Nitrogen concentration effect and Thin film thickness effect of tungsten - Boron - carbon - nitride thin film for diffusion barrier (W-B-C-N 확산방지막의 질소 불순물의 영향과 박막의 두께에 따른 열확산 특성 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2007.11a
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- pp.173-174
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- 2007