• Title/Summary/Keyword: NdFeB 자석

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Effect of buffer layer on the microstructure and magnetic properties of NdFeB thin films (NdFeB 박막의 자기적 특성 및 미세구조에 미치는 buffer layer의 영향)

  • ;;;G. A. Kapustin
    • Proceedings of the Korean Magnestics Society Conference
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    • 2002.12a
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    • pp.234-235
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    • 2002

  • NdFeB 박막자석은 Sputtering, MBE, Laser ablation법에 의해 제조되고 있으며[1-3] milli-size motor[4], magnetic recording media[5], micro-patterning[3]등에 응용될 수 있다. 최근에는 MEMS(Micro-electro mechanical system)분야에서도 잠재적 응용가능성을 지니고 있는 것으로 알려져 있다. 최근에는 NdFeB 박막 제조 시 자성층의 산화방지 및 자기 특성을 향상을 위하여 buffer layer를 이용한 많은 연구가 이루어지고 있다.[6] (중략)

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Magnetic properties of NdEeB thin films with perpendicular anisotropy (수직자기이방성 NdFeB 박막자석의 자기특성)

  • 김만중;유권상;양재호;김윤배;김택기
    • Journal of the Korean Magnetics Society
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    • v.10 no.6
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    • pp.280-294
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    • 2000

  • [(300nm)Ta/(500nm)NdFeB/(300nm)Ta] thin films were deposited at 5 mTorr Ag gas pressure by RF-DC magnetron sputtering, and their magnetic properties were investigated. The [Ta/NdFeB/Ta] films deposited on heated Si substrates showed high perpendicular anisotropy and excellent hard magnetic properties. The films sputtered at tile substrate temperature of T$\sub$s/=650$^{\circ}C$ and 700$^{\circ}C$ showed (BH)$\sub$max/=20 MGOe and $\sub$i/H$\sub$c/= 18.9 kOe along the perpendicular direction to the film plane, respectively.

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