Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Temperature and Gas Sensing Multifunctional Ceramic Sensors

온도 가스 감지 다기능성 세라믹 복합 센서

  • Moon, Hi-Gyu (Korea Institute of Science and Technology, Electronic Materials Research Center) ;
  • Shim, Young-Seok (Korea Institute of Science and Technology, Electronic Materials Research Center) ;
  • Kim, Do-Hong (Korea Institute of Science and Technology, Electronic Materials Research Center) ;
  • Ryu, Jung-Ho (Korea Institute of Materials Science, Functional Ceramics Research Group) ;
  • Kim, Jin-Sang (Korea Institute of Science and Technology, Electronic Materials Research Center) ;
  • Park, Hyung-Ho (Department of Materials Science and Engineering, Yonsei University) ;
  • Park, Dong-Soo (Korea Institute of Materials Science, Functional Ceramics Research Group) ;
  • Yoon, Seok-Jin (Korea Institute of Science and Technology, Electronic Materials Research Center) ;
  • Jang, Ho-Won (Korea Institute of Science and Technology, Electronic Materials Research Center)
  • 문희규 (한국과학기술연구원 전자재료연구센터) ;
  • 심영석 (한국과학기술연구원 전자재료연구센터) ;
  • 김도홍 (한국과학기술연구원 전자재료연구센터) ;
  • 류정호 (한국기계연구원 부설 재료연구소 기능세라믹연구실) ;
  • 김진상 (한국과학기술연구원 전자재료연구센터) ;
  • 박형호 (연세대학교 신소재공학과) ;
  • 박동수 (한국기계연구원 부설 재료연구소 기능세라믹연구실) ;
  • 윤석진 (한국과학기술연구원 전자재료연구센터) ;
  • 장호원 (한국과학기술연구원 전자재료연구센터)
  • Received : 2012.07.03
  • Accepted : 2012.07.24
  • Published : 2012.08.01
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Abstract

Multifunctional structures with two kinds of materials have been intensively investigated in order to improve their electrical characteristic with two functions simultaneously. However, the research regarding of multifunctional ceramic sensor is still in a preliminary stage and how to integrate them with low-cost and high-yield mass production process remains a challenge issue. In this study, we fabricated the multifunctional ceramic sensor composed of temperature and gas sensors. Moreover, we investigated the CO sensing properties of three dimensional nanostuctured $Nb_2O_5$ thin film gas sensors fabricated with silica ($SiO_2$ nanosphere (${\O}$= 750 nm). Compared to plain films, the nanostructured films show enhanced gas sensing of greater sensitivity and a faster response. This result reveals that significantly increased sensitivity is an increase in the effective surface area for the adsorption of gas molecules.

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References

  1. S. W. Kwon and J. H. Won, The Institute of Electronics Engineers of Korea, 42, 1, (2005).
  2. J, E. Jung, H. U. Lee, and S. P. Lee, J. KIEEME, 16, 368 (2003).
  3. N. Yamazoe and Y. Shimizu, Sensor. Actuat., B10, 379 (1986).
  4. N. Yamazoe, Y. Kurokawa, and T. Seiyama, Sensor. Actuat., B4, 283 (1983).
  5. T. Y. Yang, H. M Lin, B. Y. Wei, C. Y. Wu, and C. K. Lin, Rev. Adv. Mater. Sci., 4, 48 (2003).
  6. J. M. A. Almeida, C. T. Meneses, A. S. de Menezes, R. F. Jardim, and J. M. Sasaki. J. Magn. Magn. Mater., 320, 304 (2008). https://doi.org/10.1016/j.jmmm.2007.06.005
  7. B. Wang, L. F. Zhu, Y. H. Yang, N. S. Xu, and G. W. Yang, J. Phys. Chem., C112, 6643 (2008).
  8. G. H. Lu, J. Nanomaterials, 7 (2006).
  9. I. D. Kim, A. Rothschild, T. Hyodo, and H. L. Tuller, Nano Lett., 6, 193 (2006). https://doi.org/10.1021/nl051965p
  10. H. G. Moon, H. W. Jang, J. S. Kim, H. H. Park, and S. J. Yoon, Electron. Mater. Lett., 39, 31 (2009).