• 제목/요약/키워드: Nano-thickness

검색결과 842건 처리시간 0.021초

급속열처리를 통한 알루미나 나노템플릿의 기공 균일도 개선에 관한 연구 (A Study on Improved Pore Uniformity of Nano Template Using the Rapid Thermal Processor)

  • 김동희;김진광;권오대;양계준;이재형;임동건
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.637-638
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    • 2005
  • AAO templates were fabricated using a two-step anodization process with pretreatment such as electro polishing and annealing. To reduce process time and get well-aligned pore array, rapid thermal processor by an halogen lamp was employed in vacuum state at $500^{\circ}C$ for various time. The pore array of AAO template annealed at $500^{\circ}C$ for 2 h is comparable to a template annealed in conventional furnace at $500^{\circ}C$ for 30 h. The well-fabricated AAO template has the mean pore diameter of 70 nm, the barrierlayer thickness of 25 nm, and the pore depth of $9{\mu}m$. And the pore density can be as high as $2.0\times10^{10}cm^{-2}$.

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MPCVD법으로 증착된 다이아몬드 박막 특성에 미치는 메탄가스의 영향 (Effect of Methane Gases on the Properties of Diamond Thin Films Synthesized by MPCVD)

  • 송진수;남태운
    • 한국전기전자재료학회논문지
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    • 제24권3호
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    • pp.229-233
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    • 2011
  • Diamond thin films were deposited on pretreated Co cemented tungsten carbide (WC-6%Co) inserts as substrate by microwave plasma chemical vapor deposition (MPCVD) system, equipped with a 915MHz, 30kW generator for generating a large-size plasma. The substrates were pretreated with two solutions Murakami solution $[KOH:K_3Fe(CN)_6:H_2O]$ and nitric solution $[HNO_3:H_2O]$ to etch, WC and Co at cemented carbide substrates, respectively. The deposition experiments were performed at an input power of 10 kW and in a total pressure of 100 torr. The influence of various $CH_4$ contents on the crystallinity and morphology of the diamond films deposited in MPCVD was investigated using scanning electron microscopy (SEM) and Raman spectroscopy. The diamond film synthesized by the $CH_4$ plasma shows a triangle-faceted (111) diamond. As $CH_4$ contents was increased, the thickness of diamond films increased and the faceted planes disappeared. Finally, Faceted diamond changed into nano-crystalline diamond with random crystallinity.

Atomic Layer Deposition for Display Applications

  • Park, Jin-Seong
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.76.1-76.1
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    • 2013
  • Atomic Layer Deposition (ALD) has remarkably developed in semiconductor and nano-structure applications since early 1990. Now, the advantages of ALD process are well-known as controlling atomic-level-thickness, manipulating atomic-level-composition control, and depositing impurity-free films uniformly. These unique properties may accelerate ALD related industries and applications in various functional thin film markets. On the other hand, one of big markets, Display industry, just starts to look at the potential to adopt ALD functional films in emerging display applications, such as transparent and flexible displays. Unlike conventional ALD process strategies (good quality films and stable precursors at high deposition processes), recently major display industries have suggested the following requirements: large area equipment, reasonable throughput, low temperature process, and cost-effective functional precursors. In this talk, it will be mentioned some demands of display industries for applying ALD processes and/or functional films, in terms of emerging display technologies. In fact, the AMOLED (active matrix organic light emitting diode) Television markets are just starting at early 2013. There are a few possibilities and needs to be developing for AMOLED, Flexible and transparent Display markets. Moreover, some basic results will be shown to specify ALD display applications, including transparent conduction oxide, oxide semiconductor, passivation and barrier films.

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다층광학필름에서 마이크로패턴 삽입을 통한 색 조정 연구 (Color Adjustment Study by Micro-Pattern Embedding in Optical Multilayer Thin Film)

  • 김민;우주연;윤준호;황보창권;한창수
    • 한국정밀공학회지
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    • 제33권5호
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    • pp.409-417
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    • 2016
  • It is well known that Morpho butterflies show distinctive, brilliant and iridescent colors and have micro-nano scale structures, instead of dyes and pigments, on their wings. This structural coloration is regarded as a novel technique to express color with a long lifetime, ease and precise tenability. Here, we studied optical multilayer thin films with thickness of several tens of nm ($TiO_2$ and $SiO_2$) and lens-shape micro-patterns. Fabrication and characterization of the multilayer stacking structure and the micro-pattern structure were performed and the films were analyzed via several optical measuring techniques. Finally, we discussed how the micro-pattern structure could enhance independence with color changes according to the viewing angle.

에어로졸 증착법에 의한 압전 PZT 후막의 제조 (Fabrication of piezoelectric PZT thick film by aerosol deposition method)

  • 김기훈;방국수;박찬
    • 한국해양공학회지
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    • 제27권6호
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    • pp.95-99
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    • 2013
  • Lead zirconate titanate (PZT) thick films with a thickness of $10-20{\mu}m$ were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of $1-2{\mu}m$, was observed using SEM. The average diameter ($d_{50}$) was $1.1{\mu}m$. An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-deposited film with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of $700^{\circ}C$. A 20-${\mu}m$ thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.

Low-velocity impact response of laminated FG-CNT reinforced composite plates in thermal environment

  • Ebrahimi, Farzad;Habibi, Sajjad
    • Advances in nano research
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    • 제5권2호
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    • pp.69-97
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    • 2017
  • In this study, nonlinear response of laminated functionally graded carbon nanotube reinforced composite (FG-CNTRC) plate under low-velocity impact based on the Eshelby-Mori-Tanaka approach in thermal conditions is studied. The governing equations are derived based on higher-order shear deformation plate theory (HSDT) under von $K\acute{a}rm\acute{a}n$ geometrical nonlinearity assumptions. The finite element method with 15 DOF at each node and Newmark's numerical integration method is applied to solve the governing equations. Four types of distributions of the uniaxially aligned reinforcement material through the thickness of the plates are considered. Material properties of the CNT and matrix are assumed to be temperature dependent. Contact force between the impactor and the laminated plate is obtained with the aid of the modified nonlinear Hertzian contact law models. In the numerical example, the effect of layup (stacking sequence) and lamination angle as well as the effect of temperature variations, distribution of CNTs, volume fraction of the CNTs, the mass and the velocity of the impactor in a constant energy level and boundary conditions on the impact response of the CNTRC laminated plates are investigated in details.

Influence of porosity and axial preload on vibration behavior of rotating FG nanobeam

  • Ehyaei, Javad;Akbarshahi, Amir;Shafiei, Navvab
    • Advances in nano research
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    • 제5권2호
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    • pp.141-169
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    • 2017
  • In this paper, a nanobeam connected to a rotating molecular hub is considered. The vibration behavior of rotating functionally graded nanobeam based on Eringen's nonlocal theory and Euler-Bernoulli beam model is investigated. Furthermore, axial preload and porosity effect is studied. It is supposed that the material attributes of the functionally graded porous nanobeam, varies continuously in the thickness direction according to the power law model considering the even distribution of porosities. Porosity at the nanoscopic length scale can affect on the rotating functionally graded nanobeams dynamics. The equations of motion and the associated boundary conditions are derived through the Hamilton's principle and generalized differential quadrature method (GDQM) is utilized to solve the equations. In this paper, the influences of some parameters such as functionally graded power (FG-index), porosity parameter, axial preload, nonlocal parameter and angular velocity on natural frequencies of rotating nanobeams with pure ceramic, pure metal and functionally graded materials are examined and some comparisons about the influence of various parameters on the natural frequencies corresponding to the simply-simply, simplyclamped, clamped-clamped boundary conditions are carried out.

Finite element based post-buckling analysis of refined graphene oxide reinforced concrete beams with geometrical imperfection

  • Mirjavadi, Seyed Sajad;Forsat, Masoud;Yahya, Yahya Zakariya;Barati, Mohammad Reza;Jayasimha, Anirudh Narasimamurthy;Khan, Imran
    • Computers and Concrete
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    • 제25권4호
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    • pp.283-291
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    • 2020
  • The present paper researches post-buckling behaviors of geometrically imperfect concrete beam resting on elastic foundation reinforced with graphene oxide powders (GOPs) based on finite element method (FEM). Distribution of GOPs are considered as uniform and linearly graded through the thickness. Geometric imperfection is considered as first buckling mode shape of the beam, the GOP reinforced beam is rested in initial position. The material properties of GOP reinforced composite have been calculated via employment of Halpin-Tsai micromechanical scheme. The provided refined beam element verifies the shear deformation impacts needless of any shear correction coefficient. The post-buckling load-deflections relations have been calculated via solving the governing equations having cubic non-linearity implementing FEM. Obtained findings indicate the importance of GOP distributions, GOP weight fraction, matrix material, geometric imperfection, shear deformation and foundation parameters on nonlinear buckling behavior of GOP reinforced beam.

Exact solution for dynamic response of size dependent torsional vibration of CNT subjected to linear and harmonic loadings

  • Hosseini, Seyyed A.H.;Khosravi, Farshad
    • Advances in nano research
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    • 제8권1호
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    • pp.25-36
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    • 2020
  • Rotating systems concern with torsional vibration, and it should be considered in vibration analysis. To do this, the time-dependent torsional vibrations in a single-walled carbon nanotube (SWCNT) under the linear and harmonic external torque, are investigated in this paper. Eringen's nonlocal elasticity theory is considered to demonstrate the nonlocality and constitutive relations. Hamilton's principle is established to derive the governing equation of motion and consequently related boundary conditions. An analytical method, called the Galerkin method, is utilized to discretize the driven differential equations. Linear and harmonic torsional loads, along with determined amplitude, are applied to the SWCNT as the external torques. SWCNT is considered under the clamped-clamped end supports. In free vibration, analysis of small scale effect reveals the capability of natural frequencies in different modes, and this results desirably are in coincidence with another study. The forced torsional vibration in the time domain, especially for carbon nanotubes, has not been done before in the previous works. The previous forced studies were devoted to the transverse vibrations. It should be emphasized that the dynamical analysis of torsion is novel, workable, and at the beginning of the path. The variations of nonlocal parameter, CNT's thickness, and the influence of excitation frequency on time-dependent angular displacement and nondimensional angular displacement are investigated in the context.

저온 원자층 증착으로 형성된 ZnO 박막의 물성과 결정성 연구 (Crystallized Nano-thick ZnO Films with Low Temperature ALD Process)

  • 유병관;한정조;송오성
    • 대한금속재료학회지
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    • 제48권12호
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    • pp.1109-1115
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    • 2010
  • ZnO thin films were deposited on Si(100) substrates at low temperatures ($44^{\circ}C{\sim}210^{\circ}C$) by atomic layer deposition using DEZn (diethyl zinc) and water as precursors. The film thickness was measured by ellipsometry calibrated with cross-sectional TEM. The phase formation, microstructure evolution, UV-absorbance, and chemical composition changes were examined by XRD, SEM, AFM, TEM, UV-VIS-NIR, and AES, respectively. A uniform amorphous ZnO layer was formed even at $44^{\circ}C$ while stable crystallized ZnO films were deposited above $90^{\circ}C$. All the samples showed uniform surface roughness below 3 nm. Fully crystallized ZnO layers with a band-gap of 3.37 eV without carbon impurities can be formed at substrate temperatures of less than $90^{\circ}C$.