• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.118-118
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• 2011

The Nano-Floating Gate Memory(NFGM) devices with ZnO:Cu thin film embedded in Al2O3 and AlOx-SAOL were fabricated and the electrical characteristics were evaluated. To further improve the scaling and to increase the program/erase speed, the high-k dielectric with a large barrier height such as Al2O3 can also act alternatively as a blocking layer for high-speed flash memory device application. The Al2O3 layer and AlOx-SAOL were deposited by MLD system and ZnO:Cu films were deposited by ALD system. The tunneling layer which is consisted of AlOx-SAOL were sequentially deposited at $100^{\circ}C$. The floating gate is consisted of ZnO films, which are doped with copper. The floating gate of ZnO:Cu films was used for charge trap. The same as tunneling layer, floating gate were sequentially deposited at $100^{\circ}C$. By using ALD process, we could control the proportion of Cu doping in charge trap layer and observe the memory characteristic of Cu doping ratio. Also, we could control and observe the memory property which is followed by tunneling layer thickness. The thickness of ZnO:Cu films was measured by Transmission Electron Microscopy. XPS analysis was performed to determine the composition of the ZnO:Cu film deposited by ALD process. A significant threshold voltage shift of fabricated floating gate memory devices was obtained due to the charging effects of ZnO:Cu films and the memory windows was about 13V. The feasibility of ZnO:Cu films deposited between Al2O3 and AlOx-SAOL for NFGM device application was also showed. We applied our ZnO:Cu memory to thin film transistor and evaluate the electrical property. The structure of our memory thin film transistor is consisted of all organic-inorganic hybrid structure. Then, we expect that our film could be applied to high-performance flexible device.----못찾겠음......

• 마이크로전자및패키징학회지
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• 제12권2호
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• pp.149-154
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• 2005

궁극적으로 게이트를 저저항 복합 실리사이드로 대체하는 가능성을 확인하기 위해 70 nm 두께의 폴리실리콘 위에 각 20nm의 Ni, Co를 열증착기로 적층순서를 달리하여 poly/Ni/Co, poly/Co/Ni구조를 만들었다. 쾌속열처리기를 이용하여 실리사이드화 열처리를 40초간 $700{\~}1100^{\circ}C$ 범위에서 실시하였다. 복합 실리사이드의 온도별 전기저항변화, 두께변화, 표면조도변화를 각각 사점전기저항측정기와 광발산주사전자현미경, 주사탐침현미경으로 확인하였다. 적층순서와 관계없이 폴리실리콘으로부터 제조된 복합실리사이드는 $800^{\circ}C$ 이상부터 급격한 고저항을 보이고, 두께도 급격히 얇아졌다. 두께의 감소는 기존의 단결정에서는 없던 현상으로 폴리실리콘의 두께가 한정된 경우 금속성분의 inversion 현상이 커서 폴리실리콘이 오히려 실리사이드 상부에 위치하여 제거되기 때문이라고 생각되었고 $1000^{\circ}C$ 이상에서는 실리사이드가 형성되지 못하였다. 이러한 결과는 나노급 두께의 게이트를 저저항 실리사이드로 만 들기 위해서는 inversion과 두께감소를 고려하여야 함을 의미하였다.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2002년도 춘계 기술심포지움 논문집
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• pp.193-197
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• 2002

The tribological properties and van der Waals attractive forces and the thermal stability of films are very important characteristics of highly hydrophobic fluorocarbon (FC) films for the long-term reliability of nano system. The effect of thermal annealing on films and van der Waals attractive forces and friction coefficient of films have been investigate d in this study. It was coated Al wafer which was treated O2 and Ar that ocatfluorocyclobutane ($C_4_{8}$) and Ar were supplied to the CVD chamber in the ratio of 2:3 for deposition of FC Films. Static contact angle and dynamic contact angle were used to characterize FC films. Thickness of films was measured by variable angle spectroscopy ellipsometer (VASE). Nanotribological data was got by atomic force microscopy (AFM) to measure roughness, lateral force microscopy (LFM) to measure friction force, and force vs. distance (FD) curve to evaluate adhesion force. FC films were cured in N2 and vacuum. The film showed the slight changes in its properties after 3 hr annealing. FTIR ATR studies showed the decrease of C-F peak intensity in the spectra as the annealing time increased. A significant decrease of film thickness has been observed. The friction force of Al surface was at least thirty times higher than ones with FC films. The adhesive force of bare Al was greater than 100 nN. After deposit FC films adhesive force was decreased to 40 nN. The adhesive force of films was decreased down to 10 nN after 24 hr annealing. During 24 hr annealing in $N_2$and vacuum at $100^{\circ}C$ film properties were not changed so much.

• 폴리머
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• 제33권6호
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• pp.620-624
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• 2009

의료용 금속 임플란트는 우수한 기계적 강도를 바탕으로 결손된 신체 부위의 보강, 대치, 회복을 위해 임상적으로 사용되고 있지만, 낮은 생체적합성 및 독성 때문에 염증 및 후기 혈전증, 재협착의 문제점을 가지고 있다. 이런 단점을 보안하기 위한 다양한 표면처리 기술 중, 본 연구에서는 금속표면에 생분해성 고분자인 poly (lactic-co-glycolic acid) (PLGA)를 이용하여 전기분사 코팅(electrospray coating) 기술을 검토하였다. 전기분사와 용액 인자들의 기초적인 조사를 바탕으로, 코팅 필름의 표면형상은 방울이 날아가는 거리, 용매의 비등점, 방울의 크기에 밀접한 관련이 있다. 고분자 필름의 두께는 분사량에 선형적으로 비례를 하였다. 이 결과는 전기분사된 고분자 방울이 계속적으로 고분자 필름 위에 적층되는 것을 보여준다. 따라서, 전기분사 코팅기술은 스텐트와 같은 의료용 금속 임플란트에 있어서 표면 형상 조절, 나노/마이크로 두께의 단/다중층의 고분자 필름을 제조하는데 적용될 수 있다.

• Smart Structures and Systems
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• 제20권6호
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• pp.709-728
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• 2017

This disquisition proposes a nonlocal strain gradient beam theory for thermo-mechanical dynamic characteristics of embedded smart shear deformable curved piezoelectric nanobeams made of porous electro-elastic functionally graded materials by using an analytical method. Electro-elastic properties of embedded curved porous FG nanobeam are assumed to be temperature-dependent and vary through the thickness direction of beam according to the power-law which is modified to approximate material properties for even distributions of porosities. It is perceived that during manufacturing of functionally graded materials (FGMs) porosities and micro-voids can be occurred inside the material. Since variation of pores along the thickness direction influences the mechanical and physical properties, so in this study thermo-mechanical vibration analysis of curve FG piezoelectric nanobeam by considering the effect of these imperfections is performed. Nonlocal strain gradient elasticity theory is utilized to consider the size effects in which the stress for not only the nonlocal stress field but also the strain gradients stress field. The governing equations and related boundary condition of embedded smart curved porous FG nanobeam subjected to thermal and electric field are derived via the energy method based on Timoshenko beam theory. An analytical Navier solution procedure is utilized to achieve the natural frequencies of porous FG curved piezoelectric nanobeam resting on Winkler and Pasternak foundation. The results for simpler states are confirmed with known data in the literature. The effects of various parameters such as nonlocality parameter, electric voltage, coefficient of porosity, elastic foundation parameters, thermal effect, gradient index, strain gradient, elastic opening angle and slenderness ratio on the natural frequency of embedded curved FG porous piezoelectric nanobeam are successfully discussed. It is concluded that these parameters play important roles on the dynamic behavior of porous FG curved nanobeam. Presented numerical results can serve as benchmarks for future analyses of curve FG nanobeam with porosity phases.

• Advances in nano research
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• 제8권1호
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• pp.83-94
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• 2020

An analytical formulation and solution process for the buckling analysis of porous magneto-electro-elastic functionally graded (MEE-FG) beam via different thermal loadings and various boundary conditions is suggested in this paper. Magneto electro mechanical coupling properties of FGM beam are taken to vary via the thickness direction of beam. The rule of power-law is changed to consider inclusion of porosity according to even and uneven distribution. Pores possibly occur inside FGMs due the result of technical problems that lead to creation of micro-voids in these materials. Change in pores along the thickness direction stimulates the mechanical and physical properties. Four-variable tangential-exponential refined theory is employed to derive the governing equations and boundary conditions of porous FGM beam under magneto-electrical field via Hamilton's principle. An analytical model procedure is adopted to achieve the non-dimensional buckling load of porous FG beam exposed to magneto-electrical field with various boundary conditions. In order to evaluate the influence of thermal loadings, material graduation exponent, coefficient of porosity, porosity distribution, magnetic potential, electric voltage and boundary conditions on the critical buckling temperature of the beam made of magneto electro elastic FG materials with porosities a parametric study is presented. It is concluded that these parameters play remarkable roles on the buckling behavior of porous MEE-FG beam. The results for simpler states are proved for exactness with known data in the literature. The proposed numerical results can serve as benchmarks for future analyses of MEE-FG beam with porosity phases.

• Nuclear Engineering and Technology
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• 제53권8호
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• pp.2629-2639
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• 2021

Within the frame of the EMPIrE test, four monolithic mini-plates were irradiated in the ATR reactor. In two of them, the monolithic U(Mo) foil had been PVD-coated with Zr before the plate manufacturing. Extensive microstructural characterizations were performed on a fresh archive mini-plate, using Optical Microscopy (OM), Scanning Electron Microscopy (SEM) combined with Energy Dispersive Spectroscopy (EDS), Electron Backscattered Diffraction (EBSD) and Focused Ion Beam (FIB)/Transmission Electron Microscopy (TEM) with nano EDS. A particular attention was paid to the examination of the U(Mo) foil, the PVD coating, the cladding/Zr and Zr/U(Mo) interfaces. The Zr coating has a thickness around 15 ㎛. It has a columnar microstructure and appears dense. The cohesion of the cladding/Zr and Zr/U(Mo) interfaces seems to be satisfactory. An almost continuous layer with a thickness of the order of 100-300 nm is present at the cladding/Zr interface and corresponds to an oxidized part of the Zr coating. At the Zr/U(Mo) interface, a thin discontinuous layer is observed. It could correspond to locally oxidized U(Mo). This work provides a basis for interpreting the results of characterizations on EMPIrE irradiated plates.

• Advances in nano research
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• 제7권5호
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• pp.293-310
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• 2019

In this paper, thermal-buckling behavior of the functionally graded (FG) nanocomposite plates reinforced with graphene oxide powder (GOP) is studied under three types of thermal loading once the plate is supposed to be rested on a two-parameter elastic foundation. The effective material properties of the nanocomposite plate are considered to be graded continuously through the thickness according to the Halpin-Tsai micromechanical scheme. Four types of GOPs' distribution namely uniform (U), X, V and O, are considered in a comparative way in order to find out the most efficient model of GOPs' distribution for the purpose of improving the stability limit of the structure. The governing equations of the plate have been derived based on a refined higher-order shear deformation plate theory incorporated with Hamilton's principle and solved analytically via Navier's solution for a simply supported GOP reinforced (GOPR) nanocomposite plate. Some new results are obtained by applying different thermal loadings to the plate according to the GOPs' negative coefficient of thermal expansion and considering both Winkler-type and Pasternak-type foundation models. Besides, detailed parametric studies have been carried out to reveal the influences of the different types of thermal loading, weight fraction of GOP, aspect and length-to-thickness ratios, distribution type, elastic foundation constants and so on, on the critical buckling load of nanocomposite plates. Moreover, the effects of thermal loadings with various types of temperature rise are investigated comparatively according to the graphical results. It is explicitly shown that the buckling behavior of an FG nanocomposite plate is significantly influenced by these effects.

• 대한금속재료학회지
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• 제49권4호
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• pp.321-328
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• 2011

The 30 nm-thick Ni layers was deposited on a flexible polyimide substrate with an e-beam evaporation. Subsequently, we deposited a Si layer using a catalytic CVD (Cat-CVD) in a hydride amorphous silicon (${\alpha}$-Si:H) process of $T_{s}=180^{\circ}C$ with varying thicknesses of 55, 75, 145, and 220 nm. The sheet resistance, phase, degree of the crystallization, microstructure, composition, and surface roughness were measured by a four-point probe, HRXRD, micro-Raman spectroscopy, FE-SEM, TEM, AES, and SPM. We confirmed that our newly proposed Cat-CVD process simultaneously formed both NiSi and crystallized Si without additional annealing. The NiSi showed low sheet resistance of < $13{\Omega}$□, while carbon (C) diffused from the substrate led the resistance fluctuation with silicon deposition thickness. HRXRD and micro-Raman analysis also supported the existence of NiSi and crystallized (>66%) Si layers. TEM analysis showed uniform NiSi and silicon layers, and the thickness of the NiSi increased as Si deposition time increased. Based on the AES depth profiling, we confirmed that the carbon from the polyimide substrate diffused into the NiSi and Si layers during the Cat-CVD, which caused a pile-up of C at the interface. This carbon diffusion might lessen NiSi formation and increase the resistance of the NiSi.

• 한국전기전자재료학회논문지
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• 제35권3호
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• pp.281-291
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• 2022

Global warming is accelerating due to the use of fossil fuels that have been used continuously for centuries. Now, humankind recognizes its seriousness, and is conducting research on searching for eco-friendly and sustainable energy. In the field of solar energy, which is a kind of eco-friendly and sustainable, many studies are being conducted to enhance the output performance of the module. In this study, the output improvement for the shingled module structure was studied. In order to improve the output performance of the module, the thickness of the encapsulant was increased, and the lamination process conditions have been improved accordingly. After that, the crosslinking rate was analyzed, and the suitability of the lamination process conditions was judged using this. In addition, a peeling test was conducted to analyze the correlation between the adhesion of the encapsulant and the output performance of the module. Finally, the optimization for the encapsulant material and the lamination process conditions for high-power shingled modules was established, and accordingly, the market share of high-power shingled modules in the solar module market can be expected to rise.