, Jung-Ho;Kim, Jin-Sang;Park, Hyung-Ho;Park, Dong-Soo;Yoon, Seok-Jin;Jang, Ho-Won
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.8
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    • pp.646-650
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    • 2012
  • Multifunctional structures with two kinds of materials have been intensively investigated in order to improve their electrical characteristic with two functions simultaneously. However, the research regarding of multifunctional ceramic sensor is still in a preliminary stage and how to integrate them with low-cost and high-yield mass production process remains a challenge issue. In this study, we fabricated the multifunctional ceramic sensor composed of temperature and gas sensors. Moreover, we investigated the CO sensing properties of three dimensional nanostuctured $Nb_2O_5$ thin film gas sensors fabricated with silica ($SiO_2$ nanosphere (${\O}$= 750 nm). Compared to plain films, the nanostructured films show enhanced gas sensing of greater sensitivity and a faster response. This result reveals that significantly increased sensitivity is an increase in the effective surface area for the adsorption of gas molecules.

Fabrication of Environmental-friendly Materials Using Atomic Layer Deposition (원자층 증착을 이용한 친환경 소재의 제조)

  • Kim, Young Dok
    • Applied Chemistry for Engineering
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    • v.23 no.1
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    • pp.1-7
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    • 2012
  • In this article, I will introduce recent developments of environmental-friendly materials fabricated using atomic layer deposition (ALD). Advantages of ALD include fine control of the thin film thickness and formation of a homogeneous thin fim on complex-structured three-dimensional substrates. Such advantages of ALD can be exploited for fabricating environmental-friendly materials. Porous membranes such as anodic aluminum oxide (AAO) can be used as a substrate for $TiO_2$ coating with a thickness of about 10 nm, and the $TiO_2$-coated AAO can be used as filter of volatile organic compound such as toluene. The unique structural property of AAO in combination with a high adsorption capacity of amorphous $TiO_2$ can be exploited in this case. $TiO_2$ can be also deposited on nanodiamonds and Ni powder, which can be used as photocatalyst for degradation of toluene, and $CO_2$ reforming of methane catalyst, respectively. One can produce structures, in which the substrates are only partially covered by $TiO_2$ domains, and these structures turns out to be catalytically more active than bare substrates, or complete core-shell structures. We show that the ALD can be widely used not only in the semiconductor industry, but also environmental science.

Study on the Development of RF Magnetron Sputter-Deposition System(I) (RF마그네트론 스퍼터 증착장치 개발연구(I))

  • Kim, Hee-Je;Moon, Dek-Soi;Jin, Yun-Sik;Lee, Hong-Sik
    • Proceedings of the KIEE Conference
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    • 1993.07b
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    • pp.612-614
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    • 1993
  • Sputtering requires a way to bombard the target with sufficient momentum. Positive ions are the most convenient source since their energy and momentum can be controlled by applying a potential to the target. Although many types of discharges have been used for sputtering, magnetrons are now the most widely used because of the high ion current densities. Namely, plasma near the target electrode is confined by magnetic field using permanent magnet, so that the collision probability is increased. It is important to develop RF magnetron sputtering system which has many excellent merits compared with conventional methods. Our study aims to develop 1 kW RF source(13.56 MHz, TR type) and to accumulate the design and construction technology of RF magnetron sputter-deposition system. We developed 1 kW RF sputtering system to deposit thin film. These films are deposited by this RF source matched by auto-matching system using primarily argon gas. Target of Au, Ni, Al, and $SiO_2$ was well deposited on the argon pressure of 5-10 mTorr.

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A Study on Polarization of the Molten Carvonate Fuel Cell (용융탄산염 연료전지의 분극현상 연구)

  • Nam, S.W.;Suh, S.H.;Lim, T.H.;Oh, LH.;Hong, S.A.;Lim, H.C.
    • Journal of Hydrogen and New Energy
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    • v.3 no.2
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    • pp.55-62
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    • 1992
  • To improve the MCFC performance it is important to distingush between polarization losses occuring in the individual electrodes and other components. In this study a current interruption technique has been applied to a MCFC unit cell having a reference electrode to separately study the contributions of IR loss and other polarization losses. At a current density of $150mA/cm^2$ the IR-free polarization of a Ni anode was about 60mV while that of a NiO cathode was 130mV and the Ohmic loss of the cell was as large as 170mV suggesting that both the cathode and the cell structure need further improvement. The thin-film electrode model was used to simulate the performance of the electrodes. Both andoe data and cathode data were successfully fitted.

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Fabrication of Coated Conductor by Continuous PVD Methods (연속 공정 PVD 방법에 의한 Coated Conductor 제조)

  • Ko, Rock-Kil;Chung, Jun-Ki;Kim, Ho-Sup;Ha, Hong-Soo;Shi, Dongqi;Song, Kyu-Jeong;Park, Chan;Yoo, Sang-Im;Moon, Seung-Hyun;Kim, Young-Cheol
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.11
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    • pp.1241-1245
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    • 2004
  • Continuous physical vapor deposition (PVD) method is one of many processes to fabricate long length coated conductor which is required for successful large-scale application of superconducting power devices. Three film deposition systems (pulsed laser deposition, sputtering, and evaporation) equipped with reel-to-reel(R2R) metal tape moving apparatus were installed and used to deposit multi-layer oxide thin films. Both RABiTS and IBAD texture templates are used. IBAD template consists of CeO$_2$(PLD)/YSZ(IBAD) on stainless steel(SS) metal tape, and RABiTS template has the structure of CeO$_2$/YSZ/Y$_2$O$_3$ which was continuously deposited on Ni-alloy tape using R$_2$R evaporation and DC reactive sputtering in a deposition system designed to do both processes. 0.4 m-long coated conductor with Ic(77 K) of 34 A/cm was fabricated using RABiTS template. 0.5 m and 1.1 m-long coated conductor with Ic(77 K) of 41 A/cm and 26 A/cm were fabricated using IBAD template.

Direct Imaging of Polarization-induced Charge Distribution and Domain Switching using TEM

  • O, Sang-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.99-99
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    • 2013
  • In this talk, I will present two research works in progress, which are: i) mapping of piezoelectric polarization and associated charge density distribution in the heteroepitaxial InGaN/GaN multi-quantum well (MQW) structure of a light emitting diode (LED) by using inline electron holography and ii) in-situ observation of the polarization switching process of an ferroelectric Pb(Zr1-x,Tix)O3 (PZT) thin film capacitor under an applied electric field in transmission electron microscope (TEM). In the first part, I will show that strain as well as total charge density distributions can be mapped quantitatively across all the functional layers constituting a LED, including n-type GaN, InGaN/GaN MQWs, and p-type GaN with sub-nm spatial resolution (~0.8 nm) by using inline electron holography. The experimentally obtained strain maps were verified by comparison with finite element method simulations and confirmed that not only InGaN QWs (2.5 nm in thickness) but also GaN QBs (10 nm in thickness) in the MQW structure are strained complementary to accommodate the lattice misfit strain. Because of this complementary strain of GaN QBs, the strain gradient and also (piezoelectric) polarization gradient across the MQW changes more steeply than expected, resulting in more polarization charge density at the MQW interfaces than the typically expected value from the spontaneous polarization mismatch alone. By quantitative and comparative analysis of the total charge density map with the polarization charge map, we can clarify what extent of the polarization charges are compensated by the electrons supplied from the n-doped GaN QBs. Comparison with the simulated energy band diagrams with various screening parameters show that only 60% of the net polarization charges are compensated by the electrons from the GaN QBs, which results in the internal field of ~2.0 MV cm-1 across each pair of GaN/InGaN of the MQW structure. In the second part of my talk, I will present in-situ observations of the polarization switching process of a planar Ni/PZT/SrRuO3 capacitor using TEM. We observed the preferential, but asymmetric, nucleation and forward growth of switched c-domains at the PZT/electrode interfaces arising from the built-in electric field beneath each interface. The subsequent sideways growth was inhibited by the depolarization field due to the imperfect charge compensation at the counter electrode and preexisting a-domain walls, leading to asymmetric switching. It was found that the preexisting a-domains split into fine a- and c-domains constituting a $90^{\circ}$ stripe domain pattern during the $180^{\circ}$ polarization switching process, revealing that these domains also actively participated in the out-of-plane polarization switching. The real-time observations uncovered the origin of the switching asymmetry and further clarified the importance of charged domain walls and the interfaces with electrodes in the ferroelectric switching processes.

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